O484.1 2003064264基于遗传算法的光学膜系初始结构优化设计=Originalstructure optimization of optical multilayer using genetic algorithm[刊,中]/范志刚(哈尔滨工业大学电子科学与技术系.黑龙江,哈尔滨(150001)),张爱红…∥光学技...O484.1 2003064264基于遗传算法的光学膜系初始结构优化设计=Originalstructure optimization of optical multilayer using genetic algorithm[刊,中]/范志刚(哈尔滨工业大学电子科学与技术系.黑龙江,哈尔滨(150001)),张爱红…∥光学技术.-2002,28(6).-513-514,517针对多膜料设计,提出了一种新的膜系初始结构优化设计算法。将膜系的初始设计视为组合优化问题,采用遗传算法,求得组合的最优解。给出了算法的原理,并给出了相应的设计实例。结果表明,本算法是一种简单、有效、通用性强的膜系初始化设计方法。图4参5(于晓光)展开更多
Nitrogen-doped fluorinated diamond-like carbon(FN-DLC)films were prepared on single crystal silicon substrate by radio frequency plasma enhanced chemical vapor deposition(RF-PECVD)under different deposited conditions ...Nitrogen-doped fluorinated diamond-like carbon(FN-DLC)films were prepared on single crystal silicon substrate by radio frequency plasma enhanced chemical vapor deposition(RF-PECVD)under different deposited conditions with CF4,CH4 and nitrogen as source gases.The influence of nitrogen content on the structure and electrical properties of the films was studied.The films were investigated in terms of surface morphology,microstructure,chemical composition and electrical properties.Atomic force microscopy(AFM)results revealed that the surface morphology of the films became smooth due to doping nitrogen.Fourier transform infrared absorption spectrometry(FTIR)results showed that amouts of C=N and C≡N bonds increased gradually with increasing nitrogen partial pressure r(r=p(N2)/p(N2+CF4+CH4)).Gaussian fit results of C 1s and N 1s in X-ray photoelectron spectra (XPS)showed that the incorporation of nitrogen presented mainly in the forms ofβ-C3N4 and a-CNx(x=1,2,3)in the films.The current-voltage(I-V)measurement results showed that the electrical conductivity of the films increased with increasing nitrogen content.展开更多
文摘O484.1 2003064264基于遗传算法的光学膜系初始结构优化设计=Originalstructure optimization of optical multilayer using genetic algorithm[刊,中]/范志刚(哈尔滨工业大学电子科学与技术系.黑龙江,哈尔滨(150001)),张爱红…∥光学技术.-2002,28(6).-513-514,517针对多膜料设计,提出了一种新的膜系初始结构优化设计算法。将膜系的初始设计视为组合优化问题,采用遗传算法,求得组合的最优解。给出了算法的原理,并给出了相应的设计实例。结果表明,本算法是一种简单、有效、通用性强的膜系初始化设计方法。图4参5(于晓光)
基金Project(70121)supported by the Postdoctoral Science Foundation of Central South University,ChinaProject(200807MS044)supported by Scientific Research Fund of Education Department of Guangxi Autonomous Region,ChinaProject(0710908-06-K)supported by theResearch Funds of Guangxi Key laboratory of Information Materials
文摘Nitrogen-doped fluorinated diamond-like carbon(FN-DLC)films were prepared on single crystal silicon substrate by radio frequency plasma enhanced chemical vapor deposition(RF-PECVD)under different deposited conditions with CF4,CH4 and nitrogen as source gases.The influence of nitrogen content on the structure and electrical properties of the films was studied.The films were investigated in terms of surface morphology,microstructure,chemical composition and electrical properties.Atomic force microscopy(AFM)results revealed that the surface morphology of the films became smooth due to doping nitrogen.Fourier transform infrared absorption spectrometry(FTIR)results showed that amouts of C=N and C≡N bonds increased gradually with increasing nitrogen partial pressure r(r=p(N2)/p(N2+CF4+CH4)).Gaussian fit results of C 1s and N 1s in X-ray photoelectron spectra (XPS)showed that the incorporation of nitrogen presented mainly in the forms ofβ-C3N4 and a-CNx(x=1,2,3)in the films.The current-voltage(I-V)measurement results showed that the electrical conductivity of the films increased with increasing nitrogen content.
