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基于对控制数与双控制数强相等的图
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作者 石永涛 陈学刚 《内蒙古师范大学学报(自然科学汉文版)》 CAS 2011年第3期232-234,共3页
给出基于对控制数与双控制数强相等的图的一个性质,并依据该性质,刻画了基于对控制数与双控制数强相等的树及单圈图.
关键词 对控制数 双控制数 单圈图 强相等
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Doped-Chamber Deposition of Intrinsic Microcrystalline Silicon Thin Films and Its Application in Solar Cells 被引量:1
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作者 孙福河 张晓丹 +9 位作者 赵颖 王世峰 韩晓艳 李贵军 魏长春 孙建 侯国付 张德坤 耿新华 熊绍珍 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第5期855-858,共4页
A series of microcrystalline silicon thin films were fabricated by very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) at different silane concentrations in a P chamber. Through analysis of the... A series of microcrystalline silicon thin films were fabricated by very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) at different silane concentrations in a P chamber. Through analysis of the structural and electrical properties of these materials,we conclude that the photosensitivity slightly decreased then increased as the silane concentration increased,while the crystalline volume fraction indicates the opposite change. Results of XRD indicate that thin films have a (220) preferable orientation under certain conditions. Microcrystalline silicon solar cells with conversion efficiency 4. 7% and micromorph tandem solar cells 8.5% were fabricated by VHF-PECVD (p layer and i layer of microcrystalline silicon solar cells were deposited in P chamber), respectively. 展开更多
关键词 VHF-PECVD intrinsic microcrystalline silicon solar cells
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Fabrication of Hydrogenated Microcrystalline Silicon Thin Films at Low Temperature by VHF-PECVD
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作者 杨恢东 吴春亚 +7 位作者 麦耀华 李洪波 薛俊明 李岩 任慧智 张丽珠 耿新华 熊绍珍 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2002年第9期902-908,共7页
Using H 2 diluted silane,series of μc Si∶H films are fabricated at low temperature with VHF PECVD.The thickness measurements reveal that the deposition rates are obviously enhanced with higher plasma excitation ... Using H 2 diluted silane,series of μc Si∶H films are fabricated at low temperature with VHF PECVD.The thickness measurements reveal that the deposition rates are obviously enhanced with higher plasma excitation frequency or working pressure,but increase firstly and then decrease with the increase of plasma power density.Raman spectra show that the crystallinity and the average grain sizes of the films strongly depend on the temperature of substrate and the concentration of silane.However,the plasma excitation frequency only has effect on the crystallinity,and a maximum occurs during the further increase of plasma excitation frequency.From XRD and TEM experiments,three preferential crystalline orientations (111),(220) and (311) are observed,and the average grain sizes are different for every crystalline orientation. 展开更多
关键词 μc Si∶H thin films VHF PECVD deposition rate CRYSTALLINITY
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Stress Controlled Silicon Nitride Thin Film Deposited by Plasma Enhanced Chemical Vapour Deposition
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作者 DA Xiao-li XU Chen GUAN Bao-lu SHEN Guang-di 《Semiconductor Photonics and Technology》 CAS 2007年第2期141-145,共5页
SiN, films are deposited on silicon wafers through plasma enhanced chemical vapor deposition (PECVD). The relationship between the film stress and deposition factors is investigated. It is found that low stress film... SiN, films are deposited on silicon wafers through plasma enhanced chemical vapor deposition (PECVD). The relationship between the film stress and deposition factors is investigated. It is found that low stress films would be obtained by adjusting the ratio of low frequency(LF) power to high frequency(HF) power pulse time or the chamber pressure. The best of the two methods to control stress in the film is changing the percentage of LF power pulse time. The low stress condition is achieved when the percentage of low frequency power pulse time in total time(LF and HF pulse time) is close to 40%, The low stress cantilever of tunable vertical cavity surface emitting laser is obtained by using this deposition condition, 展开更多
关键词 film stress SiN PRESSURE radio frequency power CANTILEVER
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Electromagnetic Environmental Impact of 500-kV Double -Circuit Transmission Lines
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作者 Qi Jianzhao, Zhang Guohua, Wu Xiaoyan Hebei Electric Power Design & Research Institute Zhang Jianping 《Electricity》 2011年第1期24-28,共5页
