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采用准分子激光退火的室温沉积ITiO薄膜的性能研究 被引量:2
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作者 沈奕 姚若河 《功能材料》 EI CAS CSCD 北大核心 2013年第21期3146-3148,共3页
采用室温磁控溅射的方法在玻璃衬底上沉积掺Ti氧化铟薄膜,并在真空中采用XeCl准分子激光进行退火,样品的光学、电学性能、相结构分别采用分光光度计、霍尔效应测试仪和X射线衍射仪进行测试。结果表明,功率为100~150mJ/cm^2的准分... 采用室温磁控溅射的方法在玻璃衬底上沉积掺Ti氧化铟薄膜,并在真空中采用XeCl准分子激光进行退火,样品的光学、电学性能、相结构分别采用分光光度计、霍尔效应测试仪和X射线衍射仪进行测试。结果表明,功率为100~150mJ/cm^2的准分子激光照射可以使薄膜由无定形态转变为结晶态,激活所掺杂的Ti原子,降低薄膜的电阻率;增大退火功率还可以进一步降低载流子浓度,提高薄膜的透过率。经150mJ/cm^2准分子激光退火的掺Ti氧化铟薄膜,其电阻率为6.93×10^-4Ω·cm,透过率达到了88.4%。 展开更多
关键词 掺Ti氧化铟 室温沉积 激光退火
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用致密化的等离子聚焦装置室温沉积碳化钛薄膜
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作者 RawatRS 彭补之 《材料保护》 CAS CSCD 北大核心 2002年第7期68-68,共1页
关键词 致密化 等离子聚焦装置 室温沉积 碳化钛薄膜
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用致密化的等离子聚焦装置室温沉积碳化钛薄膜
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《热处理》 CAS 2002年第4期38-38,共1页
关键词 致密化 等离子聚焦装置 室温沉积 碳化钛薄膜
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室温电沉积制备铝镁合金的研究进展 被引量:3
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作者 阚洪敏 祝跚珊 +3 位作者 冯筱珺 张宁 王晓阳 龙海波 《中国材料进展》 CAS CSCD 北大核心 2017年第1期58-62,共5页
铝镁合金因其优异的耐蚀性、装饰性、抗氧化性和可加工性成为理想的构件防护材料;除此之外,由于其质量轻,理论储氢量高,铝镁合金作为储氢材料具有广泛应用前景。为使铝镁合金得到良好的应用,需要制备超细结构纯净合金,电沉积是制备高纯... 铝镁合金因其优异的耐蚀性、装饰性、抗氧化性和可加工性成为理想的构件防护材料;除此之外,由于其质量轻,理论储氢量高,铝镁合金作为储氢材料具有广泛应用前景。为使铝镁合金得到良好的应用,需要制备超细结构纯净合金,电沉积是制备高纯合金的有效方法之一。室温电沉积是在室温条件下,通过控制沉积参数实现对合金微观组织结构和成分的控制,制备高纯超细合金。综述了室温电沉积制备铝镁合金的体系和电流密度、沉积方式、镁离子引入方式及实验环境和条件等对铝镁合金组成、形貌和晶体结构等的影响,重点介绍了室温电沉积铝镁合金的影响因素及铝镁合金在装饰、防腐蚀和储氢等方面的应用,提出了室温电沉积制备高纯铝镁合金存在的问题及未来的发展趋势。 展开更多
关键词 室温沉积 铝镁合金 沉积体系 影响因素
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室温下Ba_(0.67)Sr_(0.33)TiO_3薄膜的射频磁控溅射法制备及其电学性能研究
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作者 杜层虎 陈潇洋 +3 位作者 徐樽平 严东旭 朱建国 余萍 《湖北大学学报(自然科学版)》 CAS 2013年第3期332-335,共4页
采用磁控溅射技术在室温下制备Ba0.67Sr0.33TiO3薄膜,通过引入LaNiO3作为缓冲层以及对退火工艺的研究,采用两步法快速退火工艺与常规退火工艺结合的方式获得了致密并具有良好电学性能的钛酸锶钡薄膜.X线衍射分析表明室温情况下获得的薄... 采用磁控溅射技术在室温下制备Ba0.67Sr0.33TiO3薄膜,通过引入LaNiO3作为缓冲层以及对退火工艺的研究,采用两步法快速退火工艺与常规退火工艺结合的方式获得了致密并具有良好电学性能的钛酸锶钡薄膜.X线衍射分析表明室温情况下获得的薄膜是非晶态,需要通过后续的退火处理才能获得晶化的薄膜,采用快速退火与常规退火相结合工艺,即以40℃/s的升温速率,先升温到850℃,再降温到450℃保温180s,然后再在500℃常规退火3h,可使室温下溅射的呈非晶态的BST薄膜晶化形成具有完全钙钛矿结构的BST薄膜,薄膜致密,晶粒大小均匀.室温下所制备的BST薄膜在100Hz时的介电常数约为300,介电损耗约为0.03,具有铁电性. 展开更多
关键词 射频磁控溅射 钛酸锶钡薄膜 室温沉积
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ITO/Metal/ITO叠层电极中Cu/Ag对钙钛矿太阳电池电极性能的影响 被引量:3
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作者 江雨童 陈东 +3 位作者 孙泽华 黄跃龙 俞健 陈涛 《太阳能学报》 EI CAS CSCD 北大核心 2022年第9期83-87,共5页
研究ITO/Metal/ITO(IMI)电极中金属层Cu和Ag及其厚度对电极光电性能的影响,结合霍尔测试、紫外分光光度计、原子力显微镜等分析金属层材料和厚度对IMI电极光电性能以及形貌的影响。通过优化金属层厚度,获得方阻分别为11.2Ω/和14.5Ω/且... 研究ITO/Metal/ITO(IMI)电极中金属层Cu和Ag及其厚度对电极光电性能的影响,结合霍尔测试、紫外分光光度计、原子力显微镜等分析金属层材料和厚度对IMI电极光电性能以及形貌的影响。通过优化金属层厚度,获得方阻分别为11.2Ω/和14.5Ω/且400~800 nm波长范围内平均透过率分别为93.9%和86.5%的ITO/Ag/ITO和ITO/Cu/ITO电极。将IAI和ICI电极作为正面电极应用于钙钛矿太阳电池,太阳电池的填充因子从62.5%提升至78.0%。IMI在短波段的较大反射率会导致电池短路电流密度低1~2 mA/cm^(2)。当Cu层和Ag层的厚度分别为7.4 nm和6.4 nm时,钙钛矿太阳电池的效率达到最佳。 展开更多
关键词 钙钛矿太阳电池 ITO玻璃 室温沉积 金属夹层
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Ag层厚度对AZO/Ag/AZO透明导电薄膜性能的影响 被引量:2
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作者 李明亮 刘利 沈燕 《真空》 CAS 2020年第1期31-34,共4页
在室温条件下,采用磁控溅射技术在玻璃衬底上生长了AZO/Ag/AZO多层透明导电薄膜。主要研究了Ag层厚度对多层透明导电薄膜结构和性能的影响。研究表明,AZO和Ag分别延(002)面和(111)面高度择优生长,随着Ag层厚度的增加,多层透明导电薄膜... 在室温条件下,采用磁控溅射技术在玻璃衬底上生长了AZO/Ag/AZO多层透明导电薄膜。主要研究了Ag层厚度对多层透明导电薄膜结构和性能的影响。研究表明,AZO和Ag分别延(002)面和(111)面高度择优生长,随着Ag层厚度的增加,多层透明导电薄膜的电阻率不断降低,透过率呈现先降低再增加最后再降低的变化趋势,其中Ag层厚度为8nm的样品获得最大品质因子33.1×10^-3Ω^-1,综合性能最佳。 展开更多
关键词 透明导电薄膜 AZO/Ag/AZO 室温沉积
