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变面积结构微机械电容式加速度传感器 被引量:5
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作者 李宝清 陆德仁 王渭源 《中国工程科学》 2000年第2期36-40,共5页
文章首次报道了一种基于面积可变电容结构的微机械加速度传感器。质量块呈栅状结构,由悬臂梁支撑。两组交叉放置的定电极位于质量块的正下方。在惯性力的作用下,质量块呈平行于衬底水平移动,引起由质量块的栅与定电极的叉指构成的差分... 文章首次报道了一种基于面积可变电容结构的微机械加速度传感器。质量块呈栅状结构,由悬臂梁支撑。两组交叉放置的定电极位于质量块的正下方。在惯性力的作用下,质量块呈平行于衬底水平移动,引起由质量块的栅与定电极的叉指构成的差分电容变化。通过测量差分电容的变化,可以得到加速度信号的大小。理论分析表明加速度响应信号随面积呈线性变化,而与质量块及定电极的间距无关。加速度传感器的制作采用了基于金属电镀的准LIGA技术,设计量程为20m/s2。测量结果表明,加速度传感器量程为20m/s2,灵敏度为581mV/(m·s-2),非线性为4%FS。讨论了器件线性度不够理想的原因。 展开更多
关键词 电容 微机械加速度传感器 变面积结构 原理 制作
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A Preliminary Analysis of Relations Between Tectonic Deformation of Sedimentary Cover and Basement in Kuqa Depression
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作者 LiuJie QuGuosheng +3 位作者 TongXiaoguang SongHuizhen ZhouQing ZhangNing 《Earthquake Research in China》 2004年第4期406-416,共11页
Study of seismic activity in the Kuqa area enables us to infer some possible active faults in basement from the epicentral distribution on different profiles. The relations between active faults in the basement and su... Study of seismic activity in the Kuqa area enables us to infer some possible active faults in basement from the epicentral distribution on different profiles. The relations between active faults in the basement and surface structures are analyzed and the difference between sedimentary cover and basement in their deformation characteristics and the genesis are discussed. The following conclusions have been drawn: (1) the epicentral distribution indicates that, the east Qiulitag and south and north Qiulitag deep faults in the basement correspond to the east and west Qiulitag anticlines, respectively. Moreover, deep faults also exist beneath the Yiqiklik and Yaken anticlines. It indicates that the formation of surface structures is controlled by deep structures; (2) A NE-trending strike-slip fault develops along the line from the western termination of Yiqiklik structure to Dongqiu Well 5 and a NW-trending active fault on the western side of Baicheng. The two active faults across the tectonic strike are the main causes for tectonic segmentation of the Kuqa depression and possibly the cause for the middle segment (Kuqa-Baicheng) of the depression to be more shortened than both its eastern and western terminations; (3) The difference between the sedimentary cover and basement in their deformation characteristics depends mainly on the different properties of media between them. The lithospheric strength of the basement in the basin is fairly high, which determines the basement deformation to be mainly of brittle fracture——seismic activity. While the strength of sedimentary cover is low, where there exist weak thin layers, such as coal and gyps. Under the effect of strong tectonic compression, the sedimentary rocks may undergo strong viscous or plastic flow deformation; meanwhile, an aseismic detachment may take place along the weak layers. 展开更多
关键词 SEISMICITY Surface structure Basement fault Deformation character Kuqa depression
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