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微/纳器件粗糙表面间弯月面力及黏着力计算
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作者 刘思思 张朝辉 +1 位作者 周杰 何建国 《计算力学学报》 CAS CSCD 北大核心 2014年第4期532-536,共5页
微/纳器件表面微观粗糙结构间由于液体介质而引起的弯月面力和黏着力是导致器件精度降低乃至失效的主要原因之一。通过建立微/纳米尺度上球面-平面接触的物理模型,基于Young-Laplace方程和Reynolds润滑理论,分析得到粗糙表面接触分离过... 微/纳器件表面微观粗糙结构间由于液体介质而引起的弯月面力和黏着力是导致器件精度降低乃至失效的主要原因之一。通过建立微/纳米尺度上球面-平面接触的物理模型,基于Young-Laplace方程和Reynolds润滑理论,分析得到粗糙表面接触分离过程中弯月面力和黏着力的计算公式。在此基础上,计算得到接触表面分离过程中的弯月面形状变化规律,并分别讨论了固体表面分离距离、液滴初始弯月面高度、固体表面润湿性能和分离时间等因素对弯月面力和黏着力的影响。研究结果为微/纳米表面抗黏着机理提供了理论依据。 展开更多
关键词 微/纳器件 粗糙表面接触模型 弯月面力 黏着力
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微/纳真空器件封装技术
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作者 李兴辉 韩攀阳 +2 位作者 杜婷 蔡军 冯进军 《真空电子技术》 2022年第6期14-22,共9页
极度微型化的微/纳真空器件要求专门的封装技术。论文综述了适用于微/纳真空器件封装的真空键合和电极互连技术,同时系统分析了一些相关技术,包括实现真空获得与维持的微型、可集成真空泵技术和非蒸散、薄膜吸气剂技术,监测器件工作环... 极度微型化的微/纳真空器件要求专门的封装技术。论文综述了适用于微/纳真空器件封装的真空键合和电极互连技术,同时系统分析了一些相关技术,包括实现真空获得与维持的微型、可集成真空泵技术和非蒸散、薄膜吸气剂技术,监测器件工作环境的真空度测量技术,以及检测器件封装的真空检漏技术等。分析结果对微/纳真空器件的设计与工艺实现提供了有益参考。 展开更多
关键词 微/真空器件 封装 键合 互连 真空泵 吸气剂
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硅基微机械表面粘附及摩擦性能的AFM试验研究 被引量:4
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作者 解国新 丁建宁 +1 位作者 范真 付永忠 《中国机械工程》 EI CAS CSCD 北大核心 2006年第2期200-203,共4页
在Si(1 0 0)基片上制备了十八烷基三氯硅烷(OTS)分子润滑膜,并用原子力显微镜(AFM)对比研究了施加OTS膜前后的硅表面的粘附、摩擦磨损性能。试验考虑了相对湿度和扫描速度对粘附、摩擦性能的影响。结果表明,相对于硅构件来讲,OTS膜表面... 在Si(1 0 0)基片上制备了十八烷基三氯硅烷(OTS)分子润滑膜,并用原子力显微镜(AFM)对比研究了施加OTS膜前后的硅表面的粘附、摩擦磨损性能。试验考虑了相对湿度和扫描速度对粘附、摩擦性能的影响。结果表明,相对于硅构件来讲,OTS膜表面粘附力较小,具有较小的摩擦因数,呈现较好的润滑性能;硅构件受湿度变化的影响比OTS膜明显。微构件的摩擦性能由于水合化学作用生成Si(OH)4润滑膜,使得其受相互间运动速度影响很大。OTS膜不仅是一种耐磨性较好的润滑膜,而且有良好的稳定性。 展开更多
关键词 原子力显镜(AFM) 微/机电器件(MEMS/NEMS) 粘附 摩擦磨损
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Recent progresses of micro-nanostructured transition metal compound-based electrocatalysts for energy conversion technologies 被引量:8
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作者 Jiajun Wang Zhao Zhang +4 位作者 Jia Ding Cheng Zhong Yida Deng Xiaopeng Han Wenbin Hu 《Science China Materials》 SCIE EI CSCD 2021年第1期1-26,共26页
The rapid consumption of fossil fuels has caused increasingly climatic issues and energy crisis,which leads to the urgent demand for developing sustainable and clean energies.Electrocatalysts play a key role in the de... The rapid consumption of fossil fuels has caused increasingly climatic issues and energy crisis,which leads to the urgent demand for developing sustainable and clean energies.Electrocatalysts play a key role in the development of electrochemical energy conversion and storage devices.Especially,developing efficient and cost-effective catalysts is important for the large-scale application of these devices.Among various electrocatalyst candidates,earth abundant transition metal compound(TMC)-based electrocatalysts are being widely and rapidly studied owing to their high electrocatalytic performances.This paper reviews the recent and representative advances in efficient TMC-based electrocatalysts(i.e.,oxides,sulfides,selenides,phosphides,carbides and nitrides)for energy electrocatalytic reactions,including hydrogen evolution reaction(HER),oxygen evolution reaction(OER)and oxygen reduction reaction(ORR).Different compounds with different applications are summarized and the relative mechanisms are also discussed.The strategies for developing earth-abundant and low-cost TMC-based electrocatalysts are introduced.In the end,the current challenges and future perspectives in the development of TMC research are briefly discussed.This review also provides the latest advance and outlines the frontiers in TMC-based electrocatalysts,which should provide inspirations for the further development of low-cost and high-efficiency catalysts for sustainable clean energy technologies. 展开更多