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Electrodeposition of aluminum and aluminum-magnesium alloys at room temperature 被引量:5
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作者 阚洪敏 祝跚珊 +1 位作者 张宁 王晓阳 《Journal of Central South University》 SCIE EI CAS CSCD 2015年第10期3689-3697,共9页
Electrodeposition of aluminum from benzene-tetrahydrofuran-Al Cl3-Li Al H4 was studied at room temperature. Galvanostatic electrolysis was used to investigate the effect of various parameters on deposit morphology and... Electrodeposition of aluminum from benzene-tetrahydrofuran-Al Cl3-Li Al H4 was studied at room temperature. Galvanostatic electrolysis was used to investigate the effect of various parameters on deposit morphology and crystal size, including current density, temperature, molar ratio of benzene/tetrahydrofuran and stirring speed. The deposit microstructure was adjusted by changing the parameters, and the optimum operating conditions were determined. Dense, bright and adherent aluminum coatings were obtained over a wide range of current densities(10-25 m A/cm2), molar ratio of benzene and tetrahydrofuran(4:1 to 7:8) and stirring speeds(200-500 r/min). Smaller grain sizes and well-adhered deposits were obtained at lower temperatures. Aluminum-magnesium alloys could potentially be used as hydrogen storage materials. A novel method for Al-Mg deposition was proposed by using pure Mg anodes in the organic solvents system benzene-tetrahydrofuran-Al Cl3-Li Al H4. XRD shows that the aluminum-magnesium alloys are mainly Al3Mg2 and Al12Mg17. 展开更多
关键词 ELECTRODEPOSITION aluminum coating aluminum-magnesium(Al-Mg) coating organic solvent system
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Impact of Climate Change and Deforestation on Stream Discharge and Sediment Yield in Phu Luong Watershed, Viet Nam 被引量:3
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作者 D.B. Phan C.C. Wu S.C. Hsieh 《Journal of Environmental Science and Engineering》 2011年第8期1063-1072,共10页
The purpose of this paper is to apply "Soil and Water Assessment Tool (SWAT)" model to assess the impacts of climate change and deforestation on stream discharge and sediment yield from Phu Luong watershed in Nort... The purpose of this paper is to apply "Soil and Water Assessment Tool (SWAT)" model to assess the impacts of climate change and deforestation on stream discharge and sediment yield from Phu Luong watershed in Northern Viet Nam. Among the three climate change scenarios B 1, B2, and A2, representing low, medium, and high levels of greenhouse gas emission, respectively were set up for Viet Nam, the B2 scenario was selected for this study. Two land use scenarios (S1-2030 and $2-2050) were formulated combination with climate change in WSAT simulation. In B2 climate change scenario, mean temperature increases 0.7℃(2030) and 1.3 ℃ (2050); annual rainfall increases 2.1% (2030) and 3.80% (2050) respect to baseline scenario. The results show that the stream discharge is likely to increase in the future during the wet season with increasing threats of sedimentation. 展开更多
关键词 SWAT climate change DEFORESTATION sediment yield stream discharge
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Late Quaternary Strata and Carbon Burial Records in the Yellow River Delta, China 被引量:4
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作者 ZHAO Guangming YE Siyuan +2 位作者 LI Guangxue DING Xigui YUAN Hongming 《Journal of Ocean University of China》 SCIE CAS 2015年第3期446-456,共11页
