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硅各向异性腐蚀<110>条补偿图形腐蚀前沿控制 被引量:11
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作者 鲍敏杭 沈绍群 +5 位作者 胡澄宇 马青华 Chr.Burrer J.Esteve J.Bausells S.Marco 《Journal of Semiconductors》 EI CAS CSCD 北大核心 1994年第11期768-773,共6页
本文报道了一种由<110>条组成的,用于(100)硅KOH各向异性腐蚀的凸角补偿图形.该图形的设计特点是利用不对称的分枝和端点弯头对条上腐蚀前沿实现控制使补偿后凸角的削角大大减小.文中给出常用补偿图形的有效补偿长度和... 本文报道了一种由<110>条组成的,用于(100)硅KOH各向异性腐蚀的凸角补偿图形.该图形的设计特点是利用不对称的分枝和端点弯头对条上腐蚀前沿实现控制使补偿后凸角的削角大大减小.文中给出常用补偿图形的有效补偿长度和临界补偿时的削角比.该方法已应用于微机械硅加速度传感器的掩模设计. 展开更多
关键词 各向异性 腐蚀 补偿图形 前沿控制
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提高网印电阻阻值精确度的研究
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作者 金轶 何为 +4 位作者 周国云 陈苑明 陈正清 苏新虹 黄云钟 《印制电路信息》 2011年第S1期324-329,共6页
印制电路板铜线路的分布严重影响了网印电阻阻值精确度。研究分析了两类线路分布对网印电阻阻值精确度的影响,用Minitab软件拟合了第一类线路分布对网印电阻阻值影响的回归方程,通过阻值分布概率图分析了第二类线路分布对网印电阻阻值... 印制电路板铜线路的分布严重影响了网印电阻阻值精确度。研究分析了两类线路分布对网印电阻阻值精确度的影响,用Minitab软件拟合了第一类线路分布对网印电阻阻值影响的回归方程,通过阻值分布概率图分析了第二类线路分布对网印电阻阻值的影响。应用正交设计试验,获得最佳网印电阻工艺参数,结合图形补偿的方法,将不同尺寸电阻图形的方阻值公差控制在±15%以内,有效地提高网印电阻阻值精确度。 展开更多
关键词 网印电阻 精确度 正交设计 图形补偿
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Computer Simulation of Compensation Method for Infrared Focal Plane Array
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作者 康长赓 《Journal of Beijing Institute of Technology》 EI CAS 2000年第3期330-334,共5页
A major motivation for this work is to investigate a method of computer simulation for compensating fixed pattern noise of the infrared focal plane arrays. A mathematical model of the output signal of focal plane arra... A major motivation for this work is to investigate a method of computer simulation for compensating fixed pattern noise of the infrared focal plane arrays. A mathematical model of the output signal of focal plane array was established; a compensating algorithm utilizing reference source was derived and simulating programs were designed. The images of compensating process verify the influence of nonuniformity of responsibility and offset on fixed pattern noise. The result show that simulating method of investigating compensation technology for focal plane arrays is feasible, the generated images and methods can be used to the study of image recognition. 展开更多
关键词 computer simulation mathematical model infrared focal plane array fixed pattern noise NONUNIFORMITY COMPENSATION
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Shadow Detection and Compensation for Color Aerial Images
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作者 WANGShugen GUOZejin LIDeren 《Geo-Spatial Information Science》 2003年第3期20-24,共5页
A method for shadow detection and compensation for color aerial images is presented. It is considered that the intensity value of each image pixel is the product of illumination function and ground object reflection, ... A method for shadow detection and compensation for color aerial images is presented. It is considered that the intensity value of each image pixel is the product of illumination function and ground object reflection, and the shadowed regions on the image are mainly caused by the short of illumination, so the information compensation for the shadowed regions should concentrate on the illumination adjustment of concerned area on the basis of the analysis of whole image. The shadow detection and compensation procedure proposed by this paper consists of four steps. 展开更多
关键词 color aerial image color space transformation shadow detection shadowcompensation mathematical morphology
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