介绍如何实现光学和电子束曝光系统之间的匹配和混合光刻的技术,包括:(1)光学曝光系统与电子束曝光系统的匹配技术;(2)投影光刻和JBX-5000LS混合曝光技术;(3)接触式光刻机和JBX-5000LS混合曝光技术;(4)大小束流混合曝光技术或大小光阑...介绍如何实现光学和电子束曝光系统之间的匹配和混合光刻的技术,包括:(1)光学曝光系统与电子束曝光系统的匹配技术;(2)投影光刻和JBX-5000LS混合曝光技术;(3)接触式光刻机和JBX-5000LS混合曝光技术;(4)大小束流混合曝光技术或大小光阑混合曝光技术;(5)电子束与光学曝光系统混合光刻对准标记制作技术.该技术已成功地应用于纳米器件和集成电路的研制工作,实现了20nm线条曝光,研制成功了27n m CMOS器件;进行了50nm单电子器件的演试;并广泛地用于100nm化合物器件和其他微/纳米结构的制造.展开更多
Dip-pen nanolithography is a new scanning probe lithography (SPL) technique based on atomic force microscopy (AFM), and now has made a great progress. The process of dip-pen lithography involves the adsorption of ink ...Dip-pen nanolithography is a new scanning probe lithography (SPL) technique based on atomic force microscopy (AFM), and now has made a great progress. The process of dip-pen lithography involves the adsorption of ink molecules on AFM tip, the formation of water meniscus, the transport of ink molecules, and diffusion of ink molecules on the substrate. More factors such as temperature, humidity, tip, scanning speed and so on will influence the process of dip-pen lithography. The paper analyzes in detail the mechanism of this technique, introduces synthetically the latest development, including electrochemical DPN, more-mode DPN, multiple DPN, multi-probe array DPN and so on. Finally, the paper describes the characteristics and the application of DPN.展开更多
The rapid development of portable and wearable electronic devices has increased demand for flexible and efficient energy harvesting and storage units. Conventionally, these are built and used separately as discrete co...The rapid development of portable and wearable electronic devices has increased demand for flexible and efficient energy harvesting and storage units. Conventionally, these are built and used separately as discrete components. Herein, we propose a simple and cost-effective laser engraving technique for fabricating a flexible self-charging micro-supercapacitor power unit （SCMPU）, by integrating a triboelectric nanogenerator （TENG） and a micro-supercapacitor （MSC） array into a single device. The SCMPU can be charged directly by ambient mechanical motion. We demonstrate the ability of the SCMPU to continuously power light-emitting diodes and a commercial hygrothermograph. This inves- tigation may promote the development of sustainable self-powered systems and provide a promising new research application for supercapacitors.展开更多
We have set up a novel system for shaping the Gaussian laser beams into super-Gaussian beams.The digital micro-mirror device(DMD)is able to modulate the laser light spatially through binary-amplitude modulation mechan...We have set up a novel system for shaping the Gaussian laser beams into super-Gaussian beams.The digital micro-mirror device(DMD)is able to modulate the laser light spatially through binary-amplitude modulation mechanism.With DMD,the irradiance of the laser beam can be redistributed flexibly and various beams with different intensity distribution can be produced.A super-Gaussian beam has been successfully shaped from the Gaussian beam with the use of DMD.This technique will be widely applied in lithography,quantum emulation and holographic optical tweezers which require precise control of beam profile.展开更多
文摘介绍如何实现光学和电子束曝光系统之间的匹配和混合光刻的技术,包括:(1)光学曝光系统与电子束曝光系统的匹配技术;(2)投影光刻和JBX-5000LS混合曝光技术;(3)接触式光刻机和JBX-5000LS混合曝光技术;(4)大小束流混合曝光技术或大小光阑混合曝光技术;(5)电子束与光学曝光系统混合光刻对准标记制作技术.该技术已成功地应用于纳米器件和集成电路的研制工作,实现了20nm线条曝光,研制成功了27n m CMOS器件;进行了50nm单电子器件的演试;并广泛地用于100nm化合物器件和其他微/纳米结构的制造.
基金Foundation of Education of Zhejiang Province, China ( No.20060470).
文摘Dip-pen nanolithography is a new scanning probe lithography (SPL) technique based on atomic force microscopy (AFM), and now has made a great progress. The process of dip-pen lithography involves the adsorption of ink molecules on AFM tip, the formation of water meniscus, the transport of ink molecules, and diffusion of ink molecules on the substrate. More factors such as temperature, humidity, tip, scanning speed and so on will influence the process of dip-pen lithography. The paper analyzes in detail the mechanism of this technique, introduces synthetically the latest development, including electrochemical DPN, more-mode DPN, multiple DPN, multi-probe array DPN and so on. Finally, the paper describes the characteristics and the application of DPN.
文摘The rapid development of portable and wearable electronic devices has increased demand for flexible and efficient energy harvesting and storage units. Conventionally, these are built and used separately as discrete components. Herein, we propose a simple and cost-effective laser engraving technique for fabricating a flexible self-charging micro-supercapacitor power unit （SCMPU）, by integrating a triboelectric nanogenerator （TENG） and a micro-supercapacitor （MSC） array into a single device. The SCMPU can be charged directly by ambient mechanical motion. We demonstrate the ability of the SCMPU to continuously power light-emitting diodes and a commercial hygrothermograph. This inves- tigation may promote the development of sustainable self-powered systems and provide a promising new research application for supercapacitors.
基金supported by the National Natural Science Foundation of China(Grant No.60974038)the Project of Provincial Teaching Research in Anhui Institutions of Higher Education(Grant No.2012jyxm006)
文摘We have set up a novel system for shaping the Gaussian laser beams into super-Gaussian beams.The digital micro-mirror device(DMD)is able to modulate the laser light spatially through binary-amplitude modulation mechanism.With DMD,the irradiance of the laser beam can be redistributed flexibly and various beams with different intensity distribution can be produced.A super-Gaussian beam has been successfully shaped from the Gaussian beam with the use of DMD.This technique will be widely applied in lithography,quantum emulation and holographic optical tweezers which require precise control of beam profile.
