纳米级微动试验台的隔振设计研究

通过二维隔振系统的力学分析 ,得到关于质量、刚度、阻尼比三方面结论 ,指导多自由度隔振系统的设计 ,设计出了纳米级微动试验台的隔振系统。仿真实验表明 ,该系统具有良好的隔振效果。此隔振设计方法对超精密机床。

纳米级微动试验台隔振理论研究

隔振技术是纳米技术中的关键问题之一。通过二维隔振系统的力学分析,设计出了纳米级微动试验台的隔振系统。该系统具有良好的隔振效果,对超精密机床、超精定位机构等的超低传递率隔振设计有一定的参考价值。

ISOLATION DESIGN AND SIMULATIONAL EXPERIMENT OF NANOMETER MICRO MOVEMENT TEST-BED

The relation of mass, stiffness and rate of damping is obtained by using the mechanical analysis of the obstructive vibration system of two dimensions for the design of the obstructive vibration system of more freedom and the micro vibration test bed. The result of stimulational experiment indicates that the isolation of vibration of this system is satisfactory. The design method of vibration can be used as the reference to ultra precision machine tool, super micro orientation machanism and so on.