In this paper,a new method combining focused ion beam(FIB)and scanning electron microscope(SEM)Moirétechnique for the measurement of residual stress at micro scale is proposed.The FIB is employed to introduce str...In this paper,a new method combining focused ion beam(FIB)and scanning electron microscope(SEM)Moirétechnique for the measurement of residual stress at micro scale is proposed.The FIB is employed to introduce stress relief like the macro ring-core method and fabricate gratings with a frequency of 5000 lines/mm on the measured area of the sample surface.Three groups of gratings in different radial directions are manufactured in order to form a micro-scale strain rosette.After milling ring-core by FIB,the deformation incurred by relief of the stress will be recorded with the strain rosette.The displacement/strain field can be measured using SEM scanning Moiréwith random phase-shifting algorithm.In this study,the Nickel alloy GH4169 sample(which was processed by laser shock peening)is selected as a study object to determine its residual stress.The results showed that the components of the in-plane principal stresses were-359 MPa and-207 MPa,respectively,which show good agreement with the results obtained from the available literature.展开更多
基金supported by the National Basic Research Program of China(Grant Nos.2010CB631005 and 2011CB606105)the National Natural Science Foundation of China(Grant Nos.90916010,11172151 and 11232008)+1 种基金Specialized Research Fund for the Doctoral Program of Higher Education(Grant No.20090002110048)Tsinghua University Initiative Scientific Research Program
文摘In this paper,a new method combining focused ion beam(FIB)and scanning electron microscope(SEM)Moirétechnique for the measurement of residual stress at micro scale is proposed.The FIB is employed to introduce stress relief like the macro ring-core method and fabricate gratings with a frequency of 5000 lines/mm on the measured area of the sample surface.Three groups of gratings in different radial directions are manufactured in order to form a micro-scale strain rosette.After milling ring-core by FIB,the deformation incurred by relief of the stress will be recorded with the strain rosette.The displacement/strain field can be measured using SEM scanning Moiréwith random phase-shifting algorithm.In this study,the Nickel alloy GH4169 sample(which was processed by laser shock peening)is selected as a study object to determine its residual stress.The results showed that the components of the in-plane principal stresses were-359 MPa and-207 MPa,respectively,which show good agreement with the results obtained from the available literature.
