This study describes a novel micro proton exchange membrane fuel cell(PEMFC)(active area,2.5 cm2).The flow field plate is manufactured by applying micro-electromechanical systems(MEMS) technology to silicon substrates...This study describes a novel micro proton exchange membrane fuel cell(PEMFC)(active area,2.5 cm2).The flow field plate is manufactured by applying micro-electromechanical systems(MEMS) technology to silicon substrates to etch flow channels without a gold-coating.Therefore,this investigation used MEMS technology for fabrication of a flow field plate and presents a novel fabrication procedure.Various operating parameters,such as fuel temperature and fuel stoichiometric flow rate,are tested to optimize micro PEMFC performance.A single micro PEMFC using MEMS technology reveals the ideal performance of the proposed fuel cell.The optimal power density approaches 232.75 mW·cm-1 when the fuel cell is operated at ambient condition with humidified,heated fuel.展开更多
We aimed to develop a process technology for constructing a carbon-based micro-electromechanical system that does not require a high-temperature and high-energy process. A HOPG （highly oriented pyrolytic graphite） c...We aimed to develop a process technology for constructing a carbon-based micro-electromechanical system that does not require a high-temperature and high-energy process. A HOPG （highly oriented pyrolytic graphite） crystal microsheet was prepared by exfoliation. Cantilevers and doubly clamped beams were patterned using a photoresist. The HOPG microsheet was attached by using a tantalum layer. We fabricated cantilevers and a doubly clamped beam by controlling the thickness of the HOPG microsheet and then measured the first resonance frequency. The measurements suggest a need to improve the stiffness of the beam.展开更多
基金Supported by the National Science Council (NSC 97-2221-E-009-067)
文摘This study describes a novel micro proton exchange membrane fuel cell(PEMFC)(active area,2.5 cm2).The flow field plate is manufactured by applying micro-electromechanical systems(MEMS) technology to silicon substrates to etch flow channels without a gold-coating.Therefore,this investigation used MEMS technology for fabrication of a flow field plate and presents a novel fabrication procedure.Various operating parameters,such as fuel temperature and fuel stoichiometric flow rate,are tested to optimize micro PEMFC performance.A single micro PEMFC using MEMS technology reveals the ideal performance of the proposed fuel cell.The optimal power density approaches 232.75 mW·cm-1 when the fuel cell is operated at ambient condition with humidified,heated fuel.
文摘We aimed to develop a process technology for constructing a carbon-based micro-electromechanical system that does not require a high-temperature and high-energy process. A HOPG （highly oriented pyrolytic graphite） crystal microsheet was prepared by exfoliation. Cantilevers and doubly clamped beams were patterned using a photoresist. The HOPG microsheet was attached by using a tantalum layer. We fabricated cantilevers and a doubly clamped beam by controlling the thickness of the HOPG microsheet and then measured the first resonance frequency. The measurements suggest a need to improve the stiffness of the beam.
