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平面子孔径拼接测量研究 被引量:11
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作者 丁凌艳 戴一帆 陈善勇 《光学精密工程》 EI CAS CSCD 北大核心 2008年第6期978-985,共8页
通过椭圆形(长轴为225 mm,短轴为161 mm)SiC平面反射镜的全口径面形加工测量实验,验证了一种新的子孔径拼接测量算法—子孔径拼接迭代算法(SASL算法)的有效性。用100 mm口径平面平晶的子孔径拼接测量与全口径测量的对比实验,确定了拼接... 通过椭圆形(长轴为225 mm,短轴为161 mm)SiC平面反射镜的全口径面形加工测量实验,验证了一种新的子孔径拼接测量算法—子孔径拼接迭代算法(SASL算法)的有效性。用100 mm口径平面平晶的子孔径拼接测量与全口径测量的对比实验,确定了拼接测量相关参数及测量装置的精度指标。在此基础上设计了SiC平面反射镜的子孔径拼接实验,在搭建的拼接装置上实现了5次离子束迭代加工过程和最终的全口径面形测量。加工过程中的测量结果为面形误差修正提供了准确的数据,保证了最终全口径面形误差RMS快速收敛到50 nm。实验证明,SASL算法能大大放宽拼接装置对对准运动的精度要求,并能减少拼接过程对拼接结果的影响。 展开更多
关键词 平面镜测量 子孔径 拼接算法 SiC平面镜
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A Flexible Calibration Method of Laser Light-Sectioning System for Online 3D Measurement
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作者 KANG Xin SUN Wei +1 位作者 YIN Zhuoyi LIU Cong 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI CSCD 2021年第6期1048-1057,共10页
A flexible calibration method based on a front-coated flat mirror is proposed for a laser light-sectioning three-dimensional(3D)measurement system. Since the calibration target and its mirror image are spatially separ... A flexible calibration method based on a front-coated flat mirror is proposed for a laser light-sectioning three-dimensional(3D)measurement system. Since the calibration target and its mirror image are spatially separated and can be recorded in an image by a camera,the proposed method requires only a single composite image that contains a non-planar checkerboard pattern,a laser strip projected on the target and their mirror images to complete the calibration of the camera and the laser plane in one step. Levenberg-Marquardt(LM)algorithm is used to optimize the system parameters,and the measurement accuracy and speed are improved to enable online 3D inspection. Static and dynamic online 3D measurements are carried out on a cup and a triple stepped shaft,respectively,to validate the proposed method. The shaft has two steps with the depth of(0.5±0.01)mm and(2±0.01)mm to be measured online when the shaft is rotated and translated at the same time. The measurement results can be output at a frequency of 7 to 11 readings per second with standard deviations of 0.040 mm and 0.051 mm. The experimental results verify the effectiveness and flexibility of the proposed method. 展开更多
关键词 laser light-sectioning system calibration front-coated flat mirror online three-dimentional(3D)measurement Levenberg-Marquardt(LM)algorithm
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A displacement measurement system based on optical triangulation method 被引量:1
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作者 付献斌 刘彬 张玉存 《Optoelectronics Letters》 EI 2011年第5期380-383,共4页
A new displacement measurement system is described in this paper according to the basic principles of traditional lasertriangulation method. The range of the traditional measuring method is enlarged by measuring in se... A new displacement measurement system is described in this paper according to the basic principles of traditional lasertriangulation method. The range of the traditional measuring method is enlarged by measuring in sections. Three independent CCDs, which are distributed uniformly along the optical axis, are used to achieve subsection measurement. The planemirror is regarded as a virtual detector. When imaging beam is reflected by the plane mirror, the beam is imaged on theCC D. The designed system is equivalent to add a CCD. The feasibility of the displacement measurement system is verifiedby the experiment. 展开更多
关键词 TRIANGULATION
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