Sediment carbon sequestration plays an essential role in mitigating atmospheric CO2 increases and the subsequently global greenhouse effect. To clarify the late Quaternary strata and carbon burial records in YeUow Riv... Sediment carbon sequestration plays an essential role in mitigating atmospheric CO2 increases and the subsequently global greenhouse effect. To clarify the late Quaternary strata and carbon burial records in YeUow River delta (YRD), detailed analysis of benthic foraminifera, total carbon (TC), organic carbon (Corg), sedimentary characteristics and moisture contents of sediments, was performed on core ZK3, 30.3 m in length and obtained from YRD in 2007. Eight depositional units (designated U1-U8 in ascending order) were identified. A comprehensive analysis method of historical geography and sedimentary geology was used to de- termine the precise depositional ages of the modem Yellow River delta (MYRD), from which pre-MYRD ages were deduced. The results indicates that the maximum burial rates of TC, inorganic carbon (IC) and Corg occurred in the delta front (U5), and the mini- mum in the shallow sea (U3). Remarkable high sedimentation rates in the MYRD are responsible for burial efficiency of carbon, with an average rate of Corg burial reaching 2087±251 g(m2yr)-1, and that of IC reaching 13741±808g(m2yr)-1, which are much higher than those of other regions with high contents of Corg. Therefore, YRD has a significant burial efficiency for carbon sequestration. 展开更多
关键词 Yellow River delta late Quaternary strata carbon burial rate organic carbon inorganic carbon
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倾斜磁控溅射制备低阻高透ITO薄膜及其光电特性 被引量:2
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作者 赵海娇 王丛 +1 位作者 石晓光 刁训刚 《功能材料与器件学报》 CAS CSCD 北大核心 2010年第6期600-604,共5页
利用直流磁控溅射方法,在Ar和O_2的混合气氛中,采用陶瓷靶制备ITO薄膜;采用紫外-可见-红外分光光度计和四探针法研究了溅射工艺参数对ITO薄膜的光电特性的影响。实验结果表明,当靶材角度在23-25°、O_2流量在7-9sccm、溅射时间在60-... 利用直流磁控溅射方法,在Ar和O_2的混合气氛中,采用陶瓷靶制备ITO薄膜;采用紫外-可见-红外分光光度计和四探针法研究了溅射工艺参数对ITO薄膜的光电特性的影响。实验结果表明,当靶材角度在23-25°、O_2流量在7-9sccm、溅射时间在60-90 min和溅射功率在100-120W时获得可见光透过率高于90%,方阻在10-20Ω/□之间的优质ITO薄膜。 展开更多
关键词 ITO 透明导电膜 直流磁控溅射 室温沉积 靶材倾斜角度
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Accurate characterization of room-temperature long range magnetic order in GaN: Mn by magnetic force microscope 被引量:1
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作者 ZHANG YuHao LIN ZhiYuan +8 位作者 CHEN ZhiTao QIAN YuZhou YANG XueLin LI Ding ZHANG FaFa DAI Tao HAN BaoShan WANG CunDa ZHANG GuoYi 《Science China(Technological Sciences)》 SCIE EI CAS 2011年第1期15-18,共4页
Room-temperature ferromagnetism with a Curie temperature higher than 380 K was studied in GaN: Mn thin films grown by metal-organic chemical vapor deposition. By etching artificial microstructures on the GaN: Mn layer... Room-temperature ferromagnetism with a Curie temperature higher than 380 K was studied in GaN: Mn thin films grown by metal-organic chemical vapor deposition. By etching artificial microstructures on the GaN: Mn layer,strong magnetic responses were observed in the magnetic force microscopy (MFM) measurement,which revealed that the films were independent of dopant particles and clusters. Numerical simulation on the data of atomic force microscope (AFM) and MFM measurements covering the whole microstructure validated the formation of long range magnetic order. This result excluded a variety of controversial origins of room-temperature ferromagnetism in the GaN: Mn and gave a strong evidence of our GaN: Mn as the intrinsic diluted magnetic semiconductor (DMS). The forwarded method for accurate characterization of long range magnetic order could be applied to a wide range of DMS and diluted magnetic oxide (DMO) systems. 展开更多
