Y98-61303-903 9905940多层多晶硅表面微机械加工工艺=Multi-layer en-hancement to polysilicon surface-micromachining technol-ogy[会,英]/Sniegowski,J.J.& Rodgers,M.S.//1997 IEEE International Electron Devices Meeting....Y98-61303-903 9905940多层多晶硅表面微机械加工工艺=Multi-layer en-hancement to polysilicon surface-micromachining technol-ogy[会,英]/Sniegowski,J.J.& Rodgers,M.S.//1997 IEEE International Electron Devices Meeting.—903~906(AG)展开更多
文摘Y98-61303-903 9905940多层多晶硅表面微机械加工工艺=Multi-layer en-hancement to polysilicon surface-micromachining technol-ogy[会,英]/Sniegowski,J.J.& Rodgers,M.S.//1997 IEEE International Electron Devices Meeting.—903~906(AG)