微型光电检测系统在环境监测中应用探讨

研发了1种可应用于环境监测的微尺度光电检测系统。该系统基于物质吸光理论，以发光二极管（LED）为光发射器件，以光电池为光接收器件．配以适当的检测电路，实现了对溶液锌离子浓度的检测。整个系统具有携带方便、光学元件少、测量精度较高、结构简单紧凑、体积小、成本低廉等优点。通过结构与参量优化设计的初步实验结果表明，微型光电检测系统可以实现溶液浓度的较精确测量，也可用于气体环境因素的检测。

微型阵列式激光收发集成传感器技术研究

移动式激光通信在许多领域有着广泛的应用。提出了一种用于移动式激光通信的微型阵列式激光收发集成传感器 ,采用MOEMS(微光机电系统 )技术进行集成 ,系统结构可靠 ,体积小、重量轻。设计制作了实际的样机。实验研究表明 ,样机的工作性能达到了设计要求 ,通信的准确率 >99%。

Fabrication and Electromechanical Characteristics of 2×2 Torsion-Mirror Optical Switch Arrays with Monolithically Integrated Fiber Self-Holding Structures

Novel 2×2 torsion-mirror optical switch arrays are fabricated by using the mixed micromachining based on the surface and bulk silicon microelectronics,then are investigated electromechanically in applied direct and alternating electric fields.When the thickness of the elastic torsion beams suspending the aluminum coated polysilicon micro-mirrors of the switches in the arrays is about 1μm,the electrostatic yielding voltages for driving the mirrors to achieve their ON-state are in the range of 270～290V,and the minimum holding voltages for mirrors ON-state are found as 55V or so.Theoretical analysis manifests that the yielding voltage is more sensitive to beam thickness than other design parameters do about the torsion-mirror switch structures.The lifetime can reach 10 8 times.The estimated shortest switching time of the switches at least lasts for less than 2ms.The force analysis on the two kinds of new fiber self-holding structures integrated monolithically in the chip of the optical switch arrays indicates that the structures can feature self-fixing and self-aligning of optical fibers.

Development of Miniature Spectrometers

Spectrometer is an essential and necessary optical element used for measuring the chemical components and content of the matter. The development of miniature spectrometers can be traced back to 1980s. The development state and different manufacturing methods of micro-spectrometers are presented. Finally, we analyze the miniaturization trend of spectrometers. Some groundwork for the scientific research is offered by introducing micro-spectrometers development.

Feasible Development of a Carbon-Based MEMS Using a MEMS Fabrication Process

We aimed to develop a process technology for constructing a carbon-based micro-electromechanical system that does not require a high-temperature and high-energy process. A HOPG （highly oriented pyrolytic graphite） crystal microsheet was prepared by exfoliation. Cantilevers and doubly clamped beams were patterned using a photoresist. The HOPG microsheet was attached by using a tantalum layer. We fabricated cantilevers and a doubly clamped beam by controlling the thickness of the HOPG microsheet and then measured the first resonance frequency. The measurements suggest a need to improve the stiffness of the beam.

Requirements and Strategy of China Mobile on 100-Gb/s Based Wavelength Division Multiplexing Systems

In recent years, the booming band- width demands of dedicated mobile services have driven the rapid development of optical transport networks （OTNs）. Through the in- novative use of emerging coherent optical communication technology and the advance- ment of microelectronics technology, the new-generation 100Gb/s transport technology offers a high line rate and unprecedented re- silience to optical transmission impairments. This paper overviews the bandwidth demands of China Mobile driven by the upcoming roll- out of Time Division-Long Term Evolution （TD-LTE） and presents the 100Gb/s trials at China Mobile that were used to verify the performance of a lOOGb/s system. China Mo- bile＇s considerations, which were based on the trial results, regarding the deployment of lOOGb/s transport systems are introduced, and the requirements of China Mobile for the evo- lution of lOOGb/s transport systems are sum- marized.

