The ion implantation uniformity is of vital importance for an ion implanter.In this paper,we report the,uniformity measurement for a large current ion implanter(LC-16 type) by implanting of 190-keV Ar ions into Si to ...The ion implantation uniformity is of vital importance for an ion implanter.In this paper,we report the,uniformity measurement for a large current ion implanter(LC-16 type) by implanting of 190-keV Ar ions into Si to 3×1016 atoms/cm2,followed by Rutherford backscattering spectroscopy(RBS) and sheet resistance measurement providing quantitative information on spatial distribution of dopants.The implant doses obtained from RBS at selected points of the sample give a spatial uniformity of <5%,which are confirmed by the sheet resistance measurement.While sheet resistance is an indirect method for dose evaluation of ion-implanted samples,RBS provides a competent technique for calibration of the ion implantation system.And both measurements show that good uniformity can be achieved for the ion implanter by tuning of the scanning process.展开更多
TN141 2005021352 显示器件发展趋势=Development trends of display devices [刊,中]／阎璋(华东电子集团公司．江苏,南京(210028)) //光电技术．-2004,45(4)．-33-36,50 介绍了当今市场各种显示器的研发现状和发展趋势 以及销售情况。...TN141 2005021352 显示器件发展趋势=Development trends of display devices [刊,中]／阎璋(华东电子集团公司．江苏,南京(210028)) //光电技术．-2004,45(4)．-33-36,50 介绍了当今市场各种显示器的研发现状和发展趋势 以及销售情况。图2参1(杨妹清) TN141．9 2005021353 液晶投影显示颜色均匀性的测量及校正系统=Measure-meat and correction system of color uniformity of liquid crystal projection display[刊。展开更多
A new one-dimensional system for resistivity measurement for natural gas hydrate(NGH)exploitation is designed,which is used to study the formation and decomposition processes of NGH.The experimental results verify the...A new one-dimensional system for resistivity measurement for natural gas hydrate(NGH)exploitation is designed,which is used to study the formation and decomposition processes of NGH.The experimental results verify the feasibility of the measurement method,especially in monitoring the nucleation and growth of the NGH. Isovolumetric formation experiment of NGH is performed at 2°C and 7.8 MPa.Before the NGH formation,the initial resistivity is measured to be 4-7Ω·m,which declines to the minimum value of 2-3Ω·m when NGH begins to nucleate after the pressure is reduced to 3.3 MPa.As the NGH grows,the resistivity increases to a great extent,and finally it keeps at 11-13Ω·m,indicating the completion of the formation process.The NGH decomposition experiment is then performed.When the outlet pressure decreases,NGH begins to decompose,accordingly,the resistivity declines gradually,and is at 5-9Ω·m when the decomposition process ends,which is slightly higher than the resistivity value before the formation of NGH.The occurrence and distribution uniformity of NGH are determined by the distribution and magnitude of the resistivity measured on an one-dimensional sand-packed model.This study tackles the accurate estimation for the distribution of NGH in porous medium,and provides an experimental basis for further study on NGH exploitation in the future.展开更多
Fission-Track Dating (FTD) has been developed as a useful technique for geological studies. Parent elements are measured by counting 235 U tracks induced by thermal neutrons. If insufficient thermalization occurs, fis...Fission-Track Dating (FTD) has been developed as a useful technique for geological studies. Parent elements are measured by counting 235 U tracks induced by thermal neutrons. If insufficient thermalization occurs, fission of 238 U and 232 Th will be induced, and further measurement error will be introduced. Therefore, whether the neutrons are well thermalized or not will affect the FTD results. Due to requirement of safe operation, the 101 reactor was terminated in 2007. By using the 492 reactor as the new thermal neutron reactor, our present paper will attempt to study the feasibility and the potential influence on FTD. By irradiating monitor glass SRM612 and CN5 in pairs, we will study the thermalization situation of the 492 reactor. Irradiated data show that thermal neutrons are not evenly distributed either in horizontal or in vertical dimension. Especially, horizontal heterogeneity is obvious. But we discovered that proper irradiation position in the reactor can meet the requirement of FTD. Under the current irradiation condition, we calculated and assessed the insufficient thermalization effects on determining fission-track ages. We found that the difference between the 232 Th/ 238 U ratios of samples and standards is the main factor to the experiment results. The results will not be affected if the 232 Th/ 238 U value of samples is equal to the standard samples. However, if the 232 Th/ 238 U ratio is larger than that of the standards, the results will be smaller than actual ages. Comparatively, the ages will be more than expected if the 232 Th/ 238 U ratio is less. Therefore, to reduce the irradiation error, we suggest either locating the position of irradiation strictly, or minimizing the influence of lateral heterogeneity by reducing the amount of each sample package. Additionally, accuracy of the experimental results can be improved by increasing standard samples to adjust ζ value and using the monitor of standard glass SRM612 and CN5 together.展开更多
基金supported by the National Natural Science Foundation of China(Nos.11405117 and 11205116)International Cooperation Program of the Ministry of Science and Technology of China(No.2015DFR00720)
文摘The ion implantation uniformity is of vital importance for an ion implanter.In this paper,we report the,uniformity measurement for a large current ion implanter(LC-16 type) by implanting of 190-keV Ar ions into Si to 3×1016 atoms/cm2,followed by Rutherford backscattering spectroscopy(RBS) and sheet resistance measurement providing quantitative information on spatial distribution of dopants.The implant doses obtained from RBS at selected points of the sample give a spatial uniformity of <5%,which are confirmed by the sheet resistance measurement.While sheet resistance is an indirect method for dose evaluation of ion-implanted samples,RBS provides a competent technique for calibration of the ion implantation system.And both measurements show that good uniformity can be achieved for the ion implanter by tuning of the scanning process.
