Y2000-62027-202 0006524能预测微加工加速度计静摩擦力的可靠性方法=Reli-ability methodology for prediction of micromachined ac-celerometer stiction[会,英]/Hartzell,A.& Woodilla,D.//1999 IEEE International Reliability...Y2000-62027-202 0006524能预测微加工加速度计静摩擦力的可靠性方法=Reli-ability methodology for prediction of micromachined ac-celerometer stiction[会,英]/Hartzell,A.& Woodilla,D.//1999 IEEE International Reliability Physics Sympo-sium.—202～205(UC)展开更多
文摘Y2000-62027-202 0006524能预测微加工加速度计静摩擦力的可靠性方法=Reli-ability methodology for prediction of micromachined ac-celerometer stiction[会,英]/Hartzell,A.& Woodilla,D.//1999 IEEE International Reliability Physics Sympo-sium.—202～205(UC)
