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多晶硅薄膜高温退火特性研究分析
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作者 赵杰 李晨 《微电子学》 CAS CSCD 北大核心 2006年第2期167-170,共4页
利用原子力显微镜、二次离子质谱分析仪和探针,对多晶硅薄膜的高温退火特性进行了实验研究。研究结果表明,多晶硅薄膜退火时出现的第二次反退火阶段,其物理起因是由于注入杂质在薄膜中的再分布;而在更高退火温度下,多晶硅薄膜会出现晶... 利用原子力显微镜、二次离子质谱分析仪和探针,对多晶硅薄膜的高温退火特性进行了实验研究。研究结果表明,多晶硅薄膜退火时出现的第二次反退火阶段,其物理起因是由于注入杂质在薄膜中的再分布;而在更高退火温度下,多晶硅薄膜会出现晶粒再结晶和再结晶弛豫过程,这些过程都会影响多晶硅薄膜的薄层电阻。 展开更多
关键词 多晶硅薄膜 高温退火 反退火
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Multilayered Ti-Al intermetallic sheets fabricated by cold rolling and annealing of titanium and aluminum foils 被引量:14
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作者 孙彦波 赵业青 +3 位作者 张迪 刘翠云 刁浩岩 马朝利 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2011年第8期1722-1727,共6页
Multilayered Ti-Al based intermetallic sheets were fabricated by sintering alternately layered titanium and aluminum foils.The microstructure and phase formation of the obtained sheets under different sintering condit... Multilayered Ti-Al based intermetallic sheets were fabricated by sintering alternately layered titanium and aluminum foils.The microstructure and phase formation of the obtained sheets under different sintering conditions were evaluated by various techniques.The results reveal that when the sintering temperature is above the melting point of aluminum,the self-propagating high-temperature synthesis reaction occurs between Ti and Al,and forms various phases of Ti-based solid solutions including α-Ti Ti3Al,TiAl,TiAl2 and α-Ti including TiAl3,etc.When the sintering time increased,Ti-based solid solution,TiAl2 and TiAl3 disappeared gradually,and the sheet containing Ti3Al and TiAl phases in a multilayered structure formed finally.A lot of voids were also observed in the sintered structures,which were caused by the melting Al,Kirkendall effect and the difference of molar volumes between reactants and products.The voids were eliminated and a dense sample was obtained by the following hot press. 展开更多
关键词 multilayered composites Ti-Al based intermetallics self-propagating high-temperature synthesis voids cold rolling ANNEALING
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电子辐照改善可控硅触发性能的研究 被引量:1
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作者 陈祖良 李兆龙 +4 位作者 岳巍 王华明 何明明 毛咏甬 项延赵 《能源工程》 2015年第1期1-6,共6页
应用电子束射线对单向微触发可控硅晶圆片进行不同条件的辐照,使用晶体管图示仪测试其门极触发电流和通态电压,研究了辐照剂量、剂量率对门极触发电流和通态电压的影响,使用不同的退火工艺对辐照后的可控硅进行退火实验,监测其退火后参... 应用电子束射线对单向微触发可控硅晶圆片进行不同条件的辐照,使用晶体管图示仪测试其门极触发电流和通态电压,研究了辐照剂量、剂量率对门极触发电流和通态电压的影响,使用不同的退火工艺对辐照后的可控硅进行退火实验,监测其退火后参数的变化。实验表明,门极触发电流随辐照剂量的增加而迅速增大,辐照剂量在20 k Gy以下时,通态电压基本没有增加;门极触发电流在可控硅约225℃以下退火时,存在反退火现象,继续提高退火温度又表现出正常的退火结果;1.5 Me V电子辐照技术不仅能有效提高可控硅门极触发电流,还能提高晶圆片门极触发电流的一致性。 展开更多
关键词 可控硅 电子辐照 门极触发电流 通态电压 反退火
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2D multi-scale hybrid optimization method for geophysical inversion and its application 被引量:2
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作者 潘纪顺 王新建 +4 位作者 张先康 徐朝繁 Zhao Ping 田晓峰 潘素珍 《Applied Geophysics》 SCIE CSCD 2009年第4期337-348,394,共13页
