The mechanical and electric characteristics of a cantilever beam micro opto mechanical switch are studied theoretically,with which the dependence of the flexion on the applied voltage is derived,as well as the form...The mechanical and electric characteristics of a cantilever beam micro opto mechanical switch are studied theoretically,with which the dependence of the flexion on the applied voltage is derived,as well as the formula of the threshold voltage.The applied voltage,having no connection with the width of the beam,is in inverse proportion to the square of the beam's length.The deflection at the beam's tip cannot exceed 1/3 of the distance between two adjacent electrodes.These results are the basis of the switch design and development.展开更多
The experiment results of ultrawide band electromagnetic radiation with DC biased GaAs photoconductive semiconductor switch combining double ridge horn antenna triggered by high repeat frequency femto-second laser pul...The experiment results of ultrawide band electromagnetic radiation with DC biased GaAs photoconductive semiconductor switch combining double ridge horn antenna triggered by high repeat frequency femto-second laser pulse are reported.The GaAs switches are insulated by solid multi-layer transparent dielectrics and the distance of two electrodes is 3mm.The electrode material of the switch is ohmic contact through alloy technics with definite proportion of Au/Ge/Ni.This switch and double ridge horn antenna are integrated and the receive antenna is connected with the test instrument.From receiving antenna,ultra fast electrical pulse of 200ps rise time and 500ps pulse width is obtained,the repetition rate of the pulse is about 82MHz and the frequency spectrum is in the range of 4.7MHz～14GHz.The radiation characteristic of the ultrafast electrical pulse is analyzed.展开更多
Novel 2×2 torsion-mirror optical switch arrays are fabricated by using the mixed micromachining based on the surface and bulk silicon microelectronics,then are investigated electromechanically in applied direct a...Novel 2×2 torsion-mirror optical switch arrays are fabricated by using the mixed micromachining based on the surface and bulk silicon microelectronics,then are investigated electromechanically in applied direct and alternating electric fields.When the thickness of the elastic torsion beams suspending the aluminum coated polysilicon micro-mirrors of the switches in the arrays is about 1μm,the electrostatic yielding voltages for driving the mirrors to achieve their ON-state are in the range of 270～290V,and the minimum holding voltages for mirrors ON-state are found as 55V or so.Theoretical analysis manifests that the yielding voltage is more sensitive to beam thickness than other design parameters do about the torsion-mirror switch structures.The lifetime can reach 10 8 times.The estimated shortest switching time of the switches at least lasts for less than 2ms.The force analysis on the two kinds of new fiber self-holding structures integrated monolithically in the chip of the optical switch arrays indicates that the structures can feature self-fixing and self-aligning of optical fibers.展开更多
This paper reports on the design, fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS （micro-electro-mechanical system） 16 × 16 optical switches. The mirror in the array can ...This paper reports on the design, fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS （micro-electro-mechanical system） 16 × 16 optical switches. The mirror in the array can enlarge its rotation an- gles up to 90° and keep a steady state to steer the optical signal. According to the large-rotation behavior, an electro- mechanical model of the mirror is presented. By monolithic integration of fiber grooves and mirrors fabricated by a sur- face and bulk hybrid micromachining process, the coarse passive alignment of fiber-mirror-fiber can be achieved. The re- flectivity of the mirror is measured to be 93.1% ~96.3%. The switches demonstrate that the smallest fiber-mirror-fiber insertion loss is 2. ldB using OptiFocusTM collimating lensed fibers. Moreover,only about ＋- 0.01dB oscillating amplitude of insertion loss is provoked after the device is tested for 15min for 5-90Hz in the vertical vibration amplitude of 3mm.展开更多
The impact of XPM on the microwave photonic switching with NOLM is analyzed by the split-step Fourier method （SSFM） that can solve the coupled nonlinear Schrodinger equation （CNLSE）. The simulation results show th...The impact of XPM on the microwave photonic switching with NOLM is analyzed by the split-step Fourier method （SSFM） that can solve the coupled nonlinear Schrodinger equation （CNLSE）. The simulation results show that XPM induces the distortion of waveforms and the leak of side lobes. And the larger the modulation bandwidth is, the larger the leak of side lobes is. Furthermore, the power transmission function of NOLM T is distorted because of the XPM-induced nonreciprocity： Tm decreases when the splitting ratio of the coupler f∈（0,0.5） and increases when f∈（0.5,1.0）.展开更多
文摘The mechanical and electric characteristics of a cantilever beam micro opto mechanical switch are studied theoretically,with which the dependence of the flexion on the applied voltage is derived,as well as the formula of the threshold voltage.The applied voltage,having no connection with the width of the beam,is in inverse proportion to the square of the beam's length.The deflection at the beam's tip cannot exceed 1/3 of the distance between two adjacent electrodes.These results are the basis of the switch design and development.
