A novel method to measure the temperature on the surface of micro-hotplate was presented. The tiny fiber probe and the optical power meter were employed to measure the sample radialization power. By means of comparing...A novel method to measure the temperature on the surface of micro-hotplate was presented. The tiny fiber probe and the optical power meter were employed to measure the sample radialization power. By means of comparing the relationship between the radialization power and the temperature, sample surface temperature can be discerned accurately. Such an approach has provided more accuracy than traditional temperature measurements. The experimental result based on this method is quite similar to that of simulation by the finite element analysis (FEA) software of Ansys in theory. This measurement is very useful for measuring temperature for these micro samples prone to be untouchable.展开更多
基金Project (60104006) supported by the National Natural Science Foundation of China Project(20030322) supported by the Science Technology Office of Jilin Province
文摘A novel method to measure the temperature on the surface of micro-hotplate was presented. The tiny fiber probe and the optical power meter were employed to measure the sample radialization power. By means of comparing the relationship between the radialization power and the temperature, sample surface temperature can be discerned accurately. Such an approach has provided more accuracy than traditional temperature measurements. The experimental result based on this method is quite similar to that of simulation by the finite element analysis (FEA) software of Ansys in theory. This measurement is very useful for measuring temperature for these micro samples prone to be untouchable.
