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利用微悬梁器技术的光学和红外探测 被引量:1
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作者 P.I.Oden 贡树行 《红外》 CAS 1998年第4期1-10,共10页
利用微悬梁器技术**证明对微机械光学和红外的探测是可行的。微悬梁器技术提供了一个简单的方法来研制单元和多元传感器,用于可见光和红外辐射的探测。这类传感器与量子探测器或热探测器比较起来,体积更小,灵敏度更高,成本更低。表面镀... 利用微悬梁器技术**证明对微机械光学和红外的探测是可行的。微悬梁器技术提供了一个简单的方法来研制单元和多元传感器,用于可见光和红外辐射的探测。这类传感器与量子探测器或热探测器比较起来,体积更小,灵敏度更高,成本更低。表面镀着一层热吸收层的微悬梁器会弯曲,这是由双金属效应产生的不均匀应力所引起的。微悬梁器的弯曲程度取决于吸热总量,并可利用光学方法或电学方法探测出来,例如可利用在压阻悬梁方面的电阻变化进行探测。微悬梁传感器有两个独特的热响应时间常数:快的一个(τ_1(热)<1ms)和慢的一个(τ_2(热)~10ms)。测出这种器件的噪声等效温差NEDT=90 mK。当未镀吸收层的微悬梁器受到一束低功率二极管激光(波长λ=786 nm)的辐照时,发现噪声等效功率NEP=3.5 nW/Hz^(1/2),相当于调制频率为20 Hz时的比探测率 D~*= 3.6×10~7cm·Hz^(1/2)/W。 展开更多
关键词 红外探测 微悬梁器 光学探测
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Performance analysis of microcantilever array sensing 被引量:2
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作者 ZHOU XiaRong LIU Hong +2 位作者 WU ShangQuan ZHANG QingChuan WU XiaoPing 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2017年第11期1674-1680,共7页
Array sensing is increasingly important in the development of microcantilever(MC) sensors, and response consistency is the foundation for MC array sensing. In the present work, we investigated the response consistency... Array sensing is increasingly important in the development of microcantilever(MC) sensors, and response consistency is the foundation for MC array sensing. In the present work, we investigated the response consistency of MC array sensing. The responses of two types of commercially available MC arrays were studied under conditions of temperature change, solution replacement and biochemical molecular interaction. For the thermal response, the deflections of both arrays were found to be proportional to temperature, and the responses of the MCs in both arrays were consistent with each other. The thermal response sensitivity for each MC during temperature increase and decrease also showed good consistency. Moreover, the MC array showed good consistency for the response induced by solution replacement. Finally, we also demonstrated that the MC array had good consistency in biochemical detection, exemplified by aflatoxin antibody-anti gen binding. The good response consistency makes this technology reliable and accurate for biochemical sensing. 展开更多
关键词 microcantilever array thermal response environmental disturbance biochemical detection
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