关键词 GaN: Mn diluted magnetic semiconductor atomic force microscope magnetic force microscope room-temperature longrange magnetic order
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Room-temperature magnetoresistance in a-C:Co/Si system
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作者 ZHANG Xin ZHANG XiaoZhong WAN CaiHua 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS 2011年第7期1213-1217,共5页
Three types of a-C:Co/Si samples were fabricated using the pulsed laser deposition: Co2-C98/8i with Co dispersed in the a-C film, Co2-C98/Si with Co segregated at the interface, and a-C/Co/Si with Co continuously dist... Three types of a-C:Co/Si samples were fabricated using the pulsed laser deposition: Co2-C98/8i with Co dispersed in the a-C film, Co2-C98/Si with Co segregated at the interface, and a-C/Co/Si with Co continuously distributed at the a-C/Si interface. Both types of Co2-C98/Si samples had the positive bias-voltage-dependent magnetoresistance (MR) at 300 K, and all MRs had saturated behavior. The study on the electrotransport properties indicated that the MR appeared in the diffusion current region, and the mechanism of MR was proposed to be that the applied magnetic field and local random magnetic field caused by the superparamagnetic Co particles modulate the ratio of singlet and triplet spin states, resulting in the MR effect. In addition, the very different physical and structural properties of all samples revealed that Co played a crucial role in the room-temperature positive MR of a-C:Co/Si system. 展开更多
关键词 MAGNETORESISTANCE carbon film pulsed laser deposition
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Mn-doped SiGe thin films grown by UHV/CVD with room-temperature ferromagnetism and high hole mobility 被引量:2
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作者 Limeng Shen Xi Zhang +3 位作者 Jiaqi Wang Jianyuan Wang Cheng Li Gang Xiang 《Science China Materials》 SCIE EI CAS CSCD 2022年第10期2826-2832,共7页
In this work,silicon-germanium(SiGe)thin films are epitaxially grown on Ge substrates by ultra-high vacuum chemical vapor deposition and then doped with Mn element by ion-implantation and subsequent rapid thermal anne... In this work,silicon-germanium(SiGe)thin films are epitaxially grown on Ge substrates by ultra-high vacuum chemical vapor deposition and then doped with Mn element by ion-implantation and subsequent rapid thermal annealing(RTA).The characterizations show that the epitaxial SiGe thin films are single-crystalline with uniform tensile strain and then become polycrystalline after the ion implantation and following RTA.The magnetization measurements indicate that the annealed thin films exhibit Mn concentration-dependent ferromagnetism up to 309 K and the X-ray magnetic circular dichroism characterizations reveal the spin and orbital magnetic moments from the substitutional Mn element.To minimize the influence of anomalous Hall effect,magneto-transport measurements at a high magnetic field up to 31 T at 300 K are performed to obtain the hole mobility,which reaches a record-high value of~1230 cm^(2)V^(-1)s^(-1),owing to the crystalline quality and tensile strain-induced energy band modulation of the samples.The first demonstration of Mn-doped SiGe thin films with roomtemperature ferromagnetism and high carrier mobility may pave the way for practical semiconductor spintronic applications. 展开更多
关键词 diluted magnetic semiconductor Mn-doped SiGe FERROMAGNETISM hole mobility UHV/CVD
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