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MMST硅片清洗
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作者 R.AIIenBowling 马宏 《微电子技术》 1995年第3期38-41,共4页
德克萨斯仪器公司(TI)、预研规划局(ARPA)和空军三家联合的微电子制造科学与技术(MMST)工程中,片子清洗工艺的目标是开发平片的全干法或气相清洗工艺,旨在全部地取代湿法清洗工艺。HF气相清洗和等离子工艺已成功地用于氧化物、... 德克萨斯仪器公司(TI)、预研规划局(ARPA)和空军三家联合的微电子制造科学与技术(MMST)工程中,片子清洗工艺的目标是开发平片的全干法或气相清洗工艺,旨在全部地取代湿法清洗工艺。HF气相清洗和等离子工艺已成功地用于氧化物、氮化物和金属化后腐蚀的残余物的去除。但是还未找到用于替代炉前清洗的工业标准(RCA)清洗和水冲洗的有效干法工艺。全干法清洗很可能要再花五到十年才能走向成熟。在未来的几年内,特殊的气相或干法清除工艺将会被用来减少化学品的消耗,并因而降低对这类清洗的化学品清理的要求。 展开更多
关键词 MMST 硅片 清洗 微电子制造科学 微电子技术
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空前的MMST:虚拟工厂
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作者 ZacharyJ.Lemnios 郭大琪 《微电子技术》 1995年第3期87-89,共3页
关键词 MMST 微电子技术 微电子制造科学 虚拟工厂
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MMST工程:综述
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作者 RobertR.Doering 郭大琪 《微电子技术》 1995年第3期8-10,共3页
关键词 MMST工程 微电子制造科学 微电子技术
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Magnetization of microorganism cells by thermal decomposition method 被引量:5
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作者 ZHANG DeYuan ZHANG WenQiang CAI Jun 《Science China(Technological Sciences)》 SCIE EI CAS 2011年第5期1275-1280,共6页
The bio-limited forming technology, a new technology organically integrating microbiology, manufacturing science and materials science, is used in the manufacturing of magnetic or conductive microstructures of differe... The bio-limited forming technology, a new technology organically integrating microbiology, manufacturing science and materials science, is used in the manufacturing of magnetic or conductive microstructures of different standard shapes. This paper explores the feasibility of magnetizing microorganism with thermal decomposition method. The principle of thermal decomposition of iron pentacarbonyl has been adopted to investigate the cells of Spirulina (a type of nature micro-helical microorganism) coated with pure iron. Further analysis have been conducted on the observations results of hollow micro-helical magnetic particles form, components and the phase structure obtained by using various tools including optical microscopy, scanning electron microscopy (SEM), energy dispersive X-ray detector (EDX), transmission electron microscopy (TEM), and X-ray diffraction analysis (XRD). Results showed that Spirulina cells could be coated with iron particles after the completion of thermal decomposition process, with well-kept shape of natural helixes and consistent components of different sampling points on the surface layer and thickness of layer. After the heat treatment at 700°C, the type of the surface iron layer formed was α-Fe. The paper also investigates the kinetics of the cell magnetization technology by thermal decomposition. 展开更多
关键词 BIO-MANUFACTURING bio-limited forming hollow micro-helical magnetic particles Fe(CO)5 thermal decomposition
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