Local and global optimization methods are widely used in geophysical inversion but each has its own advantages and disadvantages. The combination of the two methods will make it possible to overcome their weaknesses. ... Local and global optimization methods are widely used in geophysical inversion but each has its own advantages and disadvantages. The combination of the two methods will make it possible to overcome their weaknesses. Based on the simulated annealing genetic algorithm (SAGA) and the simplex algorithm, an efficient and robust 2-D nonlinear method for seismic travel-time inversion is presented in this paper. First we do a global search over a large range by SAGA and then do a rapid local search using the simplex method. A multi-scale tomography method is adopted in order to reduce non-uniqueness. The velocity field is divided into different spatial scales and velocities at the grid nodes are taken as unknown parameters. The model is parameterized by a bi-cubic spline function. The finite-difference method is used to solve the forward problem while the hybrid method combining multi-scale SAGA and simplex algorithms is applied to the inverse problem. The algorithm has been applied to a numerical test and a travel-time perturbation test using an anomalous low-velocity body. For a practical example, it is used in the study of upper crustal velocity structure of the A'nyemaqen suture zone at the north-east edge of the Qinghai-Tibet Plateau. The model test and practical application both prove that the method is effective and robust. 展开更多
关键词 MULTI-SCALE seismic travel-time tomography hybrid optimization method INVERSION A'nyemaqen suture zone
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零偏退火与反偏退火对含氢的Au/n-Si肖特基势垒的控制
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作者 元民华 乔永平 +2 位作者 宋海智 金泗轩 秦国刚 《物理学报》 SCIE EI CAS CSCD 北大核心 1994年第6期1017-1023,共7页
〈111〉晶向的掺磷的n型硅外延片经等离子进氢后连同未经等离子氢处理的对比片一起淀积金,制得Au/n-Si肖特基势垒。实验结果表明:氢能使Au/n-Si的肖特基势垒高度下降0.13eV;含氢的肖特基势垒的高度可以被零... 〈111〉晶向的掺磷的n型硅外延片经等离子进氢后连同未经等离子氢处理的对比片一起淀积金,制得Au/n-Si肖特基势垒。实验结果表明:氢能使Au/n-Si的肖特基势垒高度下降0.13eV;含氢的肖特基势垒的高度可以被零偏退火与反偏退火所控制,即零偏退火使含氢的肖特基势垒的高度降低,而反偏退火使含氢的肖特基势垒的高度升高;而且零偏退火与反偏退火对肖特基势垒高的这种控制作用至少在三个循环过程中是可逆的。在反偏退火以后,含氢的肖特基势垒的高度升高的数值不仅与退火时所应用的偏置电压有关,而且与退火温度也有关。 展开更多
关键词 肖特基势垒 零偏退火 退火
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全喷墨打印的大面积柔性CH_(3)NH_(3)PbI_(3)钙钛矿太阳能电池 被引量:4
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作者 高博文 孟婧 《物理学报》 SCIE EI CAS CSCD 北大核心 2021年第20期392-399,共8页
目前基于喷墨打印制备大面积CH_(3)NH_(3)PbI_(3)钙钛矿型太阳能电池的报道较多,主要集中在钙钛矿活性层薄膜的喷墨打印和电极打印两个方面,电池结构中空穴传输层和电子传输层以及其他修饰层仍采用旋涂或涂布等工艺完成.我们成功实现了... 目前基于喷墨打印制备大面积CH_(3)NH_(3)PbI_(3)钙钛矿型太阳能电池的报道较多,主要集中在钙钛矿活性层薄膜的喷墨打印和电极打印两个方面,电池结构中空穴传输层和电子传输层以及其他修饰层仍采用旋涂或涂布等工艺完成.我们成功实现了基于全喷墨打印的大面积CH_(3)NH_(3)PbI_(3)钙钛矿太阳能电池,包括喷墨打印PEN/Ag NWs底电极,Ag NWs顶电极,PEDOT:PSS空穴传输层等.研究发现全喷墨打印可以极大地节约材料成本和简化生产工艺流程,并且可以获得密度高、均匀性好的PC_(61)BM层、PEDOT:PSS层、PEI层和CH_(3)NH_(3)PbI_(3)钙钛矿薄膜,在此基础上制备了面积分别为60,80和100 cm^(2)的CH_(3)NH_(3)PbI_(3)钙钛矿型太阳电池.结果表明,当钙钛矿油墨浓度为1 mol/L时,打印速度设置为30 mm/s,衬底温度为50℃时,打印生成的钙钛矿薄膜表面光滑,晶粒均匀生长有序,晶粒尺寸接近500—600 nm.晶粒具有规则的扁平形状,薄膜的表面粗糙度仅为10 nm,可以获得高质量的钙钛矿薄膜.采用绿色反溶剂萃取和热退火处理的有效面积为60 cm^(2)的钙钛矿型太阳能电池的功率转换效率高达14.25%(Voc=1.03 V,Jsc=19.21 mA/cm^(2),FF=72%),这是迄今为止报道的用全喷墨打印法制备钙钛矿型太阳能电池的最高效率之一.此外,当器件在不封装时放置空气中12个月,光电转换效率降低到初始值的80%.然而采用含氟热塑性聚氨酯FTPU封装,光电转换效率仅降低5%,表现出良好的器件稳定性. 展开更多
关键词 全喷墨打印 银纳米线电极 绿色溶剂萃取和热退火 大面积制备 柔性钙钛矿太阳能电池
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Rapid synthesis of Pd single‐atom/cluster as highly active catalysts for Suzuki coupling reactions 被引量:2
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作者 Hehe Wei Xiaoyang Li +7 位作者 Bohan Deng Jialiang Lang Ya Huang Xingyu Hua Yida Qiao Binghui Ge Jun Ge Hui Wu 《Chinese Journal of Catalysis》 SCIE EI CAS CSCD 2022年第4期1058-1065,共8页
