A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabr...A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabricated in SOI substrate by using a bulk-and-surface mixed silicon micromachining process. As demonstrated by experiment, the novel driving structure can actuate the mirror to achieve large-range continuous rotation as well as spontaneous 90°rotation induced by the pull-in effect. The continuous rotating range of the micromirror is increased to about 46° at an increased yielding voltage. The measured yielding voltages of the mirrors with torsional springs of 1 and 0.5μm in thickness are 390 - 410V and 140 - 160V, respectively. The optical insertion loss has also been measured to be --1.98dB when the mirror serves as an optical switch.展开更多
Eddies are frequently observed in the northeastern South China Sea （SCS）. However, there have been few studies on vertical structure and temporal-spatial evolution of these eddies. We analyzed the seasonal Luzon War...Eddies are frequently observed in the northeastern South China Sea （SCS）. However, there have been few studies on vertical structure and temporal-spatial evolution of these eddies. We analyzed the seasonal Luzon Warm Eddy （LWE） based on Argo float data and the merged data products of satellite altimeters of Topex/Poseidon, Jason-1 and European Research Satellites. The analysis shows that the LWE extends vertically to more than 500 m water depth, with a higher temperature anomaly of 5℃ and lower salinity anomaly of 0.5 near the thermocline. The current speeds of the LWE are stronger in its uppermost 200 m, with a maximum speed of 0.6 m/s. Sometimes the LWE incorporates mixed waters from the Kuroshio Current and the SCS, and thus has higher thermohaline characteristics than local marine waters. Time series of eddy kinematic parameters show that the radii and shape of the LWE vary during propagation, and its eddy kinetic energy follows a normal distribution. In addition, we used the empirical orthogonal function （EOF） here to analyze seasonal characteristics of the LWE. The results suggest that the LWE generally forms in July, intensifies in August and September, separates from the coast of Luzon in October and propagates westward, and weakens in December and disappears in February. The LWE＇s westward migration is approximately along 19°N latitude from northwest of Luzon to southeast of Hainan, with a mean speed of 6.6 cm/s.展开更多
文摘A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabricated in SOI substrate by using a bulk-and-surface mixed silicon micromachining process. As demonstrated by experiment, the novel driving structure can actuate the mirror to achieve large-range continuous rotation as well as spontaneous 90°rotation induced by the pull-in effect. The continuous rotating range of the micromirror is increased to about 46° at an increased yielding voltage. The measured yielding voltages of the mirrors with torsional springs of 1 and 0.5μm in thickness are 390 - 410V and 140 - 160V, respectively. The optical insertion loss has also been measured to be --1.98dB when the mirror serves as an optical switch.
基金Supported by the Knowledge Innovation Program of the Chinese Academy of Sciences (Nos.KZCX1-YW-12 and KZCX2-YW-201)the National Natural Science Foundation of China (No. 90411013)the National High Technology Research and Development Program of China (863 Program) (No.2007AA092201)
文摘Eddies are frequently observed in the northeastern South China Sea （SCS）. However, there have been few studies on vertical structure and temporal-spatial evolution of these eddies. We analyzed the seasonal Luzon Warm Eddy （LWE） based on Argo float data and the merged data products of satellite altimeters of Topex/Poseidon, Jason-1 and European Research Satellites. The analysis shows that the LWE extends vertically to more than 500 m water depth, with a higher temperature anomaly of 5℃ and lower salinity anomaly of 0.5 near the thermocline. The current speeds of the LWE are stronger in its uppermost 200 m, with a maximum speed of 0.6 m/s. Sometimes the LWE incorporates mixed waters from the Kuroshio Current and the SCS, and thus has higher thermohaline characteristics than local marine waters. Time series of eddy kinematic parameters show that the radii and shape of the LWE vary during propagation, and its eddy kinetic energy follows a normal distribution. In addition, we used the empirical orthogonal function （EOF） here to analyze seasonal characteristics of the LWE. The results suggest that the LWE generally forms in July, intensifies in August and September, separates from the coast of Luzon in October and propagates westward, and weakens in December and disappears in February. The LWE＇s westward migration is approximately along 19°N latitude from northwest of Luzon to southeast of Hainan, with a mean speed of 6.6 cm/s.
