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压电微动平台的精密运动控制
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作者 于保军 司苏美 +1 位作者 林洁琼 靖贤 《机械设计与制造》 北大核心 2018年第A02期40-42,46,共4页
宏微复合精密定位平台主要应用于微电子制造以实现高速、高精度、大行程定位。压电微动定位平台主要表现出滞后非线性,是实现精密运动控制的巨大障碍。主要针对双光子聚合加工系统中压电微动平台定位精度较低以及会产生抖动等问题进行分... 宏微复合精密定位平台主要应用于微电子制造以实现高速、高精度、大行程定位。压电微动定位平台主要表现出滞后非线性,是实现精密运动控制的巨大障碍。主要针对双光子聚合加工系统中压电微动平台定位精度较低以及会产生抖动等问题进行分析,采用一种新颖的使用具有不确定性和干扰估计的RBF网络自适应鲁棒滑模控制方案,该方案可以实现压电微动定位平台的精确运动控制。并对所辨识的模型采用Matlab的Simulink模块进行仿真,其仿真结果证实了所提出控制方案的优越性,验证了模型的有效性。此外,也验证了存在模型干扰和外部干扰的情况下该控制器具有良好的鲁棒性和自适应能力。报告的RBF网络自适应鲁棒滑模控制方法也可以扩展到其他类型系统的鲁棒控制中。 展开更多
关键词 迟滞非线性 精密运动控制 不确定性和干扰估计 RBF网络自适应鲁棒滑模控制 压电纳米微动定位平台
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宏/微双重驱动技术的研究和应用现状 被引量:8
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作者 陈洪涛 程光明 +2 位作者 肖献强 于保军 杨志刚 《机械设计与制造》 北大核心 2007年第1期153-155,共3页
宏/微双重驱动技术因具备大行程、快速响应、高精度定位等特点,近年来在微操作领域得到了广泛的应用。总结了目前常用的宏/微双驱动的宏、微定位部件,并分析了它们各自的优缺点及使用范围;并介绍了常见的宏/微双重驱动系统的集成方式,... 宏/微双重驱动技术因具备大行程、快速响应、高精度定位等特点,近年来在微操作领域得到了广泛的应用。总结了目前常用的宏/微双驱动的宏、微定位部件,并分析了它们各自的优缺点及使用范围;并介绍了常见的宏/微双重驱动系统的集成方式,以及国内外这方面研究取得的成果。为即将从事这方面研究的人员提供了很好的参考。 展开更多
关键词 微双重驱动 微操作 宏动定位 微动定位
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变刚度微定位平台控制策略的鲁棒性研究
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作者 蔡炳彧 卢旭锦 陈超然 《机械工程与自动化》 2024年第6期50-52,共3页
柔性微动平台大多数采用柔性铰链作为导向机构,在实际工况下,微动平台除了系统未知扰动外,柔性铰链本身由于频繁的拉伸变形,使得微动平台的刚度难免发生改变,由此导致控制系统的被控对象数学模型发生变化,影响系统控制精度与性能。为进... 柔性微动平台大多数采用柔性铰链作为导向机构,在实际工况下,微动平台除了系统未知扰动外,柔性铰链本身由于频繁的拉伸变形,使得微动平台的刚度难免发生改变,由此导致控制系统的被控对象数学模型发生变化,影响系统控制精度与性能。为进一步提高柔性微动平台的鲁棒性,设计了自抗扰控制算法,通过ESO(扩张状态观测器)进行估计补偿。最后在变刚度工况下,进行PID和自抗扰控制策略的仿真对比。相比PID,自抗扰控制具有强鲁棒性,刚度变化对微动平台控制性能几乎没有影响,并且在最优控制下定位精度提高了一个分辨率,整定时间缩短了75.9%。 展开更多
关键词 变刚度 微动定位平台 自抗扰控制 鲁棒性
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Automatically positioning microseismic sources in mining by the stereo tomographic method using full wavefields 被引量:3
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作者 缪华祥 姜福兴 +3 位作者 宋雪娟 宋建勇 杨淑华 焦俊如 《Applied Geophysics》 SCIE CSCD 2012年第2期168-176,234,235,共11页
For microseisimic monitoring it is difficult to determine wave modes and their propagation velocity. In this paper, we propose a new method for automatically inverting in real time the source characteristics of micros... For microseisimic monitoring it is difficult to determine wave modes and their propagation velocity. In this paper, we propose a new method for automatically inverting in real time the source characteristics of microseismic events in mine engineering without wave mode identification and velocities. Based on the wave equation in a spherical coordinate system, we derive a tomographic imaging equation and formulate a scanning parameter selection criterion by which the microseisimic event maximum energy and corresponding parameters can be determined. By determining the maximum energy positions inside a given risk district, we can indentify microseismic events inside or outside the risk districts. The synthetic and field examples demonstrate that the proposed tomographic imaging method can automatically position microseismic events by only knowing the risk district dimensions and range of velocities without identifying the wavefield modes and accurate velocities. Therefore, the new method utilizes the full wavefields to automatically monitor microseismic events. 展开更多
关键词 microseismic full wavefields wavefield mode identification tomographic image source parameters automatic positioning
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Dynamics and Control of Grinding Machine with Micropositioning Workpiece Table 被引量:1
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作者 田延岭 张大卫) 闫兵 《Transactions of Tianjin University》 EI CAS 2006年第3期157-162,共6页
To improve the machining precision of a surface grinding machine, a micropositioning workpiece table with high performance was used as auxiliary infeed mechanism to implement nanometer level positioning and dynamic co... To improve the machining precision of a surface grinding machine, a micropositioning workpiece table with high performance was used as auxiliary infeed mechanism to implement nanometer level positioning and dynamic compensation. To better understand the characteristics of the grinding machine modulated with micropositioning workpiece table, the dynamic model of the grinding system was established with modal synthesis and Lagrange's equation methods. The grinding system was divided into five subsystems. For each subsystem, the generalized kinematic and potential energies were obtained. Accordingly the dynamic model of the grinding system was given in the modal domain. The waviness of the grinding process was achieved based on the wheel and workpiece vibration. A nonlinear proportional integral derivative (PID) controller with differential trackers was developed to realize dynamic control. The simulation results show that the machining accuracy of the workpiece can be effectively improved by utilizing the micropositioning workpiece table to implement dynamic compensation. An experimental test was carried out to verify the proposed method, and the waviness of the workpiece can be reduced from 0.46 μm to 0.10 μm. 展开更多
关键词 micropositioning workpiece table surface grinding dynamic modeling nonlinear PID controller
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Vibration-Driven Microrobot Positioning Methodologies for Nonholonomic Constraint Compensation
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作者 Kostas Vlachos Dimitris Papadimitriou Evangelos Papadopoulos 《Engineering》 SCIE EI 2015年第1期66-72,共7页
This paper presents the formulation and practical implementation of positioning methodologies that compensate for the nonholonomic constraints of a mobile microrobot that is driven by two vibrating direct current(DC) ... This paper presents the formulation and practical implementation of positioning methodologies that compensate for the nonholonomic constraints of a mobile microrobot that is driven by two vibrating direct current(DC) micromotors. The open-loop and closed-loop approaches described here add the capability for net sidewise displacements of the microrobotic platform. A displacement is achieved by the execution of a number of repeating steps that depend on the desired displacement, the speed of the micromotors, and the elapsed time. Simulation and experimental results verified the performance of the proposed methodologies. 展开更多
关键词 MICROROBOTICS vibration micromotor actuationnonholonomic planning nonholonomic constraints compen-sation
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