This letter proposes a novel design of a Micro Electro Mechanical System （MEMS） device featuring a metal grating vibratory mierostructure driven by electrostatic force to sense the spatial electric field. Due to the...This letter proposes a novel design of a Micro Electro Mechanical System （MEMS） device featuring a metal grating vibratory mierostructure driven by electrostatic force to sense the spatial electric field. Due to the advantages in slide-film damping and large vibration amplitude, such a device makes atmospheric packaging a low-cost option for practical manufacture. In this letter, we present the operating principles and specifications, the design structure, as well as the finite element simulation. Computational analysis shows that our design obtains good results in device parameters setting, while its simplicity and low-cost features make it an attractive solution for applications.展开更多
In order to measure the position and orientation of in-vivo medical micro-devices without the line-of- sight constraints, a wireless magnetic sensor is developed for an electromagnetic localization method. In the elec...In order to measure the position and orientation of in-vivo medical micro-devices without the line-of- sight constraints, a wireless magnetic sensor is developed for an electromagnetic localization method. In the electromagnetic localization system, the wireless magnetic sensor is embedded in the micro-devices to measure alternating magnetic signals. The wireless magnetic sensor is composed of an induction coil, a signal processor, a radio frequency （R.F） transmitter, a power manager and batteries. Based on the principle of electromagnetic induction, the induction coil converts the alternating magnetic signals into electrical signals. Via the RF transmitter, the useful data am wirelessly sent outside the body. According to the relation between the magnetic signals and the location, the position and orientation of the micro-devices can be calculated. The experiments demonstrate the feasibility of localizing in-vivo medical micro-devices with the wireless magnetic sensor. The novel localization system is accurate and robust.展开更多
基金Supported by the National Natural Science Foundation of China (No.60172001).
文摘This letter proposes a novel design of a Micro Electro Mechanical System （MEMS） device featuring a metal grating vibratory mierostructure driven by electrostatic force to sense the spatial electric field. Due to the advantages in slide-film damping and large vibration amplitude, such a device makes atmospheric packaging a low-cost option for practical manufacture. In this letter, we present the operating principles and specifications, the design structure, as well as the finite element simulation. Computational analysis shows that our design obtains good results in device parameters setting, while its simplicity and low-cost features make it an attractive solution for applications.
基金Sup.ported by the High TechnologyResearch and Development Programme of China （No.2006AA04Z368）, the National Natural Science Foundation of China （No. 30900320, 30570485） and Innovation Program of Shanghai Municipal Education Commission （No. 10YZ93）.
文摘In order to measure the position and orientation of in-vivo medical micro-devices without the line-of- sight constraints, a wireless magnetic sensor is developed for an electromagnetic localization method. In the electromagnetic localization system, the wireless magnetic sensor is embedded in the micro-devices to measure alternating magnetic signals. The wireless magnetic sensor is composed of an induction coil, a signal processor, a radio frequency （R.F） transmitter, a power manager and batteries. Based on the principle of electromagnetic induction, the induction coil converts the alternating magnetic signals into electrical signals. Via the RF transmitter, the useful data am wirelessly sent outside the body. According to the relation between the magnetic signals and the location, the position and orientation of the micro-devices can be calculated. The experiments demonstrate the feasibility of localizing in-vivo medical micro-devices with the wireless magnetic sensor. The novel localization system is accurate and robust.
