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退火处理降低AlGaN/GaN台面隔离电流 被引量:2
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作者 赵志波 杨兵 +5 位作者 康玄武 张静 吴昊 孙跃 郑英奎 魏珂 《半导体技术》 CAS 北大核心 2020年第4期293-297,311,共6页
针对电感耦合等离子体(ICP)干法刻蚀后,AlGaN/GaN台面区域存在隔离电流高的问题,研究了不同退火氛围、时间、温度对台面隔离电流的影响。利用原子力显微镜(AFM)和X射线光电子能谱(XPS)及电学测量仪器对样品进行表征和测试。测试结果表明... 针对电感耦合等离子体(ICP)干法刻蚀后,AlGaN/GaN台面区域存在隔离电流高的问题,研究了不同退火氛围、时间、温度对台面隔离电流的影响。利用原子力显微镜(AFM)和X射线光电子能谱(XPS)及电学测量仪器对样品进行表征和测试。测试结果表明,在氧气和氮气氛围退火处理均能降低样品的隔离电流,且经退火处理后样品的隔离电流均处于10-9 A/mm数量级,但在氧气氛围中退火处理会使样品的欧姆接触电阻增大。在氮气氛围下的最佳退火处理条件为400℃、120 s。在该条件下样品经过退火处理后,在200 V直流偏压下测得样品的台面隔离电流仅为4.03×10^-9 A/mm,与未经退火处理的样品相比降低了4个数量级,而且在高温测试中样品的隔离电流仍然能够保持较低的数值。 展开更多
关键词 ALGAN 台面区域 隔离电流 退火处理 电感耦合等离子体(ICP)刻蚀
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Relocation of Earthquakes in the Northeastern Tianshan Mountains Area and Improvement of Local 1-D Crustal Velocity Model 被引量:1
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作者 Sun Anhui Chen Qifu +2 位作者 Chen Yong Li Gang Zhang Zhiqiang 《Earthquake Research in China》 2012年第3期321-334,共14页
We apply three methods to relocate 599 earthquake events that occurred from August 2004 to August 2005 in the northeastern Tianshan Mountains area ( 85°30' ~ 88°30'E,43°00' ~ 44°40... We apply three methods to relocate 599 earthquake events that occurred from August 2004 to August 2005 in the northeastern Tianshan Mountains area ( 85°30' ~ 88°30'E,43°00' ~ 44°40' N ) by using travel times recorded by regional seismic network and 10 portable seismic stations deployed around the Urumqi city. By comparing the reliability of different results,we determined a suitable location method,and an improved 1-D crustal velocity model of the study area. The uncertainty of earthquake location is significantly reduced with combined data of seismic network and portable stations. The relocated events are clearly associated with regional tectonics of the northeastern Tianshan Mountains area, and are also in agreement with the existence of active faults imaged by deep seismic reflection profile. The relocated seismicity discovers some potential traces of buried active faults,which need to be validated further. 展开更多
关键词 Earthquake relocation Velocity model The northeastern Tianshan Mountains area Active faults
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