Sensing structure of grid strip capacitors can be used in the design of capacitive micro-electromechanical system （MEMS） resonators, accelerometers etc. A grid strip structure consists of nonentirely overlap plates ...Sensing structure of grid strip capacitors can be used in the design of capacitive micro-electromechanical system （MEMS） resonators, accelerometers etc. A grid strip structure consists of nonentirely overlap plates so that the capacitor fringe effect cannot be neglected in the design. Electricmagnetic Finite Element Method （FEM） software ANSOFF-Maxwell is employed to analyze the fringe effect of a grid strip capacitor. The analysis includes capacitance changes with change of overlap length, overlap width, plate thickness, grid strip density etc. The results show that fringe effect leads to non-linear change of grid strip capacitance with the change of overlap length and width, that the capacitance increases with the increase of grid strip width and plate thickness, and that sensitivity can be improved through the increase of grid strip density in the condition of identical total overlap area, but linearity is reduced.展开更多
基金Supported by the National Natural Science Foundation of China （ No. 60903195 ） and the Key Technological Problems Tackling Project of Wuhan （No. 200750499172）.
文摘Sensing structure of grid strip capacitors can be used in the design of capacitive micro-electromechanical system （MEMS） resonators, accelerometers etc. A grid strip structure consists of nonentirely overlap plates so that the capacitor fringe effect cannot be neglected in the design. Electricmagnetic Finite Element Method （FEM） software ANSOFF-Maxwell is employed to analyze the fringe effect of a grid strip capacitor. The analysis includes capacitance changes with change of overlap length, overlap width, plate thickness, grid strip density etc. The results show that fringe effect leads to non-linear change of grid strip capacitance with the change of overlap length and width, that the capacitance increases with the increase of grid strip width and plate thickness, and that sensitivity can be improved through the increase of grid strip density in the condition of identical total overlap area, but linearity is reduced.
