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氮化铝Lamb波谐振器的支撑轴区域声反射结构研究 被引量:1
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作者 王星宇 吕世涛 +2 位作者 张敖宇 孙海燕 赵继聪 《传感器与微系统》 CSCD 北大核心 2022年第9期20-24,共5页
本文综合运用有限元仿真和实验相结合的方法,研究分析了氮化铝兰姆(Lamb)波谐振器的支撑轴区域声反射结构对串联谐振品质因数(Q)的影响。对于频率约1.56 GHz的Lamb波谐振器,窄支撑和全支撑锚点结构的Q值基本相当;设置圆弧形和斜边形的... 本文综合运用有限元仿真和实验相结合的方法,研究分析了氮化铝兰姆(Lamb)波谐振器的支撑轴区域声反射结构对串联谐振品质因数(Q)的影响。对于频率约1.56 GHz的Lamb波谐振器,窄支撑和全支撑锚点结构的Q值基本相当;设置圆弧形和斜边形的声反射结构可减小支撑轴区域的位移幅值,进而降低锚点损耗;设置弧形沟槽有助于将声能限制在谐振腔区域,进而提升Q值;在衬底与支撑轴相邻区域沉积金属铝,可增加衬底与支撑轴的声阻抗失配程度,有利于声波反射回谐振腔。此外,基于6 in(1 in=2.54 cm)氮化铝工艺平台,成功制备了本文所设计的器件,且测试结果与模拟结果基本吻合,采用上述几种声反射结构均可提升Q值,其中斜边形反射结构对Q值的提升最为显著,Q值从2232.1提高到3256.5。 展开更多
关键词 压电谐振器 有限元分析 声反射结构 锚点损耗 品质因数
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单晶薄膜体声波谐振器频率温度特性研究 被引量:1
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作者 简珂 帅垚 +4 位作者 田本朗 白晓园 罗文博 吴传贵 张万里 《压电与声光》 CAS 北大核心 2020年第4期448-452,共5页
采用离子注入剥离法转移制备了43°Y-切铌酸锂(LiNbO3,LN)单晶压电薄膜材料,以SiO2/Mo作为声反射结构制备了固态声反射型薄膜体声波器件。谐振器工作频率约为3 GHz,LN薄膜等效机电耦合系数达到14.15%。对谐振器的频率温度特性进行... 采用离子注入剥离法转移制备了43°Y-切铌酸锂(LiNbO3,LN)单晶压电薄膜材料,以SiO2/Mo作为声反射结构制备了固态声反射型薄膜体声波器件。谐振器工作频率约为3 GHz,LN薄膜等效机电耦合系数达到14.15%。对谐振器的频率温度特性进行了表征,结果表明,尽管LN单晶的频率温度系数为(-70^-90)×10^-6/℃,但由于声反射结构中包含有正温度系数的SiO2层,谐振器的频率温度系数降至-18×10^-6/℃,这表明固态声反射结构能够有效抑制单晶LN薄膜的温漂,获得低频率温度系数的谐振器器件。 展开更多
关键词 波谐振器 离子注入剥离法 铌酸锂单晶薄膜 固态声反射结构 机电耦合系数 频率温度系数
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Fast Prediction of Acoustic Radiation from a Hemi-capped Cylindrical Shell in Waveguide 被引量:2
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作者 Hongyang Chen Qi Li Dejiang Shang 《Journal of Marine Science and Application》 2014年第4期437-448,共12页
In order to predict acoustic radiation from a structure in waveguide, a method based on wave superposition is proposed, in which the free-space Green's function is used to match the strength of equivalent sources. In... In order to predict acoustic radiation from a structure in waveguide, a method based on wave superposition is proposed, in which the free-space Green's function is used to match the strength of equivalent sources. In addition, in order to neglect the effect of sound reflection from boundaries, necessary treatment is conducted, which makes the method more efficient. Moreover, this method is combined with the sound propagation algorithms to predict the sound radiated from a cylindrical shell in waveguide. Numerical simulations show the effect of how reflections can be neglected if the distance between the structure and the boundary exceeds the maximum linear dimension of the structure. It also shows that the reflection from the bottom of the waveguide can be approximated by plane wave conditionally. The proposed method is more robust and efficient in computation, which can be used to predict the acoustic radiation in waveguide. 展开更多
关键词 acoustic radiation hemi-capped cylindrical shell fast prediction HALF-SPACE WAVEGUIDE wave superposition Green's function sound propagation algorithm
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Sound Radiation Analysis of Damping Structure Based on Response Surface Method
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作者 梁新华 林忠钦 +1 位作者 朱平 高新华 《Journal of Shanghai Jiaotong university(Science)》 EI 2007年第1期29-34,共6页
The methods of modifying dimension and shape of structure, or covering damping material are effective to reduce structure-borne noise, while these methods are based on the knowledge of qualitative and quantitative rel... The methods of modifying dimension and shape of structure, or covering damping material are effective to reduce structure-borne noise, while these methods are based on the knowledge of qualitative and quantitative relationship between sound radiation and design parameters. In order to decrease the complexity of the problem, response surface method(RSM) was utilized to analyze and optimize the vibro-acoustic properties of the damping structure. A simple case was illustrated to demonstrate the capabilities of the developed procedure. A structure-born noise problem was approximated by a series of polynomials using RSM. Three main performances were considered, i.e. sound radiation power, first order modal frequency and total mass. Consequently, the response surface model not only gives the direction of design modification, it also leads to an optimal design of complex systems. 展开更多
关键词 response surface method (RSM) damping structure sound radiation structure-born noise
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