The strength of the power frequency electric intensity and magnetic field of the 500-kV double circuit transmission lines was calculated by using the equivalent charge method and the Ampere's Law, and the environm... The strength of the power frequency electric intensity and magnetic field of the 500-kV double circuit transmission lines was calculated by using the equivalent charge method and the Ampere's Law, and the environmental impact factors of the fields were evaluated. By optimizing the phase sequence, the frequency electric intensity and magnetic field strength can be reduced. Within a distance of 25 m from the center of the transmission line, the power frequency electric intensity and magnetic field strength fall off sharply with the distance increase. Finally, the best phase sequence and the minimum ground clearance of the transmission lines were obtained to meet the requirements of the least impact on envionment. 展开更多
关键词 transmission line frequency electric field intensity frequency magnetic field strength
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Predicting coal mining faults using combined rock relationships
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作者 SUN Hong-quan BAO Si-yuan +1 位作者 LI Lin LIAO Tai-ping 《Mining Science and Technology》 EI CAS 2009年第6期745-749,共5页
By studying different compressive strengths and changes in the characteristics of rocks,five variables were selected to predict faults in coal mines. Drillholes in the mined area were divided into two populations, i.e... By studying different compressive strengths and changes in the characteristics of rocks,five variables were selected to predict faults in coal mines. Drillholes in the mined area were divided into two populations, i.e., drillholes containing faults and drillholes without faults. Discriminant functions were established from the values of the five variables using Fisher's approach. Drillholes in the non-mined areas were allocated to one of the two populations by using discriminant functions. The terrenes of each drillhole were divided into 10 sections, above and below a minable coal seam. Each section has 10 layers of rocks. The population to which each drillhole in a section belongs is sorted out and the probability of each drillhole with faults obtained,i.e., a contour map of predicting the probability of faults in coal mining is shown. A comparison with the real distribution of faults shows that the precision of accurately predicting faults is greater than 70 per cent. 展开更多
关键词 GEOSTATISTICS discriminant analyses terrain combination mine fault prediction isoline map of probability
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Mechanical properties of AISI 1045 ceramic coated materials by nano indentation and crack opening displacement method 被引量:1
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作者 王燕荣 王一奇 惠志鹏 《Journal of Central South University》 SCIE EI CAS 2012年第11期3023-3027,共5页
Abstract: An effective approach was conducted for estimating fracture toughness using the crack opening displacement (COD) method for plasma enhanced chemical vapor deposition (PECVD) coating materials. For this ... Abstract: An effective approach was conducted for estimating fracture toughness using the crack opening displacement (COD) method for plasma enhanced chemical vapor deposition (PECVD) coating materials. For this evaluation, an elastoplastic analysis was used to estimate critical COD values for single edge notched bending (SENB) specimens. The relationship between fracture toughness (Kic) and critical COD for SENB specimens was obtained. Microstructure of the interface between AleO3-TiO2 composite ceramic coatings and AISI 1045 steel substrates was studied by using scanning electron microscope (SEM). Chemical compositions were clarified by energy-dispersive X-ray spectroscopy (EDS). The results show that the interface between of Al203-TiO2 and substrate has mechanical combining. The nanohardness of the coatings can reach 1 200 GPa examined by nanoindentation. The Klc was calculated according to this relationship from critical COD. The bending process produces a significant relationship of COD independent of the axial force applied. Fractographic analysis was conducted to determine the crack length. From the physical analysis of nanoindentation curves, the elastic modulus of 1045/AI2O3-TiO2 is 180 GPa for the 50 μm film. The highest value of fracture toughness for 1045/A1203-TiO2-250 μm is 348 MPa·mv2. 展开更多
关键词 crack opening displacement (COD) single edge notched bending (SENB) plasma enhanced chemical vapor deposition(PECVD) fracture toughness NANOINDENTATION
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Effect of ammonia gas etching on growth of vertically aligned carbon nanotubes/nanofibers
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作者 Sang-Gook KIM Sooh-Yung KIM Hyung-Woo LEE 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2011年第A01期130-134,共5页
