The microfabrication technique for THz dipole antenna,"lift-off" was studied in this paper.Its procedure has been examined in detail,and discreetly tweaked.Particularly,Chlorobenzene is suggested to assist t...The microfabrication technique for THz dipole antenna,"lift-off" was studied in this paper.Its procedure has been examined in detail,and discreetly tweaked.Particularly,Chlorobenzene is suggested to assist the formation of undercut indispensible for fulfilling "lift-off".The experimental results of fabricated antennas confirm the effectiveness of this method.展开更多
文摘The microfabrication technique for THz dipole antenna,"lift-off" was studied in this paper.Its procedure has been examined in detail,and discreetly tweaked.Particularly,Chlorobenzene is suggested to assist the formation of undercut indispensible for fulfilling "lift-off".The experimental results of fabricated antennas confirm the effectiveness of this method.