导向自组装(Directed Self-Assembly,DSA)光刻技术是一种极具发展潜力的新型图形化工艺,已被国际器件与系统路线图(International Roadmap for Devices and Systems,IRDS)列为下一代光刻技术的主要候选方案。DSA光刻技术是基于嵌段共聚...导向自组装(Directed Self-Assembly,DSA)光刻技术是一种极具发展潜力的新型图形化工艺,已被国际器件与系统路线图(International Roadmap for Devices and Systems,IRDS)列为下一代光刻技术的主要候选方案。DSA光刻技术是基于嵌段共聚物(Block Copolymer,BCP)自组装构建高分辨图案,能够突破传统光学光刻的衍射极限,具有高通量、低成本和延续性好等显著优势,已成为半导体工艺技术中的研发热点。将DSA与其它光刻技术如极紫外(Extreme Ultraviolet,EUV)光刻、深紫外(Deep Ultraviolet,DUV)光刻、紫外光刻和纳米压印光刻(Nanoimprint Lithography,NIL)等相结合,能极大地提高加工结构的分辨率以及器件的密度。目前,DSA光刻技术已被应用于鳍式场效应晶体管(Fin Field-Effect Transistor,FinFET)、存储器和光电子器件等领域,以期实现高密度集成和高效率低成本制造。本文对DSA光刻技术的原理、材料、工艺、应用以及在工业化进程中所面临的机遇和挑战进行全面的综述。展开更多
Self-assembly of nanocrystals can not only lead to a better understanding of inter-particle acting force, but also enable rational building of complex and functional materials for future nanodevices. Here by utilizing...Self-assembly of nanocrystals can not only lead to a better understanding of inter-particle acting force, but also enable rational building of complex and functional materials for future nanodevices. Here by utilizing polyvinylpyrrolidone （PVP） as the as capping and structure directing agents, hierarchical Mn304 architectures involving coil-like nanorings, hexagonal nanoframes, and nanodisks are conveniently synthesized by a one-pot solution method. The sophisticated assemblies are proven to be me- diated by the PVP soft templates formed at varied concentrations. The driving forces of self-assembled complex nanostructures and the unique role of PVP concentration are discussed. Magnetic properties of the as assembled Mn3O4 rings are also studied by a SQUID system, which shows the typical side effect of Curie temperature.展开更多
基金supported by the National Natural Science Foundation of China (Grant Nos. 20973019,50725208 and 50902007)the Fundamental Research Funds for the Central Universities (Grant No. YMF1002016)
文摘Self-assembly of nanocrystals can not only lead to a better understanding of inter-particle acting force, but also enable rational building of complex and functional materials for future nanodevices. Here by utilizing polyvinylpyrrolidone （PVP） as the as capping and structure directing agents, hierarchical Mn304 architectures involving coil-like nanorings, hexagonal nanoframes, and nanodisks are conveniently synthesized by a one-pot solution method. The sophisticated assemblies are proven to be me- diated by the PVP soft templates formed at varied concentrations. The driving forces of self-assembled complex nanostructures and the unique role of PVP concentration are discussed. Magnetic properties of the as assembled Mn3O4 rings are also studied by a SQUID system, which shows the typical side effect of Curie temperature.
