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硅片键合界面的吸杂效应
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作者 詹娟 孙国梁 《微电子学》 CAS CSCD 1995年第5期45-48,共4页
本文对硅片直接键合界面的吸杂效应进行了研究,根据键合界面存在晶格缺陷、氧沉积物和微缺陷等事实,提出了键合界面的吸杂试验,分析了其吸杂效应的机理,给出了吸杂方程。理论计算和实验结果得到了较好的吻合。
关键词 硅片键合 吸杂处理 SOI
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Experimental Study on Pore Distribution Characters and Convert Rate of CaO
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作者 LiJIA YanyanZENG TaoZHANG 《Journal of Thermal Science》 SCIE EI CAS CSCD 2005年第1期87-91,共5页
During the reaction between calcium sorbents and SO2, calcium sorbents are first calcined and converted into CaO. CaO can be obtained by calcining Ca(OH)2or CaCO3. The porosity of the sorbent is increased because of c... During the reaction between calcium sorbents and SO2, calcium sorbents are first calcined and converted into CaO. CaO can be obtained by calcining Ca(OH)2or CaCO3. The porosity of the sorbent is increased because of calcination and is decreased because of sulfurization. In the calcination process H2O or CO2 is escaped from the particles and pores are formed in particles. The reaction or convert rate of CaO is influenced strongly by the pore structure characters. From Ca(OH)2 to CaO the escape velocity of H2O or its mass transfer is one of the key factors influencing the pore forming. During calcination process different healing velocity, different heating time and temperature were suggested. The temperature rising rate and calcining temperature play important role to the pore structure. The convert rates of CaO obtained through different calcining conditions were investigated experimentally. Some interesting results were showed that the calcium utilization of CaO particles is determined not only by the special surface area and total pore volume, but also by pore-size distribution. The main factor influencing the sulfation is the pore diameter distribution at lower sulfation temperature. For higher reaction temperature specific volume is the important reason. But pore-size distribution is strongly influenced by heat flux and temperature in the calcining process. 展开更多
关键词 pore-size distribution CALCINE desulfurization.
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