The etching effect of ammonia (NH3) on the growth of vertically aligned nanotubes/nanofibers (CNTs) was investigated by direct-current plasma enhanced chemical vapor deposition (DC-PECVD). NH3 gas etches Ni cata... The etching effect of ammonia (NH3) on the growth of vertically aligned nanotubes/nanofibers (CNTs) was investigated by direct-current plasma enhanced chemical vapor deposition (DC-PECVD). NH3 gas etches Ni catalyst layer to form nanoscale islands while NH3 plasma etches the deposited amorphous carbon. Based on the etching effect of NH3 gas on Ni catalyst, the differences of growing bundles of CNTs and single strand CNTs were discussed; specifically, the amount of optimal NH3 gas etching is different between bundles of CNTs and single strand CNTs. In contrast to the CNT carpet growth, the single strand CNT growth requires shorter etching time (5 min) than large catalytic patterns (10 rain) since nano dots already form catalyst islands for CNT growth. Through removing the plasma pretreatment process, the damage from being exposed at high temperature substrate occurring during the plasma generation time is minimized. High resolution transmission electron microscopy (HTEM) shows fishbone structure of CNTs grown by PECVD. 展开更多
关键词 carbon nanotube ammonia etching nickel catalyst plasma enhanced chemical vapor deposition (PECVD)
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Characteristics of Amorphous Silicon Nitride Films Deposited by LF-PECVD from SiH_4/N_2
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作者 ZHONG Zhi-qin ZHANG Yi YU Zhi-wei DAI Li-ping ZHANG Guo-jun WANG Yu-mei WANG Gang WANG Shu-ya 《Semiconductor Photonics and Technology》 CAS 2009年第3期145-148,共4页
Amorphous silicon nitride films were deposited by low-frequency plasma-enhanced chemical vapor deposition(LF-PECVD) using silane and nitrogen as precursors. Characteristics such as deposition rate, surface morpholog... Amorphous silicon nitride films were deposited by low-frequency plasma-enhanced chemical vapor deposition(LF-PECVD) using silane and nitrogen as precursors. Characteristics such as deposition rate, surface morphology, and chemical composition were measured by spectroscopic ellipsometry(SE), atomic force mieroscope(AFM) and x-ray photoelectron spectroscopy(XPS). It was shown that amorphous silicon nitride film could be prepared by LF-PECVD with good uniformity and even surface. The XPS result indicated that a small quantity of oxygen was involved in the sample, which was discussed in this paper. 展开更多
关键词 SiNx SE AFM XPS PECVD
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Dependence of Optical Absorption in Silicon Nanostructures on Size of Silicon Nanoparticles
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作者 丁文革 苑静 +3 位作者 孟令海 武树杰 于威 傅广生 《Communications in Theoretical Physics》 SCIE CAS CSCD 2011年第4期688-692,共5页
The amorphous silicon nanoparticles (Si NPs) embedded in silicon nitride (SiNx) films prepared by helicon wave plasma-enhanced chemical vapor deposition (HWP-CVD) technique are studied. From Raman scattering inv... The amorphous silicon nanoparticles (Si NPs) embedded in silicon nitride (SiNx) films prepared by helicon wave plasma-enhanced chemical vapor deposition (HWP-CVD) technique are studied. From Raman scattering investigation, we determine that the deposited film has the structure of silicon nanocrystals embedded in silicon nitride (nc-Si/SiNx) thin film at a certain hydrogen dilution amount. The analysis of optical absorption spectra implies that the Si NPs is affected by quantum size effects and has the nature of an indirect-band-gap semiconductor. Further, considering the effects of the mean Si NP size and their dispersion on oscillator strength, and quantum-confinement, we obtain an analytical expression for the spectral absorbance of ensemble samples. Gaussian as well as lognormal size-distributions of the Si NPs are considered for optical absorption coefficient calculations. The influence of the particle size-distribution on the optical absorption spectra was systematically studied. We present the fitting of the optical absorption experimental data with our model and discuss the results. 展开更多
关键词 optical absorption silicon nanoparticles quantum size effects oscillator strength silicon nitride film
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Hydrophobic Ti_xO_y-C_mH_n Nanoparticle Film Prepared by Plasma Enhanced Chemical Vapor Deposition
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作者 王德信 徐金洲 +5 位作者 刘伟 郭颖 杨沁玉 丁可 石建军 张菁 《Journal of Donghua University(English Edition)》 EI CAS 2012年第3期227-232,共6页
