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蓝宝石衬底异质外延碳化硅薄膜反应机理研究 被引量:1
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作者 王剑屏 郝跃 +3 位作者 彭军 朱作云 张永华 宋国乡 《功能材料与器件学报》 CAS CSCD 2002年第4期391-396,共6页
对宽禁带半导体材料碳化硅薄膜的异质外延工艺和反应机理进行了讨论,针对实验使用常压水平卧式反应室,分析了生长过程中气流流速分布、反应室内温度分布以及反应气体浓度分布,指出“汽相结晶”过程对薄膜生长区Si/C比例有很大影响,从而... 对宽禁带半导体材料碳化硅薄膜的异质外延工艺和反应机理进行了讨论,针对实验使用常压水平卧式反应室,分析了生长过程中气流流速分布、反应室内温度分布以及反应气体浓度分布,指出“汽相结晶”过程对薄膜生长区Si/C比例有很大影响,从而影响了碳化硅薄膜的生长速率,在SiC薄膜的生长过程中,对Si/C原子比例的控制一直是影响薄膜表面形貌和膜层掺杂浓度的重要因素。这很好地解释了薄膜生长过程中出现的异常现象。 展开更多
关键词 宝石衬底异质外延碳化硅薄膜 反应机理 化学汽相淀积 汽相外延
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电沉积
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《表面工程:英文版》 2005年第2期45-47,共3页
Adhesion improvement of CVD diamond filim by introducing an electro-deposited interlayer; Agitation: the most versatile degree of freedom for surface finishers;Development of hydroxyapatite coating on porous titanium ... Adhesion improvement of CVD diamond filim by introducing an electro-deposited interlayer; Agitation: the most versatile degree of freedom for surface finishers;Development of hydroxyapatite coating on porous titanium via electro-deposition technique;Effect of intense magnetic field on CdTe electro-deposition;Electro deposition of Metallic Lithium on a Tungsten Electrode in 1-Butyl-l-methylpyrrolidinium Bis(tritluoromethanesulfone)imide Room-temperature Molten 展开更多
关键词 电沉积 宝石薄膜 生长工艺 羟磷灰石 多孔渗水钛
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离子镀
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《表面工程:英文版》 2005年第3期19-21,共3页
SY509-3-85 [篇名] Adhesion improvements for diamond-like carbon films on polycarbonate and polymethylmethacrylate substrates by ion plating with inductively coupled plasma;SY509-3-86 [篇名] An expert system to suppor... SY509-3-85 [篇名] Adhesion improvements for diamond-like carbon films on polycarbonate and polymethylmethacrylate substrates by ion plating with inductively coupled plasma;SY509-3-86 [篇名] An expert system to support the optimization of ion plating process: an OLAP-based fuzzy-cum-GA approach;…… 展开更多
关键词 离子镀 腐蚀防护 宝石相碳薄膜 耦合等离子体
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Synthesis of monoclinic structure gallium oxide film on sapphire substrate by magnetron sputtering 被引量:1
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作者 SUN Jian-xu MI Wei +6 位作者 ZHANG De-shuang YANG Zheng-chun ZHANG Kai-liang HAN Ye-mei YUAN Yu-jie ZHAO Jin-shi LI Bo 《Optoelectronics Letters》 EI 2017年第4期295-298,共4页
Gallium oxide (Ga203) films were deposited on singlecrystalline sapphire (0001) substrate by radio frequency (RF) magnetron sputtering technique in the temperature range of 300--500 ℃. The microstructure of the... Gallium oxide (Ga203) films were deposited on singlecrystalline sapphire (0001) substrate by radio frequency (RF) magnetron sputtering technique in the temperature range of 300--500 ℃. The microstructure of the fl-Ga203 films were investigated in detail using X-ray diffractometer (XRD) and scanning electron microscope (SEM). The results show that the film prepared at 500℃ exhibits the best crystallinity with a monoclinic structure (fl-Ga203). Structure analysis reveals a clear out-of-plane orientation offl-Ga203 (201) II A1203 (0001). The average transmittance of these films in the visible wavelength range exceeds 90%, and the optical band gap of the films varies from 4.68 eV to 4.94 eV which were measured by an ultraviolet-visible-near infrared (UV-vis-NIR) spectrophotometer. Therefore, it is hopeful that the fl-Ga203 film can be used in the UV optoelectronic devices. 展开更多
关键词 Energy gap GALLIUM Infrared devices Magnetron sputtering Optoelectronic devices SAPPHIRE Scanning electron microscopy
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The influence of pressure on the growth of a-plane GaN on r-plane sapphire substrates by MOCVD
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作者 HE Tao LI Hui +9 位作者 DAI LongGui WANG XiaoLi CHEN Yao MA ZiGuang XU PeiQiang JIANG Yang WANG Lu JIA HaiQiang WANG WenXin CHEN Hong 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS 2011年第3期446-449,共4页
Nonpolar a-plane (1120) GaN films have been grown on r-plane (1102) sapphire by metal-organic chemical vapor deposition (MOCVD) under different growth pressures. The as-grown films are investigated by optical mi... Nonpolar a-plane (1120) GaN films have been grown on r-plane (1102) sapphire by metal-organic chemical vapor deposition (MOCVD) under different growth pressures. The as-grown films are investigated by optical microscopy, high-resolution X-ray diffraction (HRXRD) and Raman scattering. As growth pressure rises from 100 mbar to 400 mbar, the surface gets rougher, and the in-plane XRD full width at half maximum (FWHM) along the c-axis [0001] increases while that along the m-axis [1100] decreases. Meanwhile, residential stresses are reduced along both the c-axis and the m-axis. The structural anisotropy feature under 400 mbar is inverted with respect to 100 mbar, and the weakened anisotropy is achieved under a moderate pressure of 200 mbar, probably due to the suppressed Ga atomic migration along the c-axis under a larger pressure. We propose that pressure can affect a-plane growth through the V/III ratio. 展开更多
关键词 GaN anisotropy XRD growth pressure MOCVD
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