文摘TN141 2005021352 显示器件发展趋势=Development trends of display devices [刊,中]／阎璋(华东电子集团公司．江苏,南京(210028)) //光电技术．-2004,45(4)．-33-36,50 介绍了当今市场各种显示器的研发现状和发展趋势 以及销售情况。图2参1(杨妹清) TN141．9 2005021353 液晶投影显示颜色均匀性的测量及校正系统=Measure-meat and correction system of color uniformity of liquid crystal projection display[刊。
基金Supported by the National High Technology Research and Development Program of China(2006AA09A209)
文摘A new one-dimensional system for resistivity measurement for natural gas hydrate(NGH)exploitation is designed,which is used to study the formation and decomposition processes of NGH.The experimental results verify the feasibility of the measurement method,especially in monitoring the nucleation and growth of the NGH. Isovolumetric formation experiment of NGH is performed at 2°C and 7.8 MPa.Before the NGH formation,the initial resistivity is measured to be 4-7Ω·m,which declines to the minimum value of 2-3Ω·m when NGH begins to nucleate after the pressure is reduced to 3.3 MPa.As the NGH grows,the resistivity increases to a great extent,and finally it keeps at 11-13Ω·m,indicating the completion of the formation process.The NGH decomposition experiment is then performed.When the outlet pressure decreases,NGH begins to decompose,accordingly,the resistivity declines gradually,and is at 5-9Ω·m when the decomposition process ends,which is slightly higher than the resistivity value before the formation of NGH.The occurrence and distribution uniformity of NGH are determined by the distribution and magnitude of the resistivity measured on an one-dimensional sand-packed model.This study tackles the accurate estimation for the distribution of NGH in porous medium,and provides an experimental basis for further study on NGH exploitation in the future.
基金supported by State Key Laboratory of Earthquake Dynamics (Grant No.LED2009A05)National Natural Science Foundation of China (Grant No.41030317)
文摘Fission-Track Dating (FTD) has been developed as a useful technique for geological studies. Parent elements are measured by counting 235 U tracks induced by thermal neutrons. If insufficient thermalization occurs, fission of 238 U and 232 Th will be induced, and further measurement error will be introduced. Therefore, whether the neutrons are well thermalized or not will affect the FTD results. Due to requirement of safe operation, the 101 reactor was terminated in 2007. By using the 492 reactor as the new thermal neutron reactor, our present paper will attempt to study the feasibility and the potential influence on FTD. By irradiating monitor glass SRM612 and CN5 in pairs, we will study the thermalization situation of the 492 reactor. Irradiated data show that thermal neutrons are not evenly distributed either in horizontal or in vertical dimension. Especially, horizontal heterogeneity is obvious. But we discovered that proper irradiation position in the reactor can meet the requirement of FTD. Under the current irradiation condition, we calculated and assessed the insufficient thermalization effects on determining fission-track ages. We found that the difference between the 232 Th/ 238 U ratios of samples and standards is the main factor to the experiment results. The results will not be affected if the 232 Th/ 238 U value of samples is equal to the standard samples. However, if the 232 Th/ 238 U ratio is larger than that of the standards, the results will be smaller than actual ages. Comparatively, the ages will be more than expected if the 232 Th/ 238 U ratio is less. Therefore, to reduce the irradiation error, we suggest either locating the position of irradiation strictly, or minimizing the influence of lateral heterogeneity by reducing the amount of each sample package. Additionally, accuracy of the experimental results can be improved by increasing standard samples to adjust ζ value and using the monitor of standard glass SRM612 and CN5 together.
