The etching effect of ammonia （NH3） on the growth of vertically aligned nanotubes/nanofibers （CNTs） was investigated by direct-current plasma enhanced chemical vapor deposition （DC-PECVD）. NH3 gas etches Ni cata...The etching effect of ammonia （NH3） on the growth of vertically aligned nanotubes/nanofibers （CNTs） was investigated by direct-current plasma enhanced chemical vapor deposition （DC-PECVD）. NH3 gas etches Ni catalyst layer to form nanoscale islands while NH3 plasma etches the deposited amorphous carbon. Based on the etching effect of NH3 gas on Ni catalyst, the differences of growing bundles of CNTs and single strand CNTs were discussed; specifically, the amount of optimal NH3 gas etching is different between bundles of CNTs and single strand CNTs. In contrast to the CNT carpet growth, the single strand CNT growth requires shorter etching time （5 min） than large catalytic patterns （10 rain） since nano dots already form catalyst islands for CNT growth. Through removing the plasma pretreatment process, the damage from being exposed at high temperature substrate occurring during the plasma generation time is minimized. High resolution transmission electron microscopy （HTEM） shows fishbone structure of CNTs grown by PECVD.展开更多
A vertically aligned anatase TiO2 （A-TiO2） nanotube array has been fabricated by coating a ZnO nanorod （NR） template with a TiO2 precursor solution. After coating, the ZnO NR cores were selectively etched in an ac...A vertically aligned anatase TiO2 （A-TiO2） nanotube array has been fabricated by coating a ZnO nanorod （NR） template with a TiO2 precursor solution. After coating, the ZnO NR cores were selectively etched in an acidic environment to form TiO2 nanotubes （NTs）. More specifically, after growing the ZnO NRs via a hydrothermal method, one drop of the TiO2 precursor solution was cast to coat the ZnO NRs, the tops of which were previously covered with chemical capping materials by electrostatic interaction, and then the sample was sintered. Finally, the sample was immersed in an acidic solution resulting in selective etching of the ZnO NR cores. Thus, only TiO2 NTs remained on the substrate. The capping material is effectively used to create a perfect, hexagonal open-ended TiO2 NT array, which interestingly extends onset absorption towards the visible region.展开更多
基金Project supported by Intelligent Microsystem Center(IMC)Project(2010-0008-276) supported by the National Core Research Center through the National Research Foundation of Korea funded by the Ministry of Education, Science and TechnologyProject(2010) supported by Pusan National University
文摘The etching effect of ammonia （NH3） on the growth of vertically aligned nanotubes/nanofibers （CNTs） was investigated by direct-current plasma enhanced chemical vapor deposition （DC-PECVD）. NH3 gas etches Ni catalyst layer to form nanoscale islands while NH3 plasma etches the deposited amorphous carbon. Based on the etching effect of NH3 gas on Ni catalyst, the differences of growing bundles of CNTs and single strand CNTs were discussed; specifically, the amount of optimal NH3 gas etching is different between bundles of CNTs and single strand CNTs. In contrast to the CNT carpet growth, the single strand CNT growth requires shorter etching time （5 min） than large catalytic patterns （10 rain） since nano dots already form catalyst islands for CNT growth. Through removing the plasma pretreatment process, the damage from being exposed at high temperature substrate occurring during the plasma generation time is minimized. High resolution transmission electron microscopy （HTEM） shows fishbone structure of CNTs grown by PECVD.
文摘A vertically aligned anatase TiO2 （A-TiO2） nanotube array has been fabricated by coating a ZnO nanorod （NR） template with a TiO2 precursor solution. After coating, the ZnO NR cores were selectively etched in an acidic environment to form TiO2 nanotubes （NTs）. More specifically, after growing the ZnO NRs via a hydrothermal method, one drop of the TiO2 precursor solution was cast to coat the ZnO NRs, the tops of which were previously covered with chemical capping materials by electrostatic interaction, and then the sample was sintered. Finally, the sample was immersed in an acidic solution resulting in selective etching of the ZnO NR cores. Thus, only TiO2 NTs remained on the substrate. The capping material is effectively used to create a perfect, hexagonal open-ended TiO2 NT array, which interestingly extends onset absorption towards the visible region.
