Nonlinear spring characteristics of the tense torsion bar in the gap-closing type electrostatic micromirror are examined. The macro model is introduced for the experimental study. The tension applied in the torsion ba...Nonlinear spring characteristics of the tense torsion bar in the gap-closing type electrostatic micromirror are examined. The macro model is introduced for the experimental study. The tension applied in the torsion bar is well controlled using the electromagnetic attraction. This controllability is suited for clearing the nonlinear nature. The tension is confirmed to have the effect to widen the controllable angle range of the mirror suppressing the pull-in. The pull-in angle is observed to increases to about 74% of the mechanical limit angle at the tension of 0,96 N. This is significantly larger than 44% of the case with the linear spring. The larger resonant frequency is maintained. The hardening of the spring can keep the balance with the electrostatic force over the limit of the linear spring. The observed features are explained reasonably with the combination of twisting and bending displacements of the torsion bar.展开更多
文摘Nonlinear spring characteristics of the tense torsion bar in the gap-closing type electrostatic micromirror are examined. The macro model is introduced for the experimental study. The tension applied in the torsion bar is well controlled using the electromagnetic attraction. This controllability is suited for clearing the nonlinear nature. The tension is confirmed to have the effect to widen the controllable angle range of the mirror suppressing the pull-in. The pull-in angle is observed to increases to about 74% of the mechanical limit angle at the tension of 0,96 N. This is significantly larger than 44% of the case with the linear spring. The larger resonant frequency is maintained. The hardening of the spring can keep the balance with the electrostatic force over the limit of the linear spring. The observed features are explained reasonably with the combination of twisting and bending displacements of the torsion bar.
