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激光微加工变焦系统的控制算法研究
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作者 王震 陈涛 《精密制造与自动化》 2010年第1期9-12,19,共5页
提出了一种应用于激光微加工的变焦系统控制的算法。综合利用插补算法和变焦方程,使变焦系统中各运动镜头组获得相应的线性或非线性精确位移。并且控制运动镜头组以合理和稳定的速度移动。保证了通过掩模板的准分子激光光斑的连续和稳... 提出了一种应用于激光微加工的变焦系统控制的算法。综合利用插补算法和变焦方程,使变焦系统中各运动镜头组获得相应的线性或非线性精确位移。并且控制运动镜头组以合理和稳定的速度移动。保证了通过掩模板的准分子激光光斑的连续和稳定的变化。变焦系统可以不更换掩模板而刻蚀出大小连续变化,形状相似的复杂结构。提高了准分子激光微加工的复杂度和分辨率。 展开更多
关键词 激光微加工 距系统控制 插补算法 变焦方程
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Water Wave Focusing Using Coordinate Transformation
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作者 Takahito Iida Masashi Kashiwagi 《Journal of Energy and Power Engineering》 2017年第10期631-636,共6页
In this paper, wave focusing based on a coordinate transformation is proposed. It is known that the 2-dimensional wave equation which governs a shallow water problem in a potential theory can keep invariance under coo... In this paper, wave focusing based on a coordinate transformation is proposed. It is known that the 2-dimensional wave equation which governs a shallow water problem in a potential theory can keep invariance under coordinate transformation. Once equivalent medium parameters are obtained so as to keep the invariance, wave rays can be arbitrarily designed. We show the design of equivalent medium for wave squeezing to focus waves on a specific domain. Numerical computations are carried out by a finite element based software COMSOL Multiphysics. Results show good agreement between predictions from the theory and computations. It can be applied for a wide range of frequency because the proposed method is able to be applied regardless of the frequency. 展开更多
关键词 Coordinate transformation wave focusing shallow water.
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