TH703 2004010644 离轴非球面轮廓测量导轨直线度误差补偿模型=Linearerror compensation model of profile′s guide for off-axis aspherics[刊,中]/程灏波(中科院长春光机所应用光学国家重点实验室.吉林,长春(130022)),王英伟…∥光...TH703 2004010644 离轴非球面轮廓测量导轨直线度误差补偿模型=Linearerror compensation model of profile′s guide for off-axis aspherics[刊,中]/程灏波(中科院长春光机所应用光学国家重点实验室.吉林,长春(130022)),王英伟…∥光学技术.—2003,29(2).—211-215 在新一代数控光学加工中心(FSGJ-Ⅱ)上。展开更多
A novel method for laser beam straightness error measurements based on common-path compensation is proposed. The basic principle of the method is described and the math-model is established. Furthermore,the influence ...A novel method for laser beam straightness error measurements based on common-path compensation is proposed. The basic principle of the method is described and the math-model is established. Furthermore,the influence of laser beam drift on straightness error measurements is analyzed. The experimental results show that the measurement accuracy can be greatly improved by using the common-path compensation for laser beam drift.展开更多
文摘TH703 2004010644 离轴非球面轮廓测量导轨直线度误差补偿模型=Linearerror compensation model of profile′s guide for off-axis aspherics[刊,中]/程灏波(中科院长春光机所应用光学国家重点实验室.吉林,长春(130022)),王英伟…∥光学技术.—2003,29(2).—211-215 在新一代数控光学加工中心(FSGJ-Ⅱ)上。
基金supported by the National Natural Science Foundation of China (No. 50675017).
文摘A novel method for laser beam straightness error measurements based on common-path compensation is proposed. The basic principle of the method is described and the math-model is established. Furthermore,the influence of laser beam drift on straightness error measurements is analyzed. The experimental results show that the measurement accuracy can be greatly improved by using the common-path compensation for laser beam drift.