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大位移自对准光开关微动作器的模拟和制作 被引量:2
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作者 王浙辉 李铁 王跃林 《功能材料与器件学报》 CAS CSCD 2003年第3期313-318,共6页
报导了一种新型静电驱动扭转梁大位移微机械光开关微动作器的模拟、设计和制作。模拟结果表明,该微动作器的第一模态频率远低于第二模态,镜子的位移由梁的扭转引起。在32.8V的电压驱动下,上电极的前端位移是69.6μm,镜子的有效位移是57... 报导了一种新型静电驱动扭转梁大位移微机械光开关微动作器的模拟、设计和制作。模拟结果表明,该微动作器的第一模态频率远低于第二模态,镜子的位移由梁的扭转引起。在32.8V的电压驱动下,上电极的前端位移是69.6μm,镜子的有效位移是57μm。测到第一模态频率是500Hz。利用本结构可成功地解决开关速度和大位移的矛盾。这样的位移足够使用Corning OptiFocus Collimating Lensed Fiber来对准,从而获得低插入损耗。 展开更多
关键词 光开关 微动作器 大位移 静电驱动 有限元分析 设计 制作 机械 光通信 自对准
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NEW ROD-SHAPED ULTRASONIC MICROMOTOR AND ITS DRIVING PRINCIPLE 被引量:3
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作者 朱华 董迎晖 +1 位作者 马相林 赵淳生 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI 2006年第1期15-19,共5页
A new rod-shaped traveling wave ultrasonic micromotor is developed. In the micromotor, five pieces of piezoelectric ceramics clamped by two metal cylinders are used as its stator. The driving principle of the rodshape... A new rod-shaped traveling wave ultrasonic micromotor is developed. In the micromotor, five pieces of piezoelectric ceramics clamped by two metal cylinders are used as its stator. The driving principle of the rodshaped ultrasonic motor is simulated. The stator structure and the position to lay these piezoelectric ceramics are calculated to improve the electro mechanical conversion efficiency. A flexible rotor is designed to reduce the radial slip between the stator and the rotor, and to improve the motor efficiency. The prototype motor and its micror driver are tested. The motor is 9 mm in out-diameter, 15 mm in length and 3.2 g in weight. When the motor operates with the first bending frequency (72 kHz) of the stator, its maximal rotational speed and the torque reach 520 r/rain and 4.5 mN · m. Results show that the motor has good stability. The speed fluctuation is controlled within 3% by the frequency automatic tracking technique. 展开更多
关键词 ultrasonic motor micro electro mechanical system MICROMOTOR ACTUATOR
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其他
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《中国光学》 CAS 2004年第3期79-79,共1页
O462.3 2004032210 光电阴极积分灵敏度测试仪=Measuring system 0f photocathode integral sensitivity[刊,中]/高岳(北京理工大学光电工程系.北京(100081)),王仲春…∥应用光学.—2003,24(3).
关键词 积分灵敏度 测试仪 光电阴极 机械光开关 光电变色 应用光学 自对准 微动作器 大位移 电子
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Hardware Neural Networks Controlled MEMS Rotational Actuators and Application to Micro Robot
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作者 Fumio Uchikoba Minami Takato Ken Saito 《Journal of Mechanics Engineering and Automation》 2012年第8期499-506,共8页
Hardware neural networks controlled rotational actuators and application to an insect type micro robot are reported in this paper. Millimeter size rotational actuators are fabricated by combining MEMS (Micro Electro ... Hardware neural networks controlled rotational actuators and application to an insect type micro robot are reported in this paper. Millimeter size rotational actuators are fabricated by combining MEMS (Micro Electro Mechanical System) technology and shape memory alloy based artificial muscle wires. The actuator is composed of a pair of disk rotators and each rotor is suspended by four artificial muscle wires that are connected to the silicon frame. The rotational motion is generated by flowing the electrical current to each wire successively. Two actuators of different sizes are fabricated. The large actuator shows the displacement of 0.5 mm at the cycle time of 4 s. The small actuator shows 0.3 mm at 2 s. For controlling the actuator, the hardware neural networks are used. The hardware neural networks are composed of electrical circuits imitating cell bodies, excitatory synapses and inhibitory synapses. Four signal ports are extracted from four pairs of excitatory and inhibitory neurons and they are connected to the actuator. The small actuator is applied to the robot and built in the mid body of the robot. The shaft of the actuator is connected to the link mechanisms that transform the rotational motion to the locomotion. The appearance dimensions of the robot are 4.0, 2.7, 2.5 mm width, length and height. The robot performs forward and backward foot step like insects. The speed is 26.4 mm·min^-1 and the stepping width is 0.88 mm. Also, the robot changes the direction by external trigger pulses. 展开更多
关键词 MEMS micro robot hardware neural networks ACTUATOR artificial muscle wire biomimetics.
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