O436.1 2001042873光电定角比相法检测圆光栅测量精度的提高=Improvementof measurement precision of circular raster by photoelectricphase-comparing method for angle positioning[刊,中]/张红胜,冯长有(中科院长春光机所,吉林,长...O436.1 2001042873光电定角比相法检测圆光栅测量精度的提高=Improvementof measurement precision of circular raster by photoelectricphase-comparing method for angle positioning[刊,中]/张红胜,冯长有(中科院长春光机所,吉林,长春(130022))//光学精密工程.-2000,8(5).-482-486用公式推导说明了影响光电角比相法检测圆光栅刻划误差测量精度的因素,并用两台测量精度不同的仪器做了实验验证。提出在仪器稳定、主轴回转精度高的前提下,再采用分光裂相法读数,异或门鉴相、"内插法"、"展开更多
文摘O436.1 2001042873光电定角比相法检测圆光栅测量精度的提高=Improvementof measurement precision of circular raster by photoelectricphase-comparing method for angle positioning[刊,中]/张红胜,冯长有(中科院长春光机所,吉林,长春(130022))//光学精密工程.-2000,8(5).-482-486用公式推导说明了影响光电角比相法检测圆光栅刻划误差测量精度的因素,并用两台测量精度不同的仪器做了实验验证。提出在仪器稳定、主轴回转精度高的前提下,再采用分光裂相法读数,异或门鉴相、"内插法"、"