光学邻近校正（OPC）技术已经成为纳米级半导体工艺技术中的一个关键.目前在OPC中多边形的切分算法均基于配方（recipe）,但随着特征线宽减小及版图越来越复杂,用于切分的配方难以覆盖所有的情况;不完备的配方引发或加剧了芯片上的纹波...光学邻近校正（OPC）技术已经成为纳米级半导体工艺技术中的一个关键.目前在OPC中多边形的切分算法均基于配方（recipe）,但随着特征线宽减小及版图越来越复杂,用于切分的配方难以覆盖所有的情况;不完备的配方引发或加剧了芯片上的纹波、断线和桥连等现象.论文提出了一种新的基于光刻模型的动态自适应切分算法,根据不同的光刻模型和几何环境可以给出不同的切分,并且可在校正循环中动态改变切分方式和采样点的放置位置.通过90nm工艺下版图设计的验证,这种切分不仅减少了被切分出的小线段（segment）数量的10%-15%,节省了调试切分规则的时间,而且提高了OPC的质量,使PRV（post RET verification）错误率降低了35%.展开更多
As well known,if the Higgs boson were not observed at LHC,the technicolor model would be the mostfavorable candidate responsible for the symmetry breaking.To overcome some defects in the previous model,someextended ve...As well known,if the Higgs boson were not observed at LHC,the technicolor model would be the mostfavorable candidate responsible for the symmetry breaking.To overcome some defects in the previous model,someextended versions have been proposed.In the TC2 model typical signature is existence of heavy H_(TC) and technipionП.A direct proof of validity of the model is to produce them at accelerator.Thus we study the production rates ofe^+e^-→ H_(TC)П~0 and e^+e^-→П^+П^-at ILC in the topcolor-assisted technicolor (TC2) model.In fact,there is a floodof models belonging to new physics,which can result in products with characteristics similar to H_(TC) + П of the TC2model.Therefore to distinguish this model from others one may need to investigate some details by calculating thecross section to NLO.We indeed find that the NLO corrections are significant,namely the ratio δ 2≡(σ_(NLO)-σ_(LO))/σ_(LO) ine^+e^-→ H_(TC)П~0 exceeds 100% within a plausible parameter space.展开更多
文摘光学邻近校正（OPC）技术已经成为纳米级半导体工艺技术中的一个关键.目前在OPC中多边形的切分算法均基于配方（recipe）,但随着特征线宽减小及版图越来越复杂,用于切分的配方难以覆盖所有的情况;不完备的配方引发或加剧了芯片上的纹波、断线和桥连等现象.论文提出了一种新的基于光刻模型的动态自适应切分算法,根据不同的光刻模型和几何环境可以给出不同的切分,并且可在校正循环中动态改变切分方式和采样点的放置位置.通过90nm工艺下版图设计的验证,这种切分不仅减少了被切分出的小线段（segment）数量的10%-15%,节省了调试切分规则的时间,而且提高了OPC的质量,使PRV（post RET verification）错误率降低了35%.
基金Supported by National Natural Science Foundation of China and the Special Grant for the PHD program of the Education Ministry of China under Grant No.10775073
文摘As well known,if the Higgs boson were not observed at LHC,the technicolor model would be the mostfavorable candidate responsible for the symmetry breaking.To overcome some defects in the previous model,someextended versions have been proposed.In the TC2 model typical signature is existence of heavy H_(TC) and technipionП.A direct proof of validity of the model is to produce them at accelerator.Thus we study the production rates ofe^+e^-→ H_(TC)П~0 and e^+e^-→П^+П^-at ILC in the topcolor-assisted technicolor (TC2) model.In fact,there is a floodof models belonging to new physics,which can result in products with characteristics similar to H_(TC) + П of the TC2model.Therefore to distinguish this model from others one may need to investigate some details by calculating thecross section to NLO.We indeed find that the NLO corrections are significant,namely the ratio δ 2≡(σ_(NLO)-σ_(LO))/σ_(LO) ine^+e^-→ H_(TC)П~0 exceeds 100% within a plausible parameter space.
