TN929.1 99063871微型光电机械系统技术在光通信中的应用及展望=APPlications of micro—electro—opto—mechan-ical system in optical communications and itsprospect[刊,中]/潘武(重庆邮电学院电信工程系.重庆(400065)),钟先信(重...TN929.1 99063871微型光电机械系统技术在光通信中的应用及展望=APPlications of micro—electro—opto—mechan-ical system in optical communications and itsprospect[刊,中]/潘武(重庆邮电学院电信工程系.重庆(400065)),钟先信(重庆大学光电工程学院.重庆(400044)),党明瑞(重庆邮电学院光通信研究所.展开更多
On account of the multiformity of MEMS devices, it is necessary to integrate with some optical measurement techniques for meeting static and dynamic unit test requirements. In this paper, an automated MEMS test system...On account of the multiformity of MEMS devices, it is necessary to integrate with some optical measurement techniques for meeting static and dynamic unit test requirements. In this paper, an automated MEMS test system is built of some commercially available components and instruments based on virtual instrument technology. The system is integrated with stroboscopic imaging, computer micro-vision, microscopic Mirau phase shifting interferometry, and laser Doppler vibrometer, and is used for the measurement of full-view in-plane and out-of-plane geometric parameters and periodical motions and single spot out-of-plane transient motion. The system configuration and measurement methods are analyzed, and some applications of the measurement of in-plane and out-of-plane dimensions and motions were described. The measurement accuracy of in-plane dimensions and out-of-plane dimensional is better than 0.2 um and 5 nm respectively. The resolution of measuring in-plane and out-of-plane motions is better than 15 nm and 2 nm respectively.展开更多
文摘TN929.1 99063871微型光电机械系统技术在光通信中的应用及展望=APPlications of micro—electro—opto—mechan-ical system in optical communications and itsprospect[刊,中]/潘武(重庆邮电学院电信工程系.重庆(400065)),钟先信(重庆大学光电工程学院.重庆(400044)),党明瑞(重庆邮电学院光通信研究所.
基金Supported by National Natural Science Foundation of China (No.50505031)Tianjin Municipal Science and Technology Commission(No.043185911)Programfor NewCentury Excellent Talents in University
文摘On account of the multiformity of MEMS devices, it is necessary to integrate with some optical measurement techniques for meeting static and dynamic unit test requirements. In this paper, an automated MEMS test system is built of some commercially available components and instruments based on virtual instrument technology. The system is integrated with stroboscopic imaging, computer micro-vision, microscopic Mirau phase shifting interferometry, and laser Doppler vibrometer, and is used for the measurement of full-view in-plane and out-of-plane geometric parameters and periodical motions and single spot out-of-plane transient motion. The system configuration and measurement methods are analyzed, and some applications of the measurement of in-plane and out-of-plane dimensions and motions were described. The measurement accuracy of in-plane dimensions and out-of-plane dimensional is better than 0.2 um and 5 nm respectively. The resolution of measuring in-plane and out-of-plane motions is better than 15 nm and 2 nm respectively.
