Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to en...Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.展开更多
X-ray digital imaging technology has found wide application owing to its advantages of real-time, visualization and rapid imaging. In substations the substantial electromagnetic interference has some influence on the ...X-ray digital imaging technology has found wide application owing to its advantages of real-time, visualization and rapid imaging. In substations the substantial electromagnetic interference has some influence on the live detection by the X-ray digital imaging technology, hindering the promotion of the technology in the detection of electric equipment. Based on a large number of field tests, the author carded out a series of researches on electromagnetic interference protection measures, image de-noising, and image enhancement algorithms.展开更多
文摘Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.
文摘X-ray digital imaging technology has found wide application owing to its advantages of real-time, visualization and rapid imaging. In substations the substantial electromagnetic interference has some influence on the live detection by the X-ray digital imaging technology, hindering the promotion of the technology in the detection of electric equipment. Based on a large number of field tests, the author carded out a series of researches on electromagnetic interference protection measures, image de-noising, and image enhancement algorithms.
