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微型机电系统的进展 被引量:11
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作者 周兆英 叶雄英 +1 位作者 胡敏 尤政 《仪器仪表学报》 EI CAS CSCD 北大核心 1996年第S1期20-25,30,共7页
微型机电系统技术是一个新兴的技术领域.本文论述其多学科交叉的性质、研究领域、相关设计理论研究、开放的工艺基地、特种精密加工、产业化问题和发展MEMS的问题。
关键词 微型机电系统技术 纳米技术 系统 执行器 精密加工 微细加工 微型机 微细火花加工 产业化 微传感器
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微型机电系统技术
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作者 李德孚 《现代军事》 1996年第10期14-15,共2页
80年代以来,人们在意识到利用半导体批量制造技术可以生产许多宏观机械系统微米尺度的样机后,就在小型机械制造领域展开一场革命,导致了微型机电系统(MEMS)的出现,如微米尺度的压力传感器、加速度计、化学传感器和各种阀门等装置或器件... 80年代以来,人们在意识到利用半导体批量制造技术可以生产许多宏观机械系统微米尺度的样机后,就在小型机械制造领域展开一场革命,导致了微型机电系统(MEMS)的出现,如微米尺度的压力传感器、加速度计、化学传感器和各种阀门等装置或器件。MEMS是继大规模集成电路之后,微观尺度生产领域制造技术的又一次飞跃。目前,MEMS已从实验室的研究探索走向实际应用,并引起发达国家工业界和军方人士的广泛关注和兴趣,投入大量资金进行开发。 MEMS具有很高的军民两用度,既能引起生产领域发生根本变化,给国民经济发展带来巨大的利益,在军事方面的应用也有着深远的影响,可能改变未来战争的面貌。90年代以来,国际上已拉开了MEMS竞争的架势。 展开更多
关键词 压力传感器 大规模集成 微型加速度计 制造技术 微米尺度 微型机电系统技术 化学传感器 小型机械 生产领域 机械系统
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Preparation and Electrochemical Characteristics of Three-dimensional Manganese Oxide Micro-supercapacitor Electrode
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作者 Chun-ming Wen Zhi-yu Wen +1 位作者 Zheng You Xiao-feng Wang 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2012年第2期209-213,I0004,共6页
In order to increase the electrode surface area and enhance the charge storage capacity, we study the micro electro mechanical system technology to fabricate three-dimensional high aspect ratio micro-electrode structu... In order to increase the electrode surface area and enhance the charge storage capacity, we study the micro electro mechanical system technology to fabricate three-dimensional high aspect ratio micro-electrode structure based on glass. The anodic constant potential method is employed to deposit manganese oxide as electroactive substances on the micro-electrode surface. Cyclic voltammetry and constant current charge-discharge method are both used to prepare electrode electrochemical performance testing, with a two-dimensional electrode without structure for comparison. Experimental results show that three-dimensional elec- trode structure can effectively enhance the charge storage capacity. At 1.0 mA/cm2 charge- discharge density, the three-dimensional electrode shows a capacitance of 17.88 mF/cm2, seven times higher than the two-dimensional electrode. 展开更多
关键词 Micro-supercapacitor Micro electro mechanical system Three-dimensional electrode Manganese oxide
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Applications of MEMS devices in nanosatellite
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作者 You Zheng Li Bin Yu Shijie Zhang Gaofei 《Engineering Sciences》 EI 2012年第5期33-35,57,共4页
micro-electro-mechanical system (MEMS) device has the advantages of both electronic system and mechanical system. With the development of MEMS devices for satellite, it is possible to establish much lighter and smal... micro-electro-mechanical system (MEMS) device has the advantages of both electronic system and mechanical system. With the development of MEMS devices for satellite, it is possible to establish much lighter and smaller nanosatellites with higher performance and longer lifecyele. The power consumption of MEMS devices is usually much lower than that of traditional devices, which will greatly reduce the consumption of power. For its small size and simple architecture, MEMS devices can be easily integrated together and achieve redundancy. Launched on April 18, 2004, NS - 1 is a nanosatellite for science exploration and MEMS devices test. A mass of science data and images were acquired during its running. NS - 1 weights less than 25 kg. It consists of several MEMS devices, including one miniature inertial measurement unit(MIMU) , three micro complementary metal oxide semiconductor (CMOS)cameras, one sun sensor, three momentum wheels, and one micro magnetic sensor. By applying micro components based on MEMS technology, NS - 1 has made success in the experiments of integrative design, manufacture, and MEMS devices integration. In this paper, some MEMS devices for nanosatellite and picosatellite are introduced, which have been tested on NS -1 nanosatellite or on the ground. 展开更多
关键词 MEMS devices NS - 1 nanosatellite lighter weight and lower power consumption
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