Porous SiC/Ti-based metallic glass composite (Ti-BMGC), a new kind of composite, has significant application prospectin the field of light armor. To evaluate the dynamic mechanical response of the composite, dynamic V...Porous SiC/Ti-based metallic glass composite (Ti-BMGC), a new kind of composite, has significant application prospectin the field of light armor. To evaluate the dynamic mechanical response of the composite, dynamic Vickers hardness andindentation-induced deformation behavior were investigated by comparison with that under static indentation. The dynamic hardnesswas measured by a modified split Hopkinson pressure bar (SHPB). The dynamic hardness is obviously greater than the statichardness. The brittleness parameter under dynamic indentation is also greater than that under static indentation. Although thedynamic indentation induced more severe deformation behavior than the static indentation, the deformation and fracturecharacteristics in the two loading cases are nearly the same, both exhibiting extensive cracks in the SiC phase and severe plasticdeformation in the metallic glass phase.展开更多
Polysilicon ohmic contacts to n-type 4H-SiC have been fabricated. TLM (transfer length method) test patterns with polysilicon structure are formed on n-wells created by phosphorus ion (P^+) implantation into a Si...Polysilicon ohmic contacts to n-type 4H-SiC have been fabricated. TLM (transfer length method) test patterns with polysilicon structure are formed on n-wells created by phosphorus ion (P^+) implantation into a Si-faced p-type 4H-SiC epilayer. The polysilicon is deposited using low-pressure chemical vapor deposition (LPCVD) and doped by phosphorous ions implantation followed by diffusion to obtain a sheet resistance of 22Ω/□. The specific contact resistance pc of n^+ polysilicon contact to n-type 4H-SiC as low as 3.82 × 10^-5Ω· cm^2 is achieved. The result for sheet resistance Rsh of the phosphorous ion implanted layers in SiC is about 4.9kΩ/□. The mechanisms for n^+ polysilicon ohmic contact to n-type SiC are discussed.展开更多
基金Projects(51471035,51101018)supported by the National Natural Science Foundation of ChinaProject supported by the Beijing Higher Education Young Elite Teacher ProjectProject supported by the Program of "One Hundred Talented People" of the Chinese Academy of Sciences
文摘Porous SiC/Ti-based metallic glass composite (Ti-BMGC), a new kind of composite, has significant application prospectin the field of light armor. To evaluate the dynamic mechanical response of the composite, dynamic Vickers hardness andindentation-induced deformation behavior were investigated by comparison with that under static indentation. The dynamic hardnesswas measured by a modified split Hopkinson pressure bar (SHPB). The dynamic hardness is obviously greater than the statichardness. The brittleness parameter under dynamic indentation is also greater than that under static indentation. Although thedynamic indentation induced more severe deformation behavior than the static indentation, the deformation and fracturecharacteristics in the two loading cases are nearly the same, both exhibiting extensive cracks in the SiC phase and severe plasticdeformation in the metallic glass phase.
文摘Polysilicon ohmic contacts to n-type 4H-SiC have been fabricated. TLM (transfer length method) test patterns with polysilicon structure are formed on n-wells created by phosphorus ion (P^+) implantation into a Si-faced p-type 4H-SiC epilayer. The polysilicon is deposited using low-pressure chemical vapor deposition (LPCVD) and doped by phosphorous ions implantation followed by diffusion to obtain a sheet resistance of 22Ω/□. The specific contact resistance pc of n^+ polysilicon contact to n-type 4H-SiC as low as 3.82 × 10^-5Ω· cm^2 is achieved. The result for sheet resistance Rsh of the phosphorous ion implanted layers in SiC is about 4.9kΩ/□. The mechanisms for n^+ polysilicon ohmic contact to n-type SiC are discussed.