O438.1 2002042722 采用光折变全息干涉计量术对光楔特性的测量=Mea-surement on characteristics of CW optical wedgeplates by holographic interferometry[刊,中]/范云正(山东大学数理系.山东,济南(250061))∥半导体光电.—2001,22(...O438.1 2002042722 采用光折变全息干涉计量术对光楔特性的测量=Mea-surement on characteristics of CW optical wedgeplates by holographic interferometry[刊,中]/范云正(山东大学数理系.山东,济南(250061))∥半导体光电.—2001,22(1).—69-72光折变晶体是一种新型的记录材料。展开更多
Geometrical features of micro-systems can be determined by either tactile or optical profiling techniques, which show different non-linear transfer characteristics. This has to be considered especially, if the instrum...Geometrical features of micro-systems can be determined by either tactile or optical profiling techniques, which show different non-linear transfer characteristics. This has to be considered especially, if the instruments operate close to their physical limitations. Depending on the specific measuring task either point-wise or areal optical measurement may be advantageous. Hence, examples for both approaches are discussed. Furthermore, systematic effects, which are related to the measuring principle have to be taken into account, e.g. if sharp edges or slopes are present on the measuring object. As it is shown, for white-light interferometry these difficulties can be solved by a two-wavelength technique.展开更多
SPIE-Vol.3777 01165331999年SPIE会议录,Vol.3777:带电粒子光学,4=1999 proceedings of SPIE,Vol.3777:charged particleoptics Ⅳ[会,英]/SPIE-The International Society forOptical Engineering.—1999.—276P.(EC)本会议录收集了于...SPIE-Vol.3777 01165331999年SPIE会议录,Vol.3777:带电粒子光学,4=1999 proceedings of SPIE,Vol.3777:charged particleoptics Ⅳ[会,英]/SPIE-The International Society forOptical Engineering.—1999.—276P.(EC)本会议录收集了于1999年7月22~23日在科罗拉多州Denver召开的带电粒子光学会议上发表的26篇论文,内容涉及电子束光刻,场准确度与分辨率评价,电子源与电子辐射,象差分析与优化,成象,离子光学,空间电荷与离散库仑互作用,能量滤波器,分析器与曲线轴系统。0116534采用光折变全息干涉计量术对光楔特性的测量[刊]/范云正//半导体光电.—2001,22(1).—69~72(C)光折变晶体是一种新型的记录材料,应用光折变效应,不需显影、定影等处理,就可实现实时观测。展开更多
This paper reviews some of the key enabling technologies for advanced and future laser interferometer gravitational wave detectors, which must combine test masses with the lowest possible optical and acoustic losses, ...This paper reviews some of the key enabling technologies for advanced and future laser interferometer gravitational wave detectors, which must combine test masses with the lowest possible optical and acoustic losses, with high stability lasers and various techniques for suppressing noise. Sect. 1 of this paper presents a review of the acoustic properties of test masses. Sect. 2 reviews the technology of the amorphous dielectric coatings which are currently universally used for the mirrors in advanced laser interferometers, but for which lower acoustic loss would be very advantageous. In sect. 3 a new generation of crystalline optical coatings that offer a substantial reduction in thermal noise is reviewed. The optical properties of test masses are reviewed in sect. 4, with special focus on the properties of silicon, an important candidate material for future detectors. Sect. 5 of this paper presents the very low noise, high stability laser technology that underpins all advanced and next generation laser interferometers.展开更多
文摘O438.1 2002042722 采用光折变全息干涉计量术对光楔特性的测量=Mea-surement on characteristics of CW optical wedgeplates by holographic interferometry[刊,中]/范云正(山东大学数理系.山东,济南(250061))∥半导体光电.—2001,22(1).—69-72光折变晶体是一种新型的记录材料。
文摘Geometrical features of micro-systems can be determined by either tactile or optical profiling techniques, which show different non-linear transfer characteristics. This has to be considered especially, if the instruments operate close to their physical limitations. Depending on the specific measuring task either point-wise or areal optical measurement may be advantageous. Hence, examples for both approaches are discussed. Furthermore, systematic effects, which are related to the measuring principle have to be taken into account, e.g. if sharp edges or slopes are present on the measuring object. As it is shown, for white-light interferometry these difficulties can be solved by a two-wavelength technique.
文摘SPIE-Vol.3777 01165331999年SPIE会议录,Vol.3777:带电粒子光学,4=1999 proceedings of SPIE,Vol.3777:charged particleoptics Ⅳ[会,英]/SPIE-The International Society forOptical Engineering.—1999.—276P.(EC)本会议录收集了于1999年7月22~23日在科罗拉多州Denver召开的带电粒子光学会议上发表的26篇论文,内容涉及电子束光刻,场准确度与分辨率评价,电子源与电子辐射,象差分析与优化,成象,离子光学,空间电荷与离散库仑互作用,能量滤波器,分析器与曲线轴系统。0116534采用光折变全息干涉计量术对光楔特性的测量[刊]/范云正//半导体光电.—2001,22(1).—69~72(C)光折变晶体是一种新型的记录材料,应用光折变效应,不需显影、定影等处理,就可实现实时观测。
基金financial support during The Next Detectors for Gravitational Wave Astronomy workshop in Beijing in 2015
文摘This paper reviews some of the key enabling technologies for advanced and future laser interferometer gravitational wave detectors, which must combine test masses with the lowest possible optical and acoustic losses, with high stability lasers and various techniques for suppressing noise. Sect. 1 of this paper presents a review of the acoustic properties of test masses. Sect. 2 reviews the technology of the amorphous dielectric coatings which are currently universally used for the mirrors in advanced laser interferometers, but for which lower acoustic loss would be very advantageous. In sect. 3 a new generation of crystalline optical coatings that offer a substantial reduction in thermal noise is reviewed. The optical properties of test masses are reviewed in sect. 4, with special focus on the properties of silicon, an important candidate material for future detectors. Sect. 5 of this paper presents the very low noise, high stability laser technology that underpins all advanced and next generation laser interferometers.