The nitrogen ions implanted layer of p type 4H SiC epilayer is investigated.The fabrication processes and measurements of the implanted layer are given in details.The profile of implantation depth is simulated using...The nitrogen ions implanted layer of p type 4H SiC epilayer is investigated.The fabrication processes and measurements of the implanted layer are given in details.The profile of implantation depth is simulated using the Monte Carlo simulator TRIM.Lateral Schottky barrier diodes and transfer length method (TLM) measurement structure are made on nitrogen implanted layers for the testing.The concentration of activated donors N d is about 3 0×10 16 cm -3 .The resulting value for the activation rate in this study is 2 percent.The sheet resistance R sh is 30kΩ/□ and the resistivity ρ(R sh × d ) of the implanted layer is 0 72Ω·cm.The electron mobility calculated is about 300cm 2/(V·s) in the N implanted layer.展开更多
The effects of surface cleaning to eliminate the surface oxides formed on Cu seed layer with dilute H2SO4 solution were investigated. Cu seed layer formed on Ti/Si（100） wafer by sputter deposition was exposed to air...The effects of surface cleaning to eliminate the surface oxides formed on Cu seed layer with dilute H2SO4 solution were investigated. Cu seed layer formed on Ti/Si（100） wafer by sputter deposition was exposed to air to grow native Cu oxide. Dilute H2SO4 solutions and/or TS-40A alkaline soak cleaner were used to remove the native Cu-oxide. After mainly carbon groups （such as C=O） on surface of Cu seed layer were removed by pretreatment of TS-40A alkaline solution, subsequently, dilute H2SO4 acid solution removed Cu-oxides （Cu20 and CuO） as well as a lot of O=C and Cu（OH）2.展开更多
In this study,we investigated the structural and dynamical properties of liquid water by using ab initio molecular dynamics simulation under periodic boundary conditions based on the fragment-based quantum mechanical ...In this study,we investigated the structural and dynamical properties of liquid water by using ab initio molecular dynamics simulation under periodic boundary conditions based on the fragment-based quantum mechanical approach.This study was carried out using the second-order Møller-Plesset perturbation theory(MP2)with the aug-cc-pVDZ basis set,which has been validated to be sufficiently accurate for describing water interactions.Diverse properties of liquid water,including radial distribution functions,diffusion coefficient,dipole moment,triplet oxygen-oxygen-oxygen angles,and hydrogen-bond structures,were simulated.This ab initio description leads to these properties in good agreement with experimental observations.This computational approach is general and transferable,providing a comprehensive framework for ab initio predictions of properties of condensed-phase matters.展开更多
文摘The nitrogen ions implanted layer of p type 4H SiC epilayer is investigated.The fabrication processes and measurements of the implanted layer are given in details.The profile of implantation depth is simulated using the Monte Carlo simulator TRIM.Lateral Schottky barrier diodes and transfer length method (TLM) measurement structure are made on nitrogen implanted layers for the testing.The concentration of activated donors N d is about 3 0×10 16 cm -3 .The resulting value for the activation rate in this study is 2 percent.The sheet resistance R sh is 30kΩ/□ and the resistivity ρ(R sh × d ) of the implanted layer is 0 72Ω·cm.The electron mobility calculated is about 300cm 2/(V·s) in the N implanted layer.
基金supported by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (No. 2012026094)
文摘The effects of surface cleaning to eliminate the surface oxides formed on Cu seed layer with dilute H2SO4 solution were investigated. Cu seed layer formed on Ti/Si（100） wafer by sputter deposition was exposed to air to grow native Cu oxide. Dilute H2SO4 solutions and/or TS-40A alkaline soak cleaner were used to remove the native Cu-oxide. After mainly carbon groups （such as C=O） on surface of Cu seed layer were removed by pretreatment of TS-40A alkaline solution, subsequently, dilute H2SO4 acid solution removed Cu-oxides （Cu20 and CuO） as well as a lot of O=C and Cu（OH）2.
基金supported by the National Key R&D Program of China(No.2016YFA0501700 and No.2019YFA0905201)the National Natural Science Foundation of China(No.21703289,No.21922301,and No.21761132022)+2 种基金“Double First-Class”University Project(CPU2018GY09)the Fundamental Research Funds for China Pharmaceutical University(2632019FY01)the Fundamental Research Funds for the Central Universities。
文摘In this study,we investigated the structural and dynamical properties of liquid water by using ab initio molecular dynamics simulation under periodic boundary conditions based on the fragment-based quantum mechanical approach.This study was carried out using the second-order Møller-Plesset perturbation theory(MP2)with the aug-cc-pVDZ basis set,which has been validated to be sufficiently accurate for describing water interactions.Diverse properties of liquid water,including radial distribution functions,diffusion coefficient,dipole moment,triplet oxygen-oxygen-oxygen angles,and hydrogen-bond structures,were simulated.This ab initio description leads to these properties in good agreement with experimental observations.This computational approach is general and transferable,providing a comprehensive framework for ab initio predictions of properties of condensed-phase matters.