The hydrophobic films of TixOy-CmHn. deposited from mixture gases of titanium isopropoxide (TTIP) and oxygen by plasma enhanced chemical vapor deposition (PECVD) were investigated. The films were investigated by s... The hydrophobic films of TixOy-CmHn. deposited from mixture gases of titanium isopropoxide (TTIP) and oxygen by plasma enhanced chemical vapor deposition (PECVD) were investigated. The films were investigated by scanning electron microscope ( SEM ), transmission electron microscope ( TEM ), Fourier transform infrared spectrometer ( FTIR), X-Ray diffraction ( XRD ), element analysis ( EA ), ultraviolet visible spectrometer ( UV-Vis), and water contact angle (WCA). The results reveal that the surface of the films is formed by mierosized papillaes aggregated by inorganic and organic phases of complex nanoparticles with size from 50 nm to 200 nm when the discharge power is increased from 40 W to 150 W. All fdms demonstrate the strong broad of Ti-O-Ti stretching vibration at 400 -800cm-1, -CH bending vibration at 1 388 cm -1, and broadening -OH stretching vibration at 3 000-3500 cm-1 With the increase of the discharge power, the asdeposited film changes from amorphous to crystallization. The WCA of the film can be as high as 160°, indicating the hydrophobicity. The films show a similar ultraviolet absorption property as the bulk TiO2 film. The composition of the composition of film deposited at 150 W can be formulated as Tio.302-C1.5H3. Therefore, the composition formula of this hydrophobic film could be expressed as TiO2-C5H10O4.7. It is believed that the complex micro/nano structures of TiO2 and C5H10O4.7 residues are responsible for the observed hydrophobicity and the ultraviolet absorption property of the film. 展开更多
关键词 micro/nano structure plasma-enhanced chemical vapor deposition (PECVD) hydrophobic titanium oxide
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Near-infrared absorbing 2D/3D ZnIn2S4/N-doped graphene photocatalyst for highly efficient CO2 capture and photocatalytic reduction 被引量:21
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作者 Yang Xia Bei Cheng +2 位作者 Jiajie Fan Jiaguo Yu Gang Liu 《Science China Materials》 SCIE EI CSCD 2020年第4期552-565,共14页
Hierarchical heterostructure photocatalysts with broad spectrum solar light utilization,particularly in the nearinfrared(NIR)region,are emerging classes of advanced photocatalytic materials for solar-driven CO2 conver... Hierarchical heterostructure photocatalysts with broad spectrum solar light utilization,particularly in the nearinfrared(NIR)region,are emerging classes of advanced photocatalytic materials for solar-driven CO2 conversion into value-added chemical feedstocks.Herein,a novel two-demensional/three-demensional(2 D/3 D)hierarchical composite is hydrothermally synthesized by assembling vertically-aligned ZnIn2 S4(ZIS)nanowall arrays on nitrogen-doped graphene foams(NGF).The prepared ZIS/NGF composite shows enhancement in photothermal conversion ability and selective CO2 capture as well as solar-driven CO2 photoreduction.At273 K and 1 atm,the ZIS/NGF composite with 1.0 wt%NGF achieves a comparably high CO2-to-N2 selectivity of 30.1,with an isosteric heat of CO2 adsorption of 48.2 kJ mol^-1.And in the absence of cocatalysts and sacrificial agents,the ZIS/NGF composite with cyclability converts CO2 into CH4,CO and CH3 OH under simulated solar light illumination,with the respective evolution rates about 9.1,3.5,and 5.9 times higher than that of the pristine ZIS.In-depth analysis using in-situ irradiated X-ray photoelectron spectroscopy(ISI-XPS)in conjunction with Kelvin probe measurements reveals the underlying charge transfer pathway and process from ZIS to NGF. 展开更多
关键词 near-infrared light nitrogen-doped graphene foams ZnIn2S4 nanowalls selective CO2 capture CO2 photocatalytic reduction
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Modified Potential Around a Moving Test Charge in Strongly Coupled Dusty Plasma 被引量:1
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作者 M. Shahmansouri B.Farokhi N. Khodabakhshi 《Communications in Theoretical Physics》 SCIE CAS CSCD 2017年第7期111-116,共6页
The theory of dynamical (wa&e) potential behind a moving test charge in a weakly coupled dusty plasma is extended to that including of strong interaction between dust grains. Such strong interaction is included in ... The theory of dynamical (wa&e) potential behind a moving test charge in a weakly coupled dusty plasma is extended to that including of strong interaction between dust grains. Such strong interaction is included in the dielectric response function by a generalized hydrodynamic (GH) fluid model. It is shown that the strong interaction between dusts including the lattice spacing correction has a significant effect on the wake potential in dusty plasma. This may be used to investigate basic features of phase transition and possibility of lattice formation of dusty plasma. 展开更多
关键词 dusty plasma strongly coupled plasma generalized hydrodynamic fluid model
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Direct low-temperature synthesis of graphene on various glasses by plasma-enhanced chemical vapor deposition for versatile, cost-effective electrodes 被引量:14
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作者 Jingyu Sun Yubin Chen +11 位作者 Xin Cai Bangjun Ma Zhaolong Chen Manish Kr. Priydarshi Ke Chen Teng Gao Xiuju Song Qingqing Ji Xuefeng Guo Dechun Zou Yanfeng Zhang Zhongfan Liu 《Nano Research》 SCIE EI CAS CSCD 2015年第11期3496-3504,共9页
