Geometrical features of micro-systems can be determined by either tactile or optical profiling techniques, which show different non-linear transfer characteristics. This has to be considered especially, if the instrum...Geometrical features of micro-systems can be determined by either tactile or optical profiling techniques, which show different non-linear transfer characteristics. This has to be considered especially, if the instruments operate close to their physical limitations. Depending on the specific measuring task either point-wise or areal optical measurement may be advantageous. Hence, examples for both approaches are discussed. Furthermore, systematic effects, which are related to the measuring principle have to be taken into account, e.g. if sharp edges or slopes are present on the measuring object. As it is shown, for white-light interferometry these difficulties can be solved by a two-wavelength technique.展开更多
A temporal approach to fast shape measurement is presented.In principle,the rotational object method is used in combination with the sequence pulse counting method (SPCM) to determine the height of the object through ...A temporal approach to fast shape measurement is presented.In principle,the rotational object method is used in combination with the sequence pulse counting method (SPCM) to determine the height of the object through calculating the related phase.Two specimens are tested to demonstrate the validity of the approach.One is an object covered by a Chinese character (tea) with a height variety of 0.3 mm,and the other is an object surface with a relatively large fluctuation of 3.5 mm.The experimental results are compared with mechanical measurements.An axis shifting method is also proposed to determine shapes with relatively large fluctuations.Effects of such parameters on the height measurement as incident angle of the dual light beams,tilting angle of the object,and azimuth angle of the measured point are discussed as well.展开更多
文摘Geometrical features of micro-systems can be determined by either tactile or optical profiling techniques, which show different non-linear transfer characteristics. This has to be considered especially, if the instruments operate close to their physical limitations. Depending on the specific measuring task either point-wise or areal optical measurement may be advantageous. Hence, examples for both approaches are discussed. Furthermore, systematic effects, which are related to the measuring principle have to be taken into account, e.g. if sharp edges or slopes are present on the measuring object. As it is shown, for white-light interferometry these difficulties can be solved by a two-wavelength technique.
基金supported by the National Natural Science Foundation of China(Grants Nos. 10972113,10732080)the National Basic Research Program of China(Grant Nos. 2007CB936803,2010CB631005)SRFDP(Grant No. 20070003053)
文摘A temporal approach to fast shape measurement is presented.In principle,the rotational object method is used in combination with the sequence pulse counting method (SPCM) to determine the height of the object through calculating the related phase.Two specimens are tested to demonstrate the validity of the approach.One is an object covered by a Chinese character (tea) with a height variety of 0.3 mm,and the other is an object surface with a relatively large fluctuation of 3.5 mm.The experimental results are compared with mechanical measurements.An axis shifting method is also proposed to determine shapes with relatively large fluctuations.Effects of such parameters on the height measurement as incident angle of the dual light beams,tilting angle of the object,and azimuth angle of the measured point are discussed as well.