Polymorph and morphology of CaCO_3 in relation to precipitation conditions in a bubbling system

Simulating the typical carbonation step in a mineral CO_2 sequestration, precipitated calcium carbonate(PCC) was prepared by bubbling CO_2 gas into a rich Ca solution. These carbonation reactions were conducted at three p H ranges, namely 10.0–9.0, 9.0–8.0, and 8.0–7.0, in which temperature and CO_2 flow rate are additional experimental variables. The PCC obtained in experiments was examined by Fourier transform infrared spectroscopy(FTIR)and X-ray diffraction(XRD). It was found that supersaturation determined by p H value and flow rate of CO_2 has significant influence on polymorph of PCC. Vaterite was preferably formed at high supersaturation, while dissolution of metastable vaterite and crystallization of calcite occurred at low supersaturation. High temperature is a critical factor for the formation of aragonite. At 70 °C, vaterite, calcite and aragonite were observed to coexist in PCC because transformation from vaterite to aragonite via calcite occurred at this temperature. Scanning electron microscopy(SEM) technology was performed on prepared PCC, and various morphologies consistent with polymorphs were observed.

MEMS Test System Based on Virtual Instrument Technology

On account of the multiformity of MEMS devices, it is necessary to integrate with some optical measurement techniques for meeting static and dynamic unit test requirements. In this paper, an automated MEMS test system is built of some commercially available components and instruments based on virtual instrument technology. The system is integrated with stroboscopic imaging, computer micro-vision, microscopic Mirau phase shifting interferometry, and laser Doppler vibrometer, and is used for the measurement of full-view in-plane and out-of-plane geometric parameters and periodical motions and single spot out-of-plane transient motion. The system configuration and measurement methods are analyzed, and some applications of the measurement of in-plane and out-of-plane dimensions and motions were described. The measurement accuracy of in-plane dimensions and out-of-plane dimensional is better than 0.2 um and 5 nm respectively. The resolution of measuring in-plane and out-of-plane motions is better than 15 nm and 2 nm respectively.

Research on the Hybrid Energy Storage based Photovoltaic Piconets and the Isolated Net Running Comprehensive Control System in the Campus Environment

In this paper, we conduct research on the hybrid energy storage based photovoltaic piconets and the isolated net running comprehensive control system in the campus environment. Piconets flexible operation mode and the efficient power supply without perfect stable control. Micro the early stage of network development related to micro network operation concepts are modeled on the control of large power system. Our proposed approach is proven to be effective and feasible through the numerical simulation and theoretical analysis which will be meaningful.

Efficient fluorescence detection of a single neutral atom with low background in a microscopic optical dipole trap

A single cesium atom is trapped in a far-off-resonance optical dipole trap （FORT） from the magneto-optical trap （MOT） and directly imaged by using a charge-coupled device （CCD） camera. The binary single-atom steps and photon anti-bunching are observed by a photon-counting-based HBT system using fluorescence light. The average atom dwelling time in the FORT is about 9 s. To reduce the background noise in the detection procedure we employ a weak probe laser tuned to the D1 line to il- lurninate the single atom from the direction perpendicular to the large-numerical-aperture collimation system. The second or- der degree of coherence g（2）（r）=0.12_＋0.02 is obtained directly from the fluorescence light of the single atom without deducting the background. The background light has been suppressed to 10 counts per 50 ms, which is much lower compared with the reported results. The measured g（2）（r） is in good agreement with theoretical analysis. The system provides a simple and effi- cient method to manipulate and measure single neutral atoms, and opens a way to create an efficient controlled single-photon source.

Thick SU8 microstructures prepared by broadband UV lithography and the applications in MEMS devices

Thick SU8 microstructures with high aspect ratio and good side wall quality were fabricated by ultraviolet （UV） lithography, and the processing parameters were comprehensively studied. It proves that the adhesion of SU8 on silicon （Si） substrates is influenced by Si-OH on the surface, and can be improved by the HF treatment. Cracks and de- lamination are caused by large internal stress during fabrication process, and are significantly influenced by soft bake and post-exposure bake processes. The internal stress is reduced by a low post-exposure bake exposure tem- perature of 85 ℃ for 40 rain. A three-step soft bake enhances the reflowing ofSU8 photoresist, and results in uni- form surface and less air bubbles. The vertical side wall is obtained with the optimized exposure dose of 800 mJ/cm2 for the thickness of 160 μm. Using the optimized fabrication process combined with a proper structure design, dense SU8 micro pillars are achieved with the aspect ratio of 10 and the taper angle of 89.86°. Finally, some possible ap- plications of SU8 in micro-electromechanical system （MEMS） device are developed and demonstrated.