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压电驱动微位移灵敏度的影响因素分析
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作者 王晓凤 冯之敬 《航空精密制造技术》 2007年第4期24-27,共4页
从内在因素(迟滞和蠕变效应)和外在因素(环境、控制电源、预紧力、导向机构等)两大方面系统的总结了压电驱动微位移灵敏度的影响因素,并针对每种因素给出了相应的实验结果或调研数据,提出了提高分辨率可采取的措施。
关键词 压电驱动 微位移灵敏度 迟滞 蠕变
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Micro-Displacement Sensor Based on High Sensitivity Photonic Crystal 被引量:1
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作者 Saeed OLYAEE Morteza AZIZI 《Photonic Sensors》 SCIE EI CAS 2014年第3期220-224,共5页
In this paper, we present a micro-displacement sensor formed by the fixed and movable photonic crystal slabs. In this sensor, a waveguide was created by changing the radius of holes rather than removing them. At a pro... In this paper, we present a micro-displacement sensor formed by the fixed and movable photonic crystal slabs. In this sensor, a waveguide was created by changing the radius of holes rather than removing them. At a proper operating wavelength, the structure could be used as the micro-displacement sensor. The results revealed that the micro-displacement sensor had a sensitivity of 3.6 gm-1, the Q-factor was nearly 180, and the sensing range was 0.0 ~tm - 0.5 p.m. The properties of the micro-displacement sensor are also analyzed theoretically and verified using the finite-difference time-domain (FDTD) method carried out using the software (Rsoft). 展开更多
关键词 Micro-displacement sensor Q-factor WAVEGUIDE sensitivity FDTD Lorentzian function
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