In integrated circuits, the defects associated with photolithography are assumed to be in the shape of circular discs in order to perform the estimation of yield and fault analysis. However,real defects exhibit a grea...In integrated circuits, the defects associated with photolithography are assumed to be in the shape of circular discs in order to perform the estimation of yield and fault analysis. However,real defects exhibit a great variety of shapes. In this paper,a novel yield model is presented and the critical area model of short circuit is correspondingly provided. In comparison with the circular model corrently available, the new model takes the similarity shape to an original defect, the two-dimensional distributional characteristic of defects, the feature of a layout routing and the character of yield estimation into account. As for the aspect of prediction of yield, the experimental results show that the new model may predict the yield caused by real defects more accurately than the circular model does. It is significant that the yield is accurately estimated and improved using the proposed model.展开更多
The application of fine blanking to the manufacturing of helical gears directly from a strip has been restricted due to the traditional linear cutting stroke of the punch and die.In this work,rotational fine blanking ...The application of fine blanking to the manufacturing of helical gears directly from a strip has been restricted due to the traditional linear cutting stroke of the punch and die.In this work,rotational fine blanking which combined the linear and rotational motion of punch and counterpunch was applied for the forming of helical gears.A three-dimensional(3D) rigid-plastic finite element model was developed on the DEFORM-3D platform.By finite element simulation and analysis,the influences of key parameters on the punch load and cut surface were investigated.It is shown that: 1) with increasing the counterforce or helical angle,the punch load and the depth of die roll increase; 2) with increasing blank holder force,the punch load increases while the depth of die roll decreases; 3) V-ring indenter facilitates an improvement in the quality.The results of this research reveal the deformation mechanism of rotational fine blanking of helical gears,and provide valuable guidelines for further experimental studies.展开更多
文摘In integrated circuits, the defects associated with photolithography are assumed to be in the shape of circular discs in order to perform the estimation of yield and fault analysis. However,real defects exhibit a great variety of shapes. In this paper,a novel yield model is presented and the critical area model of short circuit is correspondingly provided. In comparison with the circular model corrently available, the new model takes the similarity shape to an original defect, the two-dimensional distributional characteristic of defects, the feature of a layout routing and the character of yield estimation into account. As for the aspect of prediction of yield, the experimental results show that the new model may predict the yield caused by real defects more accurately than the circular model does. It is significant that the yield is accurately estimated and improved using the proposed model.
基金Project(51105287)supported by the National Natural Science Foundation of ChinaProject(2011-P05)supported by the State Key Laboratory of Materials Processing and Die&Mould Technology,Huazhong University of Science and Technology,ChinaProject(2011-IV-009)supported by the Fundamental Research Funds for the Central Universities,China
文摘The application of fine blanking to the manufacturing of helical gears directly from a strip has been restricted due to the traditional linear cutting stroke of the punch and die.In this work,rotational fine blanking which combined the linear and rotational motion of punch and counterpunch was applied for the forming of helical gears.A three-dimensional(3D) rigid-plastic finite element model was developed on the DEFORM-3D platform.By finite element simulation and analysis,the influences of key parameters on the punch load and cut surface were investigated.It is shown that: 1) with increasing the counterforce or helical angle,the punch load and the depth of die roll increase; 2) with increasing blank holder force,the punch load increases while the depth of die roll decreases; 3) V-ring indenter facilitates an improvement in the quality.The results of this research reveal the deformation mechanism of rotational fine blanking of helical gears,and provide valuable guidelines for further experimental studies.
