By using LPCVD SiO 2 and poly silicon as sacrificial layer and cantilever respectively,a poly silicon micromachined RF MEMS(radio frequency microelectronic mechanical system) switch is fabricated.During the fabrica...By using LPCVD SiO 2 and poly silicon as sacrificial layer and cantilever respectively,a poly silicon micromachined RF MEMS(radio frequency microelectronic mechanical system) switch is fabricated.During the fabrication process,the stress of poly silicon is released to prevent poly silicon membrane from bending,and the issue of compatibility between RF switch and IC process technology is also resolved.The low residual tensile stress poly silicon cantilever is obtained by the optimization.The switch is tested,and the preliminary test results show:the pull down voltage is 89V,and the switch speed is about 5μs.The switch provides the potential to build a new fully monolithic integrated RF MEMS for radar and communications applications.展开更多
The mechanical and electric characteristics of a cantilever beam micro opto mechanical switch are studied theoretically,with which the dependence of the flexion on the applied voltage is derived,as well as the form...The mechanical and electric characteristics of a cantilever beam micro opto mechanical switch are studied theoretically,with which the dependence of the flexion on the applied voltage is derived,as well as the formula of the threshold voltage.The applied voltage,having no connection with the width of the beam,is in inverse proportion to the square of the beam's length.The deflection at the beam's tip cannot exceed 1/3 of the distance between two adjacent electrodes.These results are the basis of the switch design and development.展开更多
Micromachined comb-drive electrostatic resonators with folded-cantilever beams were designed and fabricated. A combination of Rayleigh＇s method and finite-element analysis was used to calculate the resonant frequency...Micromachined comb-drive electrostatic resonators with folded-cantilever beams were designed and fabricated. A combination of Rayleigh＇s method and finite-element analysis was used to calculate the resonant frequency drift as we adjusted the device geometry and material parameters. Three micromachined lateral resonant resonators with different beam widths were fabricated. Their resonant frequencies were experimentally measured to be 64.5,147.2, and 255.5kHz, respectively, which are in good agreement with the simulated resonant frequency. It is shown that an improved frequency performance could be obtained on the poly 3C-SiC based device structural material systems with high Young＇s modulus.展开更多
In this paper, we demonstrate experimentally switching a cantilever between its optomechanical bistable states in a low finesse optical cavity. Our experiment shows that the deformation of cantilever can be manipulate...In this paper, we demonstrate experimentally switching a cantilever between its optomechanical bistable states in a low finesse optical cavity. Our experiment shows that the deformation of cantilever can be manipulated by tuning the cavity resonance. When the laser power increases across the threshold value of 110 ?W, optomechanical bistability is induced by strong static photothermal backaction at room temperature. Numerical calculation revealed that the bistable effect originates from the multi-well potential created via the optomechanical interaction. Switching of the cantilever between the bistable states was achieved by tuning the cavity to the corresponding boundaries of the bistable region, where the barrier between the bistable states vanishes.展开更多
文摘By using LPCVD SiO 2 and poly silicon as sacrificial layer and cantilever respectively,a poly silicon micromachined RF MEMS(radio frequency microelectronic mechanical system) switch is fabricated.During the fabrication process,the stress of poly silicon is released to prevent poly silicon membrane from bending,and the issue of compatibility between RF switch and IC process technology is also resolved.The low residual tensile stress poly silicon cantilever is obtained by the optimization.The switch is tested,and the preliminary test results show:the pull down voltage is 89V,and the switch speed is about 5μs.The switch provides the potential to build a new fully monolithic integrated RF MEMS for radar and communications applications.
文摘The mechanical and electric characteristics of a cantilever beam micro opto mechanical switch are studied theoretically,with which the dependence of the flexion on the applied voltage is derived,as well as the formula of the threshold voltage.The applied voltage,having no connection with the width of the beam,is in inverse proportion to the square of the beam's length.The deflection at the beam's tip cannot exceed 1/3 of the distance between two adjacent electrodes.These results are the basis of the switch design and development.
文摘Micromachined comb-drive electrostatic resonators with folded-cantilever beams were designed and fabricated. A combination of Rayleigh＇s method and finite-element analysis was used to calculate the resonant frequency drift as we adjusted the device geometry and material parameters. Three micromachined lateral resonant resonators with different beam widths were fabricated. Their resonant frequencies were experimentally measured to be 64.5,147.2, and 255.5kHz, respectively, which are in good agreement with the simulated resonant frequency. It is shown that an improved frequency performance could be obtained on the poly 3C-SiC based device structural material systems with high Young＇s modulus.
基金supported by the National Basic Research Program of China(Grant No.2012CB922104)the National Natural Science Foundation of China(Grant Nos.11204357,11174027 and 11121403)
文摘In this paper, we demonstrate experimentally switching a cantilever between its optomechanical bistable states in a low finesse optical cavity. Our experiment shows that the deformation of cantilever can be manipulated by tuning the cavity resonance. When the laser power increases across the threshold value of 110 ?W, optomechanical bistability is induced by strong static photothermal backaction at room temperature. Numerical calculation revealed that the bistable effect originates from the multi-well potential created via the optomechanical interaction. Switching of the cantilever between the bistable states was achieved by tuning the cavity to the corresponding boundaries of the bistable region, where the barrier between the bistable states vanishes.
