针对宏-微机械手末端位姿、位置准确度的误差问题,受细胞学操纵子学说的启发,提出了基于操纵子模型的宏-微精密机械手运动的映射关系,研究精密机械手运动的影响因子和细胞学中的操纵子模型,分析机械手精密运动影响因子的影响方式和操纵...针对宏-微机械手末端位姿、位置准确度的误差问题,受细胞学操纵子学说的启发,提出了基于操纵子模型的宏-微精密机械手运动的映射关系,研究精密机械手运动的影响因子和细胞学中的操纵子模型,分析机械手精密运动影响因子的影响方式和操纵子模型的结构组成及其工作机理,结合操纵子模型的工作机理,分析宏-微机械手的控制系统,在此基础上,求解机械手精密运动控制系统的操纵子模型,考虑在几何因素的影响下,得出机械手末端位置在影响因子前后的误差值,通过基于粒子群算法的比例-积分-微分(Proportional-integral-differential,PID)控制器对误差结果进行优化,得出基于时间乘绝对误差积分准则(Time multiplied by the absolute error integral,ITAE)的粒子群算法(Particle swarm optimization,PSO)变化曲线和PID最优的控制参数。结论表明由映射关系推导出的控制系统能够满足一定的精度要求,并能进一步提高机械手的运动精度,为生物控制在机器人中进一步的创新研究提供了理论基础和依据。展开更多
A novel MEMS device boning system is presented. Aiming at the high velocity, high precision and high flexibility requirements, a novel manipulator of planar parallel structure is developed to substitute ordinary X-Y t...A novel MEMS device boning system is presented. Aiming at the high velocity, high precision and high flexibility requirements, a novel manipulator of planar parallel structure is developed to substitute ordinary X-Y table. In addition, the machine vision is implemented to improve the system＇ s flexibility. The initial angular positions of the joints are estimated by the extended Kalman filter algorithm. As a resuh, the manipulator＇s absolute locating accuracy in its workspace is guaranteed indirectly. For any MEMS device, the bonding system itself can be used as measurement equipment to create the device＇ s geometry model, which is the base to do off-line programming. A quite ideal trade-off between the system＇ s flexibility and efficiency is got. Finally, some verified motion specification of the manipulator, the bonding experimental results and the verified qualities of the bonded devices are provided.展开更多
文摘针对宏-微机械手末端位姿、位置准确度的误差问题,受细胞学操纵子学说的启发,提出了基于操纵子模型的宏-微精密机械手运动的映射关系,研究精密机械手运动的影响因子和细胞学中的操纵子模型,分析机械手精密运动影响因子的影响方式和操纵子模型的结构组成及其工作机理,结合操纵子模型的工作机理,分析宏-微机械手的控制系统,在此基础上,求解机械手精密运动控制系统的操纵子模型,考虑在几何因素的影响下,得出机械手末端位置在影响因子前后的误差值,通过基于粒子群算法的比例-积分-微分(Proportional-integral-differential,PID)控制器对误差结果进行优化,得出基于时间乘绝对误差积分准则(Time multiplied by the absolute error integral,ITAE)的粒子群算法(Particle swarm optimization,PSO)变化曲线和PID最优的控制参数。结论表明由映射关系推导出的控制系统能够满足一定的精度要求,并能进一步提高机械手的运动精度,为生物控制在机器人中进一步的创新研究提供了理论基础和依据。
基金Supported by the High Technology Research and Development Programme of China （No. 2003AA404060） and the National Natural Science Foundation of China （No.60405008）.
文摘A novel MEMS device boning system is presented. Aiming at the high velocity, high precision and high flexibility requirements, a novel manipulator of planar parallel structure is developed to substitute ordinary X-Y table. In addition, the machine vision is implemented to improve the system＇ s flexibility. The initial angular positions of the joints are estimated by the extended Kalman filter algorithm. As a resuh, the manipulator＇s absolute locating accuracy in its workspace is guaranteed indirectly. For any MEMS device, the bonding system itself can be used as measurement equipment to create the device＇ s geometry model, which is the base to do off-line programming. A quite ideal trade-off between the system＇ s flexibility and efficiency is got. Finally, some verified motion specification of the manipulator, the bonding experimental results and the verified qualities of the bonded devices are provided.
