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用于SiC注入机的吸极系统设计
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作者 袁卫华 彭立波 +1 位作者 罗才旺 游俊健 《电子工业专用设备》 2024年第5期17-21,共5页
介绍了用于SiC注入机的离子束流吸极系统设计,吸极系统是一个三维可调的运动部件,吸极系统的电极板在X、Y、Z三轴伺服电机的驱动作用下实现3个方向精确可调;加载在电极板上的吸极高压和吸极抑制高压双重高压电场作用下,实现所需不同种... 介绍了用于SiC注入机的离子束流吸极系统设计,吸极系统是一个三维可调的运动部件,吸极系统的电极板在X、Y、Z三轴伺服电机的驱动作用下实现3个方向精确可调;加载在电极板上的吸极高压和吸极抑制高压双重高压电场作用下,实现所需不同种元素离子或不同放电状态下的弧室内最优离子束流稳定的引出。 展开更多
关键词 碳化硅 注入机 吸极系统
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Improvement of Tunable Diode Laser Absorption System with a Novel Multipass Cell and Wavelet Transform 被引量:1
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作者 夏滑 涂郭结 +3 位作者 庞涛 张志荣 吴边 董凤忠 《Journal of Measurement Science and Instrumentation》 CAS 2011年第4期402-405,共4页
Combination of Tunable Diode Laser Absorption Spectroscopy(TDLAS)technique and multipass cell is an attractive approach for ultrahigh sensitive detection of trace gases.Theoretically,based on Beer-Lambert law,the long... Combination of Tunable Diode Laser Absorption Spectroscopy(TDLAS)technique and multipass cell is an attractive approach for ultrahigh sensitive detection of trace gases.Theoretically,based on Beer-Lambert law,the longer optical path length and the larger gas absorption,the lower concentration gas could be detected.However,lower radiation intensity and inevitable etalon fringe resulted from multiple reflections would greatly weaken the Signal-to-Noise Ratio(SNR)and thus an expected ultrahigh sensitive detection system is difficult to achieve.In order to fully make use of the advantages of TDLAS and multipass cell,the base length and the total optical path length of the multipass cell are needed to be carefully balanced.Furthermore,the harmonic signals contaminated by various noises are processed with wavelet transform method.As a demonstration of this method,few low concentrations of gas CO in N2 are measured employing TDLAS technique and a novel sealed multipass cell with total optical length of 114 m.The detection limit is about 5×10-6(volume ratio),which is one order of magnitude better than earlier noise reduction. 展开更多
关键词 absorption spectroscopy TDLAS multipass cell etalon fringe wavelet transform detection limit
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