Catalyst-free and scalable synthesis of graphene on various glass substrates at low temperatures is of paramount significance to numerous applications such as low-cost transparent electronics and state-of-the-art disp... Catalyst-free and scalable synthesis of graphene on various glass substrates at low temperatures is of paramount significance to numerous applications such as low-cost transparent electronics and state-of-the-art displays. However, systematic study within this promising research field has remained scarce thus far. Herein, we report the direct growth of graphene on various glasses using a low-temperature plasma-enhanced chemical vapor deposition method. Such a facile and scalable approach guarantees the growth of uniform, transfer-free graphene films on various glass substrates at a growth temperature range of 400-600 ℃. The morphological, surface wetting, optical, and electrical properties of the obtained graphene can be tailored by controlling the growth parameters. Our uniform and high-quality graphene films directly integrated with low-cost, commonly used glasses show great potential in the fabrication of multi-functional electrodes for versatile applications in solar cells, transparent electronics, and smart windows. 展开更多
关键词 GRAPHENE DIRECT plasma-enhanced chemical vapor deposition (PECVD) glass VARIOUS low-cost
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Field-tuned quantum effects in a triangular-lattice Ising magnet 被引量:1
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作者 Yayuan Qin Yao Shen +19 位作者 Changle Liu Hongliang Wo Yonghao Gao Yu Feng Xiaowen Zhang Gaofeng Ding Yiqing Gu Qisi Wang Shoudong Shen Helen C.Walker Robert Bewley Jianhui Xu Martin Boehm Paul Steffens Seiko Ohira-Kawamura Naoki Murai Astrid Schneidewind Xin Tong Gang Chen Jun Zhao 《Science Bulletin》 SCIE EI CSCD 2022年第1期38-44,M0003,共8页
We report thermodynamic and neutron scattering measurements of the triangular-lattice quantum Ising magnet TmMgGaO_(4)in longitudinal magnetic fields.Our experiments reveal a quasi-plateau state induced by quantum flu... We report thermodynamic and neutron scattering measurements of the triangular-lattice quantum Ising magnet TmMgGaO_(4)in longitudinal magnetic fields.Our experiments reveal a quasi-plateau state induced by quantum fluctuations.This state exhibits an unconventional non-monotonic field and temperature dependence of the magnetic order and excitation gap.In the high field regime where the quantum fluctuations are largely suppressed,we observed a disordered state with coherent magnon-like excitations despite the suppression of the spin excitation intensity.Through detailed semi-classical calculations,we are able to understand these behaviors quantitatively from the subtle competition between quantum fluctuations and frustrated Ising interactions. 展开更多
关键词 Neutron scattering Quantum magnet Magnetic frustration Transverse field Ising model
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The Glauber model correction towards equilibrium 被引量:2
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作者 ZHAO AMeng ZONG HongShi SUN WeiMin 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS 2012年第11期2049-2056,共8页
We introduce a pre-hydrodynamic correction to the commonly used Glauber model to bring the random scattering information to the initial condition of the hydrodynamic description for the heavy ion collisions.The result... We introduce a pre-hydrodynamic correction to the commonly used Glauber model to bring the random scattering information to the initial condition of the hydrodynamic description for the heavy ion collisions.The results of this correction obviously shrink the value of the elliptic flow in the medium momentum region and move the corresponding momentum of the maximum v 2 forwards to smaller p T value.These fit the experimental data quite well.This correction implies that the quark-gluon plasma(QGP) has reached the thermal equilibrium when the hydrodynamic expansion starts.Such a conclusion of quick-equilibrium confirms the conclusion that QGP is a strongly interacting system. 展开更多
关键词 EQUILIBRIUM relativistic hydrodynamics QGP Glauber model
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Effects of Higher-Order Relativistic Nonlinearity and Wakefield During a Moderately Intense Laser Pulse Propagation in a Plasma Channel
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作者 刘明萍 刘兵兵 +2 位作者 刘三秋 张福阳 刘杰 《Communications in Theoretical Physics》 SCIE CAS CSCD 2013年第8期222-226,共5页
Using a variational approach,the propagation of a moderately intense laser pulse in a parabolic preformed plasma channel is investigated.The effects of higher-order relativistic nonlinearity (HRN) and wakefield are in... Using a variational approach,the propagation of a moderately intense laser pulse in a parabolic preformed plasma channel is investigated.The effects of higher-order relativistic nonlinearity (HRN) and wakefield are included.The effect of HRN serves as an additional defocusing mechanism and has the same order of magnitude in the spot size as that of the transverse wakefield (TWF).The effect of longitudinal wakefield is much larger than those of HRN and TWF for an intense laser pulse with the pulse length equaling the plasma wavelength.The catastrophic focusing of the laser spot size would be prevented in the present of HRN and then it varies with periodic focusing oscillations. 展开更多