Palladium(Pd)‐based catalysts are essential to drive high‐performance Suzuki coupling reactions,which are powerful tools for the synthesis of functional organic compounds.Herein,we developed a solution‐rapid‐annea... Palladium(Pd)‐based catalysts are essential to drive high‐performance Suzuki coupling reactions,which are powerful tools for the synthesis of functional organic compounds.Herein,we developed a solution‐rapid‐annealing process to stabilize nitrogen‐mesoporous carbon supported Pd single‐atom/cluster(Pd/NMC)material,which provided a catalyst with superior performance for Suzuki coupling reactions.In comparison with commercial palladium/carbon(Pd/C)catalysts,the Pd/NMC catalyst exhibited significantly boosted activity(100%selectivity and 95%yield)and excellent stability(almost no decay in activity after 10 reuse cycles)for the Suzuki coupling reactions of chlorobenzenes,together with superior yield and excellent selectivity in the fields of the board scope of the reactants.Moreover,our newly developed rapid annealing process of precursor solutions is applied as a generalized method to stabilize metal clusters(e.g.Pd,Pt,Ru),opening new possibilities in the construction of efficient highly dispersed metal atom and sub‐nanometer cluster catalysts with high performance. 展开更多
关键词 Pd single‐atom/cluster catalyst Suzuki coupling reactions Solution rapid annealing Energy barrier High yield
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Prestack seismic stochastic inversion based on statistical characteristic parameters 被引量:3
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作者 Wang Bao-Li Lin Ying +1 位作者 Zhang Guang-Zhi Yin Xing-Yao 《Applied Geophysics》 SCIE CSCD 2021年第1期63-74,129,共13页
In the conventional stochastic inversion method,the spatial structure information of underground strata is usually characterized by variograms.However,effectively characterizing the heterogeneity of complex strata is ... In the conventional stochastic inversion method,the spatial structure information of underground strata is usually characterized by variograms.However,effectively characterizing the heterogeneity of complex strata is difficult.In this paper,multiple parameters are used to fully explore the underground formation information in the known seismic reflection and well log data.The spatial structure characteristics of complex underground reservoirs are described more comprehensively using multiple statistical characteristic parameters.We propose a prestack seismic stochastic inversion method based on prior information on statistical characteristic parameters.According to the random medium theory,this method obtains several statistical characteristic parameters from known seismic and logging data,constructs a prior information model that meets the spatial structure characteristics of the underground strata,and integrates multiparameter constraints into the likelihood function to construct the objective function.The very fast quantum annealing algorithm is used to optimize and update the objective function to obtain the fi nal inversion result.The model test shows that compared with the traditional prior information model construction method,the prior information model based on multiple parameters in this paper contains more detailed stratigraphic information,which can better describe complex underground reservoirs.A real data analysis shows that the stochastic inversion method proposed in this paper can effectively predict the geophysical characteristics of complex underground reservoirs and has a high resolution. 展开更多