文摘The experiment results of ultrawide band electromagnetic radiation with DC biased GaAs photoconductive semiconductor switch combining double ridge horn antenna triggered by high repeat frequency femto-second laser pulse are reported.The GaAs switches are insulated by solid multi-layer transparent dielectrics and the distance of two electrodes is 3mm.The electrode material of the switch is ohmic contact through alloy technics with definite proportion of Au/Ge/Ni.This switch and double ridge horn antenna are integrated and the receive antenna is connected with the test instrument.From receiving antenna,ultra fast electrical pulse of 200ps rise time and 500ps pulse width is obtained,the repetition rate of the pulse is about 82MHz and the frequency spectrum is in the range of 4.7MHz～14GHz.The radiation characteristic of the ultrafast electrical pulse is analyzed.
文摘Novel 2×2 torsion-mirror optical switch arrays are fabricated by using the mixed micromachining based on the surface and bulk silicon microelectronics,then are investigated electromechanically in applied direct and alternating electric fields.When the thickness of the elastic torsion beams suspending the aluminum coated polysilicon micro-mirrors of the switches in the arrays is about 1μm,the electrostatic yielding voltages for driving the mirrors to achieve their ON-state are in the range of 270～290V,and the minimum holding voltages for mirrors ON-state are found as 55V or so.Theoretical analysis manifests that the yielding voltage is more sensitive to beam thickness than other design parameters do about the torsion-mirror switch structures.The lifetime can reach 10 8 times.The estimated shortest switching time of the switches at least lasts for less than 2ms.The force analysis on the two kinds of new fiber self-holding structures integrated monolithically in the chip of the optical switch arrays indicates that the structures can feature self-fixing and self-aligning of optical fibers.
文摘This paper reports on the design, fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS （micro-electro-mechanical system） 16 × 16 optical switches. The mirror in the array can enlarge its rotation an- gles up to 90° and keep a steady state to steer the optical signal. According to the large-rotation behavior, an electro- mechanical model of the mirror is presented. By monolithic integration of fiber grooves and mirrors fabricated by a sur- face and bulk hybrid micromachining process, the coarse passive alignment of fiber-mirror-fiber can be achieved. The re- flectivity of the mirror is measured to be 93.1% ~96.3%. The switches demonstrate that the smallest fiber-mirror-fiber insertion loss is 2. ldB using OptiFocusTM collimating lensed fibers. Moreover,only about ＋- 0.01dB oscillating amplitude of insertion loss is provoked after the device is tested for 15min for 5-90Hz in the vertical vibration amplitude of 3mm.
基金This research is supported by the National Science Foundation ofChina (No. 60272048)the Special Science Foundation for the Excellent Teacher Lecturer of Shanghai.
文摘The impact of XPM on the microwave photonic switching with NOLM is analyzed by the split-step Fourier method （SSFM） that can solve the coupled nonlinear Schrodinger equation （CNLSE）. The simulation results show that XPM induces the distortion of waveforms and the leak of side lobes. And the larger the modulation bandwidth is, the larger the leak of side lobes is. Furthermore, the power transmission function of NOLM T is distorted because of the XPM-induced nonreciprocity： Tm decreases when the splitting ratio of the coupler f∈（0,0.5） and increases when f∈（0.5,1.0）.