关键词 higher-order relativistic nonlinearity laser wakefield plasma channel intense laser pulse
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Tests of gravitational symmetries with radio pulsars 被引量:2
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作者 LiJing Shao Norbert Wex 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS CSCD 2016年第9期10-32,共23页
Symmetries play important roles in modern theories of physical laws. In this paper, we review several experimental tests of important symmetries associated with the gravitational interaction, including the universalit... Symmetries play important roles in modern theories of physical laws. In this paper, we review several experimental tests of important symmetries associated with the gravitational interaction, including the universality of free fall for self-gravitating bodies,time-shift symmetry in the gravitational constant, local position invariance and local Lorentz invariance of gravity, and spacetime translational symmetries. Recent experimental explorations for post-Newtonian gravity are discussed, of which, those from pulsar astronomy are highlighted. All of these tests, of very different aspects of gravity theories, at very different length scales, favor to very high precision the predictions of the strong equivalence principle(SEP) and, in particular, general relativity which embodies SEP completely. As the founding principles of gravity, these symmetries are motivated to be promoted to even stricter tests in future. 展开更多
关键词 GRAVITATION radio pulsars spacetime symmetry
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Simulation of gas phase reactions for microcrystalline silicon films fabricated by PECVD 被引量:1
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作者 何宝华 杨仕娥 +1 位作者 陈永生 卢景霄 《Optoelectronics Letters》 EI 2011年第3期198-201,共4页
We present a numerical gas phase reaction model for hydrogenated microcrystalline silicon(μc-Si:H) films from SiH4 and H2 gas mixtures with plasma enhanced chemical vapor deposition(PECVD).Under the typical μc-Si:H ... We present a numerical gas phase reaction model for hydrogenated microcrystalline silicon(μc-Si:H) films from SiH4 and H2 gas mixtures with plasma enhanced chemical vapor deposition(PECVD).Under the typical μc-Si:H deposition conditions,the concentrations of the species in the plasma are calculated and the effects of silane fraction(SF=[SiH4]/[H2+SiH4]) are investigated.The results show that SiH3 is the key precursor for μc-Si:H films growth,and other neutral radicals,such as Si2H5,Si2H4 and SiH2,may play some roles in the film deposition.With the silane fraction increasing,the precursor concentration increases,but H atom concentration decreases rapidly,which results in the lower H/SiH3 ratio. 展开更多
关键词 Chemical vapor deposition Computer simulation Film growth GASES Metallic films Plasma deposition Plasma enhanced chemical vapor deposition
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Catalyst-Free Growth of Nanographene Films on Various Substrates 被引量:12
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作者 Lianchang Zhang Zhiwen Shi +3 位作者 Yi Wang Rong Yang Dongxia Shi Guangyu Zhang 《Nano Research》 SCIE EI CAS CSCD 2011年第3期315-321,共7页
We have developed a new method to grow uniform graphene films directly on various substrates, such as insulators, semiconductors, and even metals, without using any catalyst. The growth was carried out using a remote ... We have developed a new method to grow uniform graphene films directly on various substrates, such as insulators, semiconductors, and even metals, without using any catalyst. The growth was carried out using a remote plasma enhancement chemical vapor deposition (r-PECVD) system at relatively low temperatures, enabling the deposition of graphene films up to 4-inch wafer scale. Scanning tunneling microscopy (STM) confirmed that the films are made up of nanocrystalline graphene particles of tens of nanometers in lateral size. The growth mechanism for the nanographene is analogous to that for diamond grown by PECVD methods, in spite of sp2 carbon atoms being formed in the case of graphene rather than sp3 carbon atoms as in diamond. This growth approach is simple, low-cost, and scalable, and might have potential applications in fields such as thin film resistors, gas sensors, electrode materials, and transparent conductive films. 展开更多
关键词 NANOGRAPHENE CATALYST-FREE plasma enhancement chemical vapor deposition (PECVD) transparent and conductive film
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