关键词 prior information random medium theory statistical characteristic parameters stochastic inversion very fast quantum annealing
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Magnetic Flux Leakage Signal Inversion of Corrosive Flaws Based on Modified Genetic Local Search Algorithm
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作者 韩文花 杨平 +1 位作者 夏飞 薛阳 《Journal of Shanghai Jiaotong university(Science)》 EI 2009年第2期168-172,共5页
In this paper,a modified genetic local search algorithm(MGLSA) is proposed.The proposed algorithm is resulted from employing the simulated annealing technique to regulate the variance of the Gaussian mutation of the g... In this paper,a modified genetic local search algorithm(MGLSA) is proposed.The proposed algorithm is resulted from employing the simulated annealing technique to regulate the variance of the Gaussian mutation of the genetic local search algorithm(GLSA).Then,an MGLSA-based inverse algorithm is proposed for magnetic flux leakage(MFL) signal inversion of corrosive flaws,in which the MGLSA is used to solve the optimization problem in the MFL inverse problem.Experimental results demonstrate that the MGLSA-based inverse algorithm is more robust than GLSA-based inverse algorithm in the presence of noise in the measured MFL signals. 展开更多
关键词 magnetic flux leakage (MFL) corrosive flaw simulated annealing Gaussian mutation
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Mn-doped SiGe thin films grown by UHV/CVD with room-temperature ferromagnetism and high hole mobility 被引量:2
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作者 Limeng Shen Xi Zhang +3 位作者 Jiaqi Wang Jianyuan Wang Cheng Li Gang Xiang 《Science China Materials》 SCIE EI CAS CSCD 2022年第10期2826-2832,共7页
In this work,silicon-germanium(SiGe)thin films are epitaxially grown on Ge substrates by ultra-high vacuum chemical vapor deposition and then doped with Mn element by ion-implantation and subsequent rapid thermal anne... In this work,silicon-germanium(SiGe)thin films are epitaxially grown on Ge substrates by ultra-high vacuum chemical vapor deposition and then doped with Mn element by ion-implantation and subsequent rapid thermal annealing(RTA).The characterizations show that the epitaxial SiGe thin films are single-crystalline with uniform tensile strain and then become polycrystalline after the ion implantation and following RTA.The magnetization measurements indicate that the annealed thin films exhibit Mn concentration-dependent ferromagnetism up to 309 K and the X-ray magnetic circular dichroism characterizations reveal the spin and orbital magnetic moments from the substitutional Mn element.To minimize the influence of anomalous Hall effect,magneto-transport measurements at a high magnetic field up to 31 T at 300 K are performed to obtain the hole mobility,which reaches a record-high value of~1230 cm^(2)V^(-1)s^(-1),owing to the crystalline quality and tensile strain-induced energy band modulation of the samples.The first demonstration of Mn-doped SiGe thin films with roomtemperature ferromagnetism and high carrier mobility may pave the way for practical semiconductor spintronic applications. 展开更多
关键词 diluted magnetic semiconductor Mn-doped SiGe FERROMAGNETISM hole mobility UHV/CVD
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