The quality of the micro-mechanical machining outcome depends significantly on the tracking performance of the miniaturized linear motor drive precision stage. The tracking behavior of a direct drive design is prone t...The quality of the micro-mechanical machining outcome depends significantly on the tracking performance of the miniaturized linear motor drive precision stage. The tracking behavior of a direct drive design is prone to uncertainties such as model parameter variations and disturbances. Robust optimal tracking controller design for this kind of precision stages with mass and damping ratio uncertainties was researched. The mass and damping ratio uncertainties were modeled as the structured parametric uncertainty model. An identification method for obtaining the parametric uncertainties was developed by using unbiased least square technique. The instantaneous frequency bandwidth of the external disturbance signals was analyzed by using short time Fourier transform technique. A two loop tracking control strategy that combines the p-synthesis and the disturbance observer （DOB） techniques was proposed. The p-synthesis technique was used to design robust optimal controllers based on structured uncertainty models. By complementing the/z controller, the DOB was applied to further improving the disturbance rejection performance. To evaluate the positioning performance of the proposed control strategy, the comparative experiments were conducted on a prototype micro milling machine among four control schemes： the proposed two-loop tracking control, the single loop μ control, the PID control and the PID with DOB control. The disturbance rejection performances, the root mean square （RMS） tracking errors and the performance robustness of different control schemes were studied. The results reveal that the proposed control scheme has the best positioning performance. It reduces the maximal errors caused by disturbance forces such as friction force by 60% and the RMS errors by 63.4% compared with the PID control. Compared to PID with DOB control, it reduces the RMS errors by 29.6%.展开更多
A Micro Electrical Discharge Machining (MEDM) equipment was developed in this paper,on which the CNC interpolation for 3-axis linkage movement could be realized easily. By this micro-EDM equipment,the fabrication proc...A Micro Electrical Discharge Machining (MEDM) equipment was developed in this paper,on which the CNC interpolation for 3-axis linkage movement could be realized easily. By this micro-EDM equipment,the fabrication process of microelectrode,micro hole,silicon wafer and complex microstructure was discussed. The process rules of machining efficiency and the relative electrode wear rate as well as the machining mechanism and performance of silicon micro-EDM were also researched. Machining experiments showed that the microelectrode diameter as small as 6 μm and the micro hole with minimum size of 10 μm could be obtained steadily,and the maximum aspect ratios of microelectrode and micro hole were over 25 and 10 respectively. And silicon micro-EDM experiments showed that the micro beam with the aspect ratios over 15 could be obtained easily. And a micro beam with minimum size of 23 μm width on a silicon wafer with 420 μm thickness was achieved. At last,the microstructure machining technology for micro-EDM was also discussed. And a micro-facial sculpture with free space curved surface and size of 1 mm×0.3 mm×0.18 mm was also machined successfully.展开更多
This paper addresses double-loop robust tracking controller design of the miniaturized linear motor drive precision stage with mass and damping ratio uncertainties. As an inner-loop, a disturbance observer （DOB） is ...This paper addresses double-loop robust tracking controller design of the miniaturized linear motor drive precision stage with mass and damping ratio uncertainties. As an inner-loop, a disturbance observer （DOB） is employed to suppress exogenous low frequency disturbances such as friction and cutting force. To further eliminate the residual disturbance and to guarantee the robust tracking to the reference input, μ-synthesis outer-loop controller is designed. For eliminating the steady state error, a technique is proposed to design the μ-synthesis outer-loop controller with an integrator. A guideline to select the bandwidth of the Q-filter in the DOB is provided. Simulations using a model of a prototype micro-milling machine indicate that the proposed outer-loop synthesis scheme is superior to the H∞ suboptimal control in disturbance rejection performance and steady state tracking performance. Furthermore, it is shown experimentally that the proposed double-loop robust tracking controller improves the tracking performance of the stage by 29.6% over PID control with a DOB inner-loop.展开更多
基金Project(50875257) supported by the National Natural Science Foundation of China
文摘The quality of the micro-mechanical machining outcome depends significantly on the tracking performance of the miniaturized linear motor drive precision stage. The tracking behavior of a direct drive design is prone to uncertainties such as model parameter variations and disturbances. Robust optimal tracking controller design for this kind of precision stages with mass and damping ratio uncertainties was researched. The mass and damping ratio uncertainties were modeled as the structured parametric uncertainty model. An identification method for obtaining the parametric uncertainties was developed by using unbiased least square technique. The instantaneous frequency bandwidth of the external disturbance signals was analyzed by using short time Fourier transform technique. A two loop tracking control strategy that combines the p-synthesis and the disturbance observer （DOB） techniques was proposed. The p-synthesis technique was used to design robust optimal controllers based on structured uncertainty models. By complementing the/z controller, the DOB was applied to further improving the disturbance rejection performance. To evaluate the positioning performance of the proposed control strategy, the comparative experiments were conducted on a prototype micro milling machine among four control schemes： the proposed two-loop tracking control, the single loop μ control, the PID control and the PID with DOB control. The disturbance rejection performances, the root mean square （RMS） tracking errors and the performance robustness of different control schemes were studied. The results reveal that the proposed control scheme has the best positioning performance. It reduces the maximal errors caused by disturbance forces such as friction force by 60% and the RMS errors by 63.4% compared with the PID control. Compared to PID with DOB control, it reduces the RMS errors by 29.6%.
文摘A Micro Electrical Discharge Machining (MEDM) equipment was developed in this paper,on which the CNC interpolation for 3-axis linkage movement could be realized easily. By this micro-EDM equipment,the fabrication process of microelectrode,micro hole,silicon wafer and complex microstructure was discussed. The process rules of machining efficiency and the relative electrode wear rate as well as the machining mechanism and performance of silicon micro-EDM were also researched. Machining experiments showed that the microelectrode diameter as small as 6 μm and the micro hole with minimum size of 10 μm could be obtained steadily,and the maximum aspect ratios of microelectrode and micro hole were over 25 and 10 respectively. And silicon micro-EDM experiments showed that the micro beam with the aspect ratios over 15 could be obtained easily. And a micro beam with minimum size of 23 μm width on a silicon wafer with 420 μm thickness was achieved. At last,the microstructure machining technology for micro-EDM was also discussed. And a micro-facial sculpture with free space curved surface and size of 1 mm×0.3 mm×0.18 mm was also machined successfully.
基金supported by the Canada Foundation for Innovation (CFI) and the National Natural Science Foundation of China (Grant No.50875257)
文摘This paper addresses double-loop robust tracking controller design of the miniaturized linear motor drive precision stage with mass and damping ratio uncertainties. As an inner-loop, a disturbance observer （DOB） is employed to suppress exogenous low frequency disturbances such as friction and cutting force. To further eliminate the residual disturbance and to guarantee the robust tracking to the reference input, μ-synthesis outer-loop controller is designed. For eliminating the steady state error, a technique is proposed to design the μ-synthesis outer-loop controller with an integrator. A guideline to select the bandwidth of the Q-filter in the DOB is provided. Simulations using a model of a prototype micro-milling machine indicate that the proposed outer-loop synthesis scheme is superior to the H∞ suboptimal control in disturbance rejection performance and steady state tracking performance. Furthermore, it is shown experimentally that the proposed double-loop robust tracking controller improves the tracking performance of the stage by 29.6% over PID control with a DOB inner-loop.