关键词 energy electrocatalysis transition metal compounds HER OER ORR
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Theoretical study of piezotronic heterojunction 被引量:1
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作者 FENG XiaoLong ZHANG Yan WANG ZhongLin 《Science China(Technological Sciences)》 SCIE EI CAS 2013年第11期2615-2621,共7页
Due to the coupling of piezoelectric and semiconducting dual properties,much attention has been focused on the piezoelectric semiconductor materials,such as ZnO,ZnS,CdS and GaN.With the usage of these piezoelectric se... Due to the coupling of piezoelectric and semiconducting dual properties,much attention has been focused on the piezoelectric semiconductor materials,such as ZnO,ZnS,CdS and GaN.With the usage of these piezoelectric semiconductor materials,novel nanodevices have been demonstrated,from which a new field called piezotronics was formulated.The core of piezotronics is to study the mechanism of the piezoelectric effect on tuning the charge transport behavior across various junctions or interfaces,with potential applications in sensors,microelectromechanical systems,and force/pressure triggered electric devices.Here following the theoretical frame work of piezotronic effect,analytical solutions of piezoelectric heterojunction are presented to investigate the electrical transport behavior at a p-n junction.Numerical simulation is given for guiding future experimental measurements. 展开更多
关键词 Piezoelectric Heterojunction piezoelectric semiconductor piezotronics
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A fluid-guided printing strategy for patterning high refractive index photonic microarrays
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作者 Meng Su Yali Sun +7 位作者 Bingda Chen Zeying Zhang Xu Yang Sisi Chen Qi Pan Dmitry Zuev Pavel Belov Yanlin Song 《Science Bulletin》 SCIE EI CSCD 2021年第3期250-256,M0004,共8页
High refractive index(HRI,n>1.8)photonic structures offer strong light confinement and refractive efficiencies,cover the entire visible spectrum and can be tuned by designing geometric arrayed features.However,its ... High refractive index(HRI,n>1.8)photonic structures offer strong light confinement and refractive efficiencies,cover the entire visible spectrum and can be tuned by designing geometric arrayed features.However,its practical applications are still hindered by the applicability and material limitation of lithography-based micro/nano fabrication approaches.Herein,we demonstrate a fluid-guided printing process for preparing HRI selenium microarrays.The microstructured flexible template is replicated from the diced silicon wafer without any lithography-based methods.When heated above the glass transition temperature,the flow characteristics of selenium endows the structure downsizing and orientation patterning between the target substrate and the template.Near 10 times narrowing selenium microarrays(1.9μm width)are patterned from the non-lithography template(18μm width).HRI selenium microarrays offer high refractive efficiencies and strong optical confinement abilities,which achieve angledependent structurally coloration and polarization.Meanwhile,the color difference can be recognized under the one degree distinction of the angle between incident and refracted light.This printing platform will facilitate HRI optical metasurfaces in a variety of applications,ranging from photonic sensor,polarization modulation to light manipulation. 展开更多
关键词 PRINTING High refractive index MICROARRAY PHOTONIC